IT964629B - Procedimento e dispositivo per la deposizione epitassiale di un mate riale cristallino su un substrato monocristallino da fase liquida - Google Patents

Procedimento e dispositivo per la deposizione epitassiale di un mate riale cristallino su un substrato monocristallino da fase liquida

Info

Publication number
IT964629B
IT964629B IT6922172A IT6922172A IT964629B IT 964629 B IT964629 B IT 964629B IT 6922172 A IT6922172 A IT 6922172A IT 6922172 A IT6922172 A IT 6922172A IT 964629 B IT964629 B IT 964629B
Authority
IT
Italy
Prior art keywords
procedure
liquid phase
crystalline material
epitaxial deposition
monocrystalline substrate
Prior art date
Application number
IT6922172A
Other languages
English (en)
Italian (it)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Application granted granted Critical
Publication of IT964629B publication Critical patent/IT964629B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/12—Liquid-phase epitaxial-layer growth characterised by the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/063—Sliding boat system

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
IT6922172A 1971-07-13 1972-07-10 Procedimento e dispositivo per la deposizione epitassiale di un mate riale cristallino su un substrato monocristallino da fase liquida IT964629B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7125739A FR2145831A6 (enrdf_load_stackoverflow) 1971-07-13 1971-07-13

Publications (1)

Publication Number Publication Date
IT964629B true IT964629B (it) 1974-01-31

Family

ID=9080335

Family Applications (1)

Application Number Title Priority Date Filing Date
IT6922172A IT964629B (it) 1971-07-13 1972-07-10 Procedimento e dispositivo per la deposizione epitassiale di un mate riale cristallino su un substrato monocristallino da fase liquida

Country Status (8)

Country Link
JP (1) JPS5219191B1 (enrdf_load_stackoverflow)
BE (1) BE786137A (enrdf_load_stackoverflow)
CA (1) CA978663A (enrdf_load_stackoverflow)
DE (1) DE2233734C3 (enrdf_load_stackoverflow)
FR (1) FR2145831A6 (enrdf_load_stackoverflow)
GB (1) GB1399918A (enrdf_load_stackoverflow)
IT (1) IT964629B (enrdf_load_stackoverflow)
NL (1) NL7209537A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5120081A (en) * 1974-08-12 1976-02-17 Hitachi Ltd Ketsushoseichohoho oyobi sochi

Also Published As

Publication number Publication date
DE2233734A1 (de) 1973-01-18
GB1399918A (en) 1975-07-02
DE2233734C3 (de) 1978-04-27
CA978663A (en) 1975-11-25
JPS5219191B1 (enrdf_load_stackoverflow) 1977-05-26
NL7209537A (enrdf_load_stackoverflow) 1973-01-16
DE2233734B2 (de) 1977-08-25
BE786137A (nl) 1973-01-11
FR2145831A6 (enrdf_load_stackoverflow) 1973-02-23

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