CA956868A - Growing of liquid phase epitaxial layers - Google Patents

Growing of liquid phase epitaxial layers

Info

Publication number
CA956868A
CA956868A CA956868A CA956868DA CA956868A CA 956868 A CA956868 A CA 956868A CA 956868 A CA956868 A CA 956868A CA 956868D A CA956868D A CA 956868DA CA 956868 A CA956868 A CA 956868A
Authority
CA
Canada
Prior art keywords
growing
liquid phase
epitaxial layers
phase epitaxial
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA956868A
Inventor
Anthony J. Springthorpe
Original Assignee
Northern Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northern Electric Co Ltd filed Critical Northern Electric Co Ltd
Application granted granted Critical
Publication of CA956868A publication Critical patent/CA956868A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/063—Sliding boat system
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/068—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
CA956868A 1972-11-10 1972-11-10 Growing of liquid phase epitaxial layers Expired CA956868A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA156239 1972-11-10

Publications (1)

Publication Number Publication Date
CA956868A true CA956868A (en) 1974-10-29

Family

ID=4094952

Family Applications (1)

Application Number Title Priority Date Filing Date
CA956868A Expired CA956868A (en) 1972-11-10 1972-11-10 Growing of liquid phase epitaxial layers

Country Status (1)

Country Link
CA (1) CA956868A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7799133B2 (en) * 2005-05-02 2010-09-21 Iis Materials Corporation, Ltd. Crucible apparatus and method of solidifying a molten material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7799133B2 (en) * 2005-05-02 2010-09-21 Iis Materials Corporation, Ltd. Crucible apparatus and method of solidifying a molten material

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