CA978663A - Method and device for the epitaxial deposition of a layer of crystalline material on a flat side of a monocrystalline substrate from a liquid phase - Google Patents
Method and device for the epitaxial deposition of a layer of crystalline material on a flat side of a monocrystalline substrate from a liquid phaseInfo
- Publication number
- CA978663A CA978663A CA146,902A CA146902A CA978663A CA 978663 A CA978663 A CA 978663A CA 146902 A CA146902 A CA 146902A CA 978663 A CA978663 A CA 978663A
- Authority
- CA
- Canada
- Prior art keywords
- layer
- liquid phase
- crystalline material
- flat side
- epitaxial deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/12—Liquid-phase epitaxial-layer growth characterised by the substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/063—Sliding boat system
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7125739A FR2145831A6 (en) | 1971-07-13 | 1971-07-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA978663A true CA978663A (en) | 1975-11-25 |
Family
ID=9080335
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA146,902A Expired CA978663A (en) | 1971-07-13 | 1972-07-12 | Method and device for the epitaxial deposition of a layer of crystalline material on a flat side of a monocrystalline substrate from a liquid phase |
Country Status (8)
Country | Link |
---|---|
JP (1) | JPS5219191B1 (en) |
BE (1) | BE786137A (en) |
CA (1) | CA978663A (en) |
DE (1) | DE2233734C3 (en) |
FR (1) | FR2145831A6 (en) |
GB (1) | GB1399918A (en) |
IT (1) | IT964629B (en) |
NL (1) | NL7209537A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5120081A (en) * | 1974-08-12 | 1976-02-17 | Hitachi Ltd | Ketsushoseichohoho oyobi sochi |
-
0
- BE BE786137D patent/BE786137A/en not_active IP Right Cessation
-
1971
- 1971-07-13 FR FR7125739A patent/FR2145831A6/fr not_active Expired
-
1972
- 1972-07-08 DE DE19722233734 patent/DE2233734C3/en not_active Expired
- 1972-07-08 NL NL7209537A patent/NL7209537A/xx unknown
- 1972-07-10 IT IT6922172A patent/IT964629B/en active
- 1972-07-10 GB GB3213272A patent/GB1399918A/en not_active Expired
- 1972-07-12 CA CA146,902A patent/CA978663A/en not_active Expired
- 1972-07-13 JP JP6958872A patent/JPS5219191B1/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
GB1399918A (en) | 1975-07-02 |
DE2233734B2 (en) | 1977-08-25 |
BE786137A (en) | 1973-01-11 |
NL7209537A (en) | 1973-01-16 |
DE2233734C3 (en) | 1978-04-27 |
FR2145831A6 (en) | 1973-02-23 |
IT964629B (en) | 1974-01-31 |
DE2233734A1 (en) | 1973-01-18 |
JPS5219191B1 (en) | 1977-05-26 |
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