CA978663A - Method and device for the epitaxial deposition of a layer of crystalline material on a flat side of a monocrystalline substrate from a liquid phase - Google Patents

Method and device for the epitaxial deposition of a layer of crystalline material on a flat side of a monocrystalline substrate from a liquid phase

Info

Publication number
CA978663A
CA978663A CA146,902A CA146902A CA978663A CA 978663 A CA978663 A CA 978663A CA 146902 A CA146902 A CA 146902A CA 978663 A CA978663 A CA 978663A
Authority
CA
Canada
Prior art keywords
layer
liquid phase
crystalline material
flat side
epitaxial deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA146,902A
Other versions
CA146902S (en
Inventor
Elie Andre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of CA978663A publication Critical patent/CA978663A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/12—Liquid-phase epitaxial-layer growth characterised by the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/063—Sliding boat system

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CA146,902A 1971-07-13 1972-07-12 Method and device for the epitaxial deposition of a layer of crystalline material on a flat side of a monocrystalline substrate from a liquid phase Expired CA978663A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7125739A FR2145831A6 (en) 1971-07-13 1971-07-13

Publications (1)

Publication Number Publication Date
CA978663A true CA978663A (en) 1975-11-25

Family

ID=9080335

Family Applications (1)

Application Number Title Priority Date Filing Date
CA146,902A Expired CA978663A (en) 1971-07-13 1972-07-12 Method and device for the epitaxial deposition of a layer of crystalline material on a flat side of a monocrystalline substrate from a liquid phase

Country Status (8)

Country Link
JP (1) JPS5219191B1 (en)
BE (1) BE786137A (en)
CA (1) CA978663A (en)
DE (1) DE2233734C3 (en)
FR (1) FR2145831A6 (en)
GB (1) GB1399918A (en)
IT (1) IT964629B (en)
NL (1) NL7209537A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5120081A (en) * 1974-08-12 1976-02-17 Hitachi Ltd Ketsushoseichohoho oyobi sochi

Also Published As

Publication number Publication date
GB1399918A (en) 1975-07-02
DE2233734B2 (en) 1977-08-25
BE786137A (en) 1973-01-11
NL7209537A (en) 1973-01-16
DE2233734C3 (en) 1978-04-27
FR2145831A6 (en) 1973-02-23
IT964629B (en) 1974-01-31
DE2233734A1 (en) 1973-01-18
JPS5219191B1 (en) 1977-05-26

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