IT942738B - Procedimento e dispositivo per la produzione di strati sottili e strati sottili ottenuti con il procedimento particolarmente utiliz zabili come foto maschere nella micro elettronica - Google Patents

Procedimento e dispositivo per la produzione di strati sottili e strati sottili ottenuti con il procedimento particolarmente utiliz zabili come foto maschere nella micro elettronica

Info

Publication number
IT942738B
IT942738B IT70479/71A IT7047971A IT942738B IT 942738 B IT942738 B IT 942738B IT 70479/71 A IT70479/71 A IT 70479/71A IT 7047971 A IT7047971 A IT 7047971A IT 942738 B IT942738 B IT 942738B
Authority
IT
Italy
Prior art keywords
thin layers
procedure
production
particularly used
photo masks
Prior art date
Application number
IT70479/71A
Other languages
English (en)
Italian (it)
Inventor
J Spitz
J Viguie
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of IT942738B publication Critical patent/IT942738B/it

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0615—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced at the free surface of the liquid or other fluent material in a container and subjected to the vibrations
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Chemically Coating (AREA)
  • Chemical Vapour Deposition (AREA)
  • Special Spraying Apparatus (AREA)
  • Nozzles (AREA)
IT70479/71A 1970-10-23 1971-10-22 Procedimento e dispositivo per la produzione di strati sottili e strati sottili ottenuti con il procedimento particolarmente utiliz zabili come foto maschere nella micro elettronica IT942738B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7038371A FR2110622A5 (de) 1970-10-23 1970-10-23

Publications (1)

Publication Number Publication Date
IT942738B true IT942738B (it) 1973-04-02

Family

ID=9063211

Family Applications (1)

Application Number Title Priority Date Filing Date
IT70479/71A IT942738B (it) 1970-10-23 1971-10-22 Procedimento e dispositivo per la produzione di strati sottili e strati sottili ottenuti con il procedimento particolarmente utiliz zabili come foto maschere nella micro elettronica

Country Status (9)

Country Link
US (1) US3840391A (de)
JP (1) JPS5515545B1 (de)
CA (1) CA952770A (de)
CH (1) CH546830A (de)
DE (1) DE2151809C3 (de)
FR (1) FR2110622A5 (de)
GB (1) GB1362803A (de)
IT (1) IT942738B (de)
NL (1) NL178173C (de)

Families Citing this family (48)

* Cited by examiner, † Cited by third party
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NL7700808A (nl) * 1977-01-27 1978-07-31 Philips Nv Werkwijze voor de vervaardiging van ijzer- oxidefotomaskers en ijzeroxidemaskers verkre- gen volgens deze werkwijze.
US4167045A (en) * 1977-08-26 1979-09-11 Interface Biomedical Laboratories Corp. Cardiac and vascular prostheses
US4526808A (en) * 1979-07-05 1985-07-02 E. I. Du Pont De Nemours And Company Method for applying liquid to a yarn
US4290384A (en) * 1979-10-18 1981-09-22 The Perkin-Elmer Corporation Coating apparatus
US4309456A (en) * 1980-09-23 1982-01-05 Rca Corporation Method and apparatus for coating recorded discs with a lubricant
US4431684A (en) * 1981-06-02 1984-02-14 E. I. Du Pont De Nemours & Co. Ultrasonic vibrator for applying finish to yarn
FR2531880A1 (fr) * 1982-08-18 1984-02-24 Commissariat Energie Atomique Procede de fabrication de couches minces
EP0173715B1 (de) * 1984-02-13 1992-04-22 SCHMITT, Jerome J. III Verfahren und vorrichtung für gasstrahlniederschlag von leitfähigen und dielektrischen dünnen festfilmen und so hergestellte erzeugnisse
KR910005880B1 (ko) * 1984-10-29 1991-08-06 아메리칸 텔리폰 앤드 텔레그라프 캄파니 석판화 기술을 이용한 장치 및 그 제조방법
US4689247A (en) * 1986-05-15 1987-08-25 Ametek, Inc. Process and apparatus for forming thin films
US4950499A (en) * 1987-01-27 1990-08-21 The Foxboro Company Method of making a compliant fluid-impermeable element
JPH0280303A (ja) * 1987-06-04 1990-03-20 Tonen Corp 超伝導体薄膜の形成方法及びその為の装置
JP2702131B2 (ja) * 1987-06-12 1998-01-21 キヤノン株式会社 画像読取装置及び該装置を有する画像情報読取装置
JP2584774B2 (ja) * 1987-06-12 1997-02-26 キヤノン株式会社 密着型光電変換装置
US5034372A (en) * 1987-12-07 1991-07-23 Mitsubishi Denki Kabushiki Kaisha Plasma based method for production of superconductive oxide layers
EP0420596B1 (de) * 1989-09-26 1996-06-19 Canon Kabushiki Kaisha Gasversorgungsvorrichtung und ihre Verwendung für eine Filmabscheidungsanlage
FR2669246A1 (fr) * 1990-11-16 1992-05-22 Centre Nat Rech Scient Procede sol-gel de depot de couches minces par pulverisation ultrasonore.
DE4138722C2 (de) * 1991-11-21 1994-05-26 Dresden Ev Inst Festkoerper Verfahren zum Verdampfen eines Stoffes für einen sich anschließenden Verarbeitungsprozeß
US5736195A (en) * 1993-09-15 1998-04-07 Mobium Enterprises Corporation Method of coating a thin film on a substrate
US5403617A (en) * 1993-09-15 1995-04-04 Mobium Enterprises Corporation Hybrid pulsed valve for thin film coating and method
GB9412676D0 (en) * 1994-06-23 1994-08-10 Jem Smoke Machine Co Improvements in or relating to a method of creating an effect
US5534314A (en) * 1994-08-31 1996-07-09 University Of Virginia Patent Foundation Directed vapor deposition of electron beam evaporant
US5571332A (en) * 1995-02-10 1996-11-05 Jet Process Corporation Electron jet vapor deposition system
US6027673A (en) * 1995-11-21 2000-02-22 The Aerospace Corporation Method of making indium oxide microspheres for antistatic coatings
JPH09184080A (ja) 1995-12-27 1997-07-15 Vacuum Metallurgical Co Ltd 超微粒子による薄膜形成方法、およびその薄膜形成装置
FR2758744B1 (fr) 1997-01-30 1999-02-19 Commissariat Energie Atomique Systeme d'alimentation en liquide pour appareil dans lequel est maintenu un niveau constant
US20030068509A1 (en) * 1997-05-01 2003-04-10 Ashish Shah Ruthenium-containing oxide ultrasonically coated substrate for use in a capacitor and method of manufacture
US20010024700A1 (en) * 1997-05-01 2001-09-27 Asbish Shah Ruthenium-containing ultrasonically coated substrate for use in a capacitor and method of manufacture
US5894403A (en) * 1997-05-01 1999-04-13 Wilson Greatbatch Ltd. Ultrasonically coated substrate for use in a capacitor
US5920455A (en) * 1997-05-01 1999-07-06 Wilson Greatbatch Ltd. One step ultrasonically coated substrate for use in a capacitor
US20010026850A1 (en) * 1997-05-01 2001-10-04 Ashish Shah Method for providing a coated substrate for use in a capacitor by a one step ultrasonic deposition process
US20030070920A1 (en) * 1997-05-01 2003-04-17 Ashish Shah Electrode for use in a capacitor
US6012647A (en) * 1997-12-01 2000-01-11 3M Innovative Properties Company Apparatus and method of atomizing and vaporizing
US6045864A (en) 1997-12-01 2000-04-04 3M Innovative Properties Company Vapor coating method
US6685762B1 (en) * 1998-08-26 2004-02-03 Superior Micropowders Llc Aerosol method and apparatus for making particulate products
AT409462B (de) * 1998-10-08 2002-08-26 Thallner Erich Vorrichtung zum belacken von substraten
US6174651B1 (en) 1999-01-14 2001-01-16 Steag Rtp Systems, Inc. Method for depositing atomized materials onto a substrate utilizing light exposure for heating
US6569249B1 (en) 2000-04-18 2003-05-27 Clemson University Process for forming layers on substrates
CN1251809C (zh) * 2000-10-17 2006-04-19 尼奥弗托尼克斯公司 通过反应沉积形成涂覆的装置及方法
US7308185B2 (en) * 2004-12-13 2007-12-11 Asml Holding N.V. Ultra-thin high-precision glass optic
JP4871177B2 (ja) * 2006-03-28 2012-02-08 コリア インスティチュート オブ エナジー リサーチ 超音波振動方式を用いたカーボンナノチューブ合成方法とその装置
PL211804B1 (pl) * 2007-03-05 2012-06-29 Inst Optyki Stosowanej Nebulizer ultradźwiękowy
US8287938B1 (en) * 2008-05-20 2012-10-16 Ingo Scheer Method to produce a coating and to fine-tune the coating morphology
FI20095651A0 (fi) * 2009-06-10 2009-06-10 Beneq Oy Menetelmä ja laitteisto lasisubstraatin pinnoittamiseksi
DE102010055042B4 (de) * 2010-12-17 2013-06-06 Eads Deutschland Gmbh Verfahren und Vorrichtung zur Bildung eines Elektrolytfilmes auf einer Elektrodenoberfläche
US20150053786A1 (en) * 2013-08-21 2015-02-26 Trimble Navigation Limited Intelligent precision irrigation system
CH712376A1 (de) * 2016-04-19 2017-10-31 Camag Derivatisierungsgerät und -verfahren.
JP2020188170A (ja) * 2019-05-15 2020-11-19 トヨタ自動車株式会社 ミスト生成装置及び成膜装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2512743A (en) * 1946-04-01 1950-06-27 Rca Corp Jet sprayer actuated by supersonic waves
FR1450684A (fr) * 1965-07-07 1966-06-24 Commissariat Energie Atomique Procédé et dispositif de génération d'aérosols à partir d'un liquide

Also Published As

Publication number Publication date
NL7114556A (de) 1972-04-25
GB1362803A (en) 1974-08-07
JPS5515545B1 (de) 1980-04-24
US3840391A (en) 1974-10-08
DE2151809B2 (de) 1974-03-28
DE2151809C3 (de) 1974-11-14
CH546830A (fr) 1974-03-15
FR2110622A5 (de) 1972-06-02
NL178173B (nl) 1985-09-02
CA952770A (en) 1974-08-13
DE2151809A1 (de) 1972-04-27
NL178173C (nl) 1989-10-16

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