FR2110622A5 - - Google Patents

Info

Publication number
FR2110622A5
FR2110622A5 FR7038371A FR7038371A FR2110622A5 FR 2110622 A5 FR2110622 A5 FR 2110622A5 FR 7038371 A FR7038371 A FR 7038371A FR 7038371 A FR7038371 A FR 7038371A FR 2110622 A5 FR2110622 A5 FR 2110622A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7038371A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7038371A priority Critical patent/FR2110622A5/fr
Priority to CH1490171A priority patent/CH546830A/fr
Priority to GB4838471A priority patent/GB1362803A/en
Priority to DE2151809A priority patent/DE2151809C3/de
Priority to US00190706A priority patent/US3840391A/en
Priority to CA125,798A priority patent/CA952770A/en
Priority to JP8384571A priority patent/JPS5515545B1/ja
Priority to NLAANVRAGE7114556,A priority patent/NL178173C/xx
Priority to IT70479/71A priority patent/IT942738B/it
Application granted granted Critical
Publication of FR2110622A5 publication Critical patent/FR2110622A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0615—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced at the free surface of the liquid or other fluent material in a container and subjected to the vibrations
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Chemically Coating (AREA)
  • Chemical Vapour Deposition (AREA)
  • Special Spraying Apparatus (AREA)
  • Nozzles (AREA)
FR7038371A 1970-10-23 1970-10-23 Expired FR2110622A5 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR7038371A FR2110622A5 (fr) 1970-10-23 1970-10-23
CH1490171A CH546830A (fr) 1970-10-23 1971-10-13 Procede et dispositif d'elaboration d'une couche mince.
DE2151809A DE2151809C3 (de) 1970-10-23 1971-10-18 Verfahren und Vorrichtung zur Herstellung einer gleichmäßigen dünnen Schicht
GB4838471A GB1362803A (en) 1970-10-23 1971-10-18 Method and device for preparing thin films of metals or metal comp ounds
US00190706A US3840391A (en) 1970-10-23 1971-10-20 Method for the preparation of thin films by ultra-sonically vaporing solutions into an aerosol
CA125,798A CA952770A (en) 1970-10-23 1971-10-21 Method and device for the preparation of thin films
JP8384571A JPS5515545B1 (fr) 1970-10-23 1971-10-22
NLAANVRAGE7114556,A NL178173C (nl) 1970-10-23 1971-10-22 Inrichting voor het aanbrengen van een dunne laag op het oppervlak van een voorwerp.
IT70479/71A IT942738B (it) 1970-10-23 1971-10-22 Procedimento e dispositivo per la produzione di strati sottili e strati sottili ottenuti con il procedimento particolarmente utiliz zabili come foto maschere nella micro elettronica

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7038371A FR2110622A5 (fr) 1970-10-23 1970-10-23

Publications (1)

Publication Number Publication Date
FR2110622A5 true FR2110622A5 (fr) 1972-06-02

Family

ID=9063211

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7038371A Expired FR2110622A5 (fr) 1970-10-23 1970-10-23

Country Status (9)

Country Link
US (1) US3840391A (fr)
JP (1) JPS5515545B1 (fr)
CA (1) CA952770A (fr)
CH (1) CH546830A (fr)
DE (1) DE2151809C3 (fr)
FR (1) FR2110622A5 (fr)
GB (1) GB1362803A (fr)
IT (1) IT942738B (fr)
NL (1) NL178173C (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2531880A1 (fr) * 1982-08-18 1984-02-24 Commissariat Energie Atomique Procede de fabrication de couches minces
EP0486393A1 (fr) * 1990-11-16 1992-05-20 Centre National De La Recherche Scientifique Procédé sol-gel de dépôt de couches minces par pulvérisation ultrasonore
WO1996000132A2 (fr) * 1994-06-23 1996-01-04 J.E.M. Smoke Machine Co. Ltd. Procede de creation d'un effet
WO1998033599A1 (fr) 1997-01-30 1998-08-06 Commissariat A L'energie Atomique Systeme d'alimentation en liquide pour appareil dans lequel est maintenu un niveau constant

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7700808A (nl) * 1977-01-27 1978-07-31 Philips Nv Werkwijze voor de vervaardiging van ijzer- oxidefotomaskers en ijzeroxidemaskers verkre- gen volgens deze werkwijze.
US4167045A (en) * 1977-08-26 1979-09-11 Interface Biomedical Laboratories Corp. Cardiac and vascular prostheses
US4526808A (en) * 1979-07-05 1985-07-02 E. I. Du Pont De Nemours And Company Method for applying liquid to a yarn
US4290384A (en) * 1979-10-18 1981-09-22 The Perkin-Elmer Corporation Coating apparatus
US4309456A (en) * 1980-09-23 1982-01-05 Rca Corporation Method and apparatus for coating recorded discs with a lubricant
US4431684A (en) * 1981-06-02 1984-02-14 E. I. Du Pont De Nemours & Co. Ultrasonic vibrator for applying finish to yarn
EP0173715B1 (fr) * 1984-02-13 1992-04-22 SCHMITT, Jerome J. III Procede et appareil pour le depot par jet de gaz de minces films solides conducteurs et dielectriques et produits fabriques de la sorte
EP0203931B1 (fr) * 1984-10-29 1989-03-29 AT&T Corp. Procede de production de dispositifs utilisant des techniques de lithographie non plane
US4689247A (en) * 1986-05-15 1987-08-25 Ametek, Inc. Process and apparatus for forming thin films
US4950499A (en) * 1987-01-27 1990-08-21 The Foxboro Company Method of making a compliant fluid-impermeable element
JPH0280303A (ja) * 1987-06-04 1990-03-20 Tonen Corp 超伝導体薄膜の形成方法及びその為の装置
JP2584774B2 (ja) * 1987-06-12 1997-02-26 キヤノン株式会社 密着型光電変換装置
JP2702131B2 (ja) * 1987-06-12 1998-01-21 キヤノン株式会社 画像読取装置及び該装置を有する画像情報読取装置
US5034372A (en) * 1987-12-07 1991-07-23 Mitsubishi Denki Kabushiki Kaisha Plasma based method for production of superconductive oxide layers
EP0420596B1 (fr) * 1989-09-26 1996-06-19 Canon Kabushiki Kaisha Dispositif d'alimentation en gaz et appareillage de disposition de films l'employant
DE4138722C2 (de) * 1991-11-21 1994-05-26 Dresden Ev Inst Festkoerper Verfahren zum Verdampfen eines Stoffes für einen sich anschließenden Verarbeitungsprozeß
US5403617A (en) * 1993-09-15 1995-04-04 Mobium Enterprises Corporation Hybrid pulsed valve for thin film coating and method
US5736195A (en) * 1993-09-15 1998-04-07 Mobium Enterprises Corporation Method of coating a thin film on a substrate
US5534314A (en) * 1994-08-31 1996-07-09 University Of Virginia Patent Foundation Directed vapor deposition of electron beam evaporant
US5571332A (en) * 1995-02-10 1996-11-05 Jet Process Corporation Electron jet vapor deposition system
US6027673A (en) * 1995-11-21 2000-02-22 The Aerospace Corporation Method of making indium oxide microspheres for antistatic coatings
JPH09184080A (ja) * 1995-12-27 1997-07-15 Vacuum Metallurgical Co Ltd 超微粒子による薄膜形成方法、およびその薄膜形成装置
US20010026850A1 (en) * 1997-05-01 2001-10-04 Ashish Shah Method for providing a coated substrate for use in a capacitor by a one step ultrasonic deposition process
US5894403A (en) * 1997-05-01 1999-04-13 Wilson Greatbatch Ltd. Ultrasonically coated substrate for use in a capacitor
US20030068509A1 (en) * 1997-05-01 2003-04-10 Ashish Shah Ruthenium-containing oxide ultrasonically coated substrate for use in a capacitor and method of manufacture
US20030070920A1 (en) * 1997-05-01 2003-04-17 Ashish Shah Electrode for use in a capacitor
US20010024700A1 (en) * 1997-05-01 2001-09-27 Asbish Shah Ruthenium-containing ultrasonically coated substrate for use in a capacitor and method of manufacture
US5920455A (en) * 1997-05-01 1999-07-06 Wilson Greatbatch Ltd. One step ultrasonically coated substrate for use in a capacitor
US6012647A (en) * 1997-12-01 2000-01-11 3M Innovative Properties Company Apparatus and method of atomizing and vaporizing
US6045864A (en) 1997-12-01 2000-04-04 3M Innovative Properties Company Vapor coating method
US6685762B1 (en) * 1998-08-26 2004-02-03 Superior Micropowders Llc Aerosol method and apparatus for making particulate products
AT409462B (de) * 1998-10-08 2002-08-26 Thallner Erich Vorrichtung zum belacken von substraten
US6174651B1 (en) 1999-01-14 2001-01-16 Steag Rtp Systems, Inc. Method for depositing atomized materials onto a substrate utilizing light exposure for heating
US6569249B1 (en) 2000-04-18 2003-05-27 Clemson University Process for forming layers on substrates
KR100934679B1 (ko) * 2000-10-17 2009-12-31 네오포토닉스 코포레이션 반응성 증착에 의한 코팅 형성
US7308185B2 (en) * 2004-12-13 2007-12-11 Asml Holding N.V. Ultra-thin high-precision glass optic
JP4871177B2 (ja) * 2006-03-28 2012-02-08 コリア インスティチュート オブ エナジー リサーチ 超音波振動方式を用いたカーボンナノチューブ合成方法とその装置
PL211804B1 (pl) * 2007-03-05 2012-06-29 Inst Optyki Stosowanej Nebulizer ultradźwiękowy
US8287938B1 (en) * 2008-05-20 2012-10-16 Ingo Scheer Method to produce a coating and to fine-tune the coating morphology
FI20095651A0 (fi) * 2009-06-10 2009-06-10 Beneq Oy Menetelmä ja laitteisto lasisubstraatin pinnoittamiseksi
DE102010055042B4 (de) * 2010-12-17 2013-06-06 Eads Deutschland Gmbh Verfahren und Vorrichtung zur Bildung eines Elektrolytfilmes auf einer Elektrodenoberfläche
US20150053786A1 (en) * 2013-08-21 2015-02-26 Trimble Navigation Limited Intelligent precision irrigation system
CH712376A1 (de) * 2016-04-19 2017-10-31 Camag Derivatisierungsgerät und -verfahren.
JP2020188170A (ja) * 2019-05-15 2020-11-19 トヨタ自動車株式会社 ミスト生成装置及び成膜装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2512743A (en) * 1946-04-01 1950-06-27 Rca Corp Jet sprayer actuated by supersonic waves
FR1450684A (fr) * 1965-07-07 1966-06-24 Commissariat Energie Atomique Procédé et dispositif de génération d'aérosols à partir d'un liquide

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2512743A (en) * 1946-04-01 1950-06-27 Rca Corp Jet sprayer actuated by supersonic waves
FR1450684A (fr) * 1965-07-07 1966-06-24 Commissariat Energie Atomique Procédé et dispositif de génération d'aérosols à partir d'un liquide

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
EXBK/65 *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2531880A1 (fr) * 1982-08-18 1984-02-24 Commissariat Energie Atomique Procede de fabrication de couches minces
EP0103505A1 (fr) * 1982-08-18 1984-03-21 Commissariat à l'Energie Atomique Procédé de fabrication de couches minces
EP0486393A1 (fr) * 1990-11-16 1992-05-20 Centre National De La Recherche Scientifique Procédé sol-gel de dépôt de couches minces par pulvérisation ultrasonore
FR2669246A1 (fr) * 1990-11-16 1992-05-22 Centre Nat Rech Scient Procede sol-gel de depot de couches minces par pulverisation ultrasonore.
WO1996000132A2 (fr) * 1994-06-23 1996-01-04 J.E.M. Smoke Machine Co. Ltd. Procede de creation d'un effet
WO1996000132A3 (fr) * 1994-06-23 1996-03-28 Jem Smoke Machine Co Procede de creation d'un effet
WO1998033599A1 (fr) 1997-01-30 1998-08-06 Commissariat A L'energie Atomique Systeme d'alimentation en liquide pour appareil dans lequel est maintenu un niveau constant

Also Published As

Publication number Publication date
NL178173B (nl) 1985-09-02
CA952770A (en) 1974-08-13
GB1362803A (en) 1974-08-07
DE2151809C3 (de) 1974-11-14
CH546830A (fr) 1974-03-15
US3840391A (en) 1974-10-08
IT942738B (it) 1973-04-02
JPS5515545B1 (fr) 1980-04-24
NL7114556A (fr) 1972-04-25
NL178173C (nl) 1989-10-16
DE2151809A1 (de) 1972-04-27
DE2151809B2 (de) 1974-03-28

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