IT8521977A0 - EQUIPMENT FOR THE GROWING OF SINGLE CRYSTAL. - Google Patents
EQUIPMENT FOR THE GROWING OF SINGLE CRYSTAL.Info
- Publication number
- IT8521977A0 IT8521977A0 IT8521977A IT2197785A IT8521977A0 IT 8521977 A0 IT8521977 A0 IT 8521977A0 IT 8521977 A IT8521977 A IT 8521977A IT 2197785 A IT2197785 A IT 2197785A IT 8521977 A0 IT8521977 A0 IT 8521977A0
- Authority
- IT
- Italy
- Prior art keywords
- growing
- equipment
- single crystal
- crystal
- Prior art date
Links
- 239000013078 crystal Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59176420A JPS6153187A (en) | 1984-08-24 | 1984-08-24 | Device for growing single crystal |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8521977A0 true IT8521977A0 (en) | 1985-08-23 |
IT1200719B IT1200719B (en) | 1989-01-27 |
Family
ID=16013382
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT21977/85A IT1200719B (en) | 1984-08-24 | 1985-08-23 | MONOCRYSTAL GROWTH APPARATUS |
Country Status (10)
Country | Link |
---|---|
JP (1) | JPS6153187A (en) |
AT (1) | AT400848B (en) |
CA (1) | CA1290654C (en) |
DE (1) | DE3530231A1 (en) |
FR (1) | FR2569430B1 (en) |
GB (1) | GB2163367B (en) |
IT (1) | IT1200719B (en) |
MY (1) | MY101257A (en) |
NL (1) | NL193666C (en) |
SE (1) | SE467258B (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62105998A (en) * | 1985-10-31 | 1987-05-16 | Sony Corp | Production of silicon substrate |
JPS62223090A (en) * | 1986-03-20 | 1987-10-01 | Shin Etsu Handotai Co Ltd | Device for pulling up semiconductor single crystal |
JPS6389488A (en) * | 1986-09-30 | 1988-04-20 | Toshiba Corp | Production of single crystal |
DE3733487C2 (en) * | 1987-10-03 | 1997-08-14 | Leybold Ag | Device for pulling single crystals |
US5139750A (en) * | 1989-10-16 | 1992-08-18 | Nkk Corporation | Silicon single crystal manufacturing apparatus |
JPH03183689A (en) * | 1989-12-11 | 1991-08-09 | Mitsubishi Materials Corp | Device and method for pulling up single crystal |
JP3016897B2 (en) * | 1991-03-20 | 2000-03-06 | 信越半導体株式会社 | Method and apparatus for producing silicon single crystal |
EP0530397A1 (en) * | 1991-09-04 | 1993-03-10 | Kawasaki Steel Corporation | Czochralski crystal pulling process and an apparatus for carrying out the same |
US5363795A (en) * | 1991-09-04 | 1994-11-15 | Kawasaki Steel Corporation | Czochralski crystal pulling process and an apparatus for carrying out the same |
JP2862158B2 (en) * | 1993-08-27 | 1999-02-24 | 信越半導体株式会社 | Silicon single crystal manufacturing equipment |
JPH1179889A (en) * | 1997-07-09 | 1999-03-23 | Shin Etsu Handotai Co Ltd | Production of and production unit for silicon single crystal with few crystal defect, and silicon single crystal and silicon wafer produced thereby |
US6285011B1 (en) | 1999-10-12 | 2001-09-04 | Memc Electronic Materials, Inc. | Electrical resistance heater for crystal growing apparatus |
KR101105526B1 (en) * | 2008-12-30 | 2012-01-13 | 주식회사 엘지실트론 | Heater used for manufacturing single crystal ingot and single crystal ingot manufacturing apparatus having the same |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2979386A (en) * | 1956-08-02 | 1961-04-11 | Shockley William | Crystal growing apparatus |
FR1316707A (en) * | 1961-12-22 | 1963-02-01 | Radiotechnique | Improvements to devices for obtaining single crystals by pulling |
DE1289950B (en) * | 1963-07-24 | 1969-02-27 | Siemens Ag | Device for pulling semiconductor crystals |
US3359077A (en) * | 1964-05-25 | 1967-12-19 | Globe Union Inc | Method of growing a crystal |
DE1769860A1 (en) * | 1968-07-26 | 1971-11-11 | Siemens Ag | Device for pulling dislocation-free semiconductor single crystal rods |
JPS4921063A (en) * | 1972-06-15 | 1974-02-25 | ||
JPS6027464B2 (en) * | 1976-09-28 | 1985-06-28 | 日本電気株式会社 | High pixel density conversion device |
DE2821481C2 (en) * | 1978-05-17 | 1985-12-05 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Device for pulling high-purity semiconductor rods from the melt |
US4277441A (en) * | 1979-01-15 | 1981-07-07 | Mobil Tyco Solar Energy Corporation | Apparatus for monitoring crystal growth |
DE3005492C2 (en) * | 1980-02-14 | 1983-10-27 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Process for the production of the purest single crystals by crucible pulling according to Czochralski |
JPS5711897A (en) * | 1980-06-27 | 1982-01-21 | Sumitomo Electric Ind Ltd | Method of pulling up single crystal and device therefor |
JPS5645890A (en) * | 1980-06-30 | 1981-04-25 | Sony Corp | Crystal growing apparatus |
DE3027262A1 (en) * | 1980-07-18 | 1982-02-11 | Skf Kugellagerfabriken Gmbh, 8720 Schweinfurt | DRAWING PROCESSED, THIN-WALLED BEARING BUSHING |
JPH0244799B2 (en) * | 1981-10-26 | 1990-10-05 | Sony Corp | KETSUSHOSEICHOHOHO |
JPS5964591A (en) * | 1982-09-30 | 1984-04-12 | Sumitomo Electric Ind Ltd | Apparatus for pulling up single crystal |
JPH0669917B2 (en) * | 1982-10-08 | 1994-09-07 | 住友電気工業株式会社 | Control method for multiple stage heater |
JPS59137399A (en) * | 1983-01-28 | 1984-08-07 | Nippon Telegr & Teleph Corp <Ntt> | Method and apparatus of growing low-dislocation density single crystal |
JPS60103097A (en) * | 1983-11-08 | 1985-06-07 | Sumitomo Electric Ind Ltd | Device for pulling up single crystal |
-
1984
- 1984-08-24 JP JP59176420A patent/JPS6153187A/en active Granted
-
1985
- 1985-08-16 GB GB08520574A patent/GB2163367B/en not_active Expired
- 1985-08-19 NL NL8502286A patent/NL193666C/en not_active IP Right Cessation
- 1985-08-22 FR FR8512629A patent/FR2569430B1/en not_active Expired - Fee Related
- 1985-08-23 CA CA000489331A patent/CA1290654C/en not_active Expired - Lifetime
- 1985-08-23 SE SE8503935A patent/SE467258B/en not_active IP Right Cessation
- 1985-08-23 IT IT21977/85A patent/IT1200719B/en active
- 1985-08-23 AT AT0247085A patent/AT400848B/en not_active IP Right Cessation
- 1985-08-23 DE DE19853530231 patent/DE3530231A1/en active Granted
-
1987
- 1987-06-25 MY MYPI87000893A patent/MY101257A/en unknown
Also Published As
Publication number | Publication date |
---|---|
GB2163367B (en) | 1988-04-07 |
GB8520574D0 (en) | 1985-09-25 |
DE3530231A1 (en) | 1986-02-27 |
SE8503935D0 (en) | 1985-08-23 |
AT400848B (en) | 1996-03-25 |
FR2569430B1 (en) | 1993-12-03 |
JPS6153187A (en) | 1986-03-17 |
SE8503935L (en) | 1986-02-25 |
NL8502286A (en) | 1986-03-17 |
GB2163367A (en) | 1986-02-26 |
FR2569430A1 (en) | 1986-02-28 |
ATA247085A (en) | 1995-08-15 |
SE467258B (en) | 1992-06-22 |
NL193666B (en) | 2000-02-01 |
CA1290654C (en) | 1991-10-15 |
NL193666C (en) | 2000-06-06 |
MY101257A (en) | 1991-08-17 |
DE3530231C2 (en) | 1991-01-17 |
IT1200719B (en) | 1989-01-27 |
JPH0357072B2 (en) | 1991-08-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19970822 |