FR1316707A - Improvements to devices for obtaining single crystals by pulling - Google Patents

Improvements to devices for obtaining single crystals by pulling

Info

Publication number
FR1316707A
FR1316707A FR882904A FR882904A FR1316707A FR 1316707 A FR1316707 A FR 1316707A FR 882904 A FR882904 A FR 882904A FR 882904 A FR882904 A FR 882904A FR 1316707 A FR1316707 A FR 1316707A
Authority
FR
France
Prior art keywords
pulling
devices
single crystals
obtaining single
obtaining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR882904A
Other languages
French (fr)
Inventor
Louis Lucas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Radiotechnique SA
Original Assignee
Radiotechnique SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Radiotechnique SA filed Critical Radiotechnique SA
Priority to FR882904A priority Critical patent/FR1316707A/en
Application granted granted Critical
Publication of FR1316707A publication Critical patent/FR1316707A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR882904A 1961-12-22 1961-12-22 Improvements to devices for obtaining single crystals by pulling Expired FR1316707A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR882904A FR1316707A (en) 1961-12-22 1961-12-22 Improvements to devices for obtaining single crystals by pulling

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR882904A FR1316707A (en) 1961-12-22 1961-12-22 Improvements to devices for obtaining single crystals by pulling

Publications (1)

Publication Number Publication Date
FR1316707A true FR1316707A (en) 1963-02-01

Family

ID=8769323

Family Applications (1)

Application Number Title Priority Date Filing Date
FR882904A Expired FR1316707A (en) 1961-12-22 1961-12-22 Improvements to devices for obtaining single crystals by pulling

Country Status (1)

Country Link
FR (1) FR1316707A (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3798007A (en) * 1969-12-05 1974-03-19 Ibm Method and apparatus for producing large diameter monocrystals
DE2942057A1 (en) * 1978-10-17 1980-04-24 Vlsi Technology Res Ass METHOD AND DEVICE FOR PRODUCING A SINGLE-CRYSTAL SILICON ROD
DE3005492A1 (en) * 1980-02-14 1981-08-20 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen PROCESS FOR THE PRODUCTION OF PURE CRYSTALS BY CRYSTAL PULLING TO CZOCHRALSKI
US4390505A (en) * 1981-03-30 1983-06-28 Mobil Solar Energy Corporation Crystal growth apparatus
FR2569430A1 (en) * 1984-08-24 1986-02-28 Sony Corp APPARATUS FOR EXTRACTING SINGLE CRYSTALS FROM A BATH OF MOLTEN SEMICONDUCTOR MATERIAL CONTAINED IN A CRUCIBLE
EP0530397A1 (en) * 1991-09-04 1993-03-10 Kawasaki Steel Corporation Czochralski crystal pulling process and an apparatus for carrying out the same
US5269875A (en) * 1989-10-05 1993-12-14 Shin-Etsu Handotai Company, Limited Method of adjusting concentration of oxygen in silicon single crystal and apparatus for use in the method
EP0610830A1 (en) * 1993-02-10 1994-08-17 Shin-Etsu Handotai Company Limited Method and apparatus for producing a Czochralski growth semiconductor single-crystal
US5363795A (en) * 1991-09-04 1994-11-15 Kawasaki Steel Corporation Czochralski crystal pulling process and an apparatus for carrying out the same
EP0781869A1 (en) * 1995-12-28 1997-07-02 Shin-Etsu Handotai Company Limited Method and mechanism for lifting gas flow-guide cylinder of a crystal pulling apparatus
WO1998011280A1 (en) * 1996-09-13 1998-03-19 Seh America, Inc. Apparatus and method for improving mechanical strength of the neck section of czochralski silicon crystal
EP0866150A1 (en) * 1997-03-21 1998-09-23 Wacker Siltronic Gesellschaft für Halbleitermaterialien Aktiengesellschaft Apparatus and process for pulling a single crystal
EP0926270A1 (en) * 1997-12-18 1999-06-30 Wacker Siltronic Gesellschaft für Halbleitermaterialien Aktiengesellschaft Process and apparatus for producing a single crystal

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3798007A (en) * 1969-12-05 1974-03-19 Ibm Method and apparatus for producing large diameter monocrystals
DE2942057A1 (en) * 1978-10-17 1980-04-24 Vlsi Technology Res Ass METHOD AND DEVICE FOR PRODUCING A SINGLE-CRYSTAL SILICON ROD
DE3005492A1 (en) * 1980-02-14 1981-08-20 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen PROCESS FOR THE PRODUCTION OF PURE CRYSTALS BY CRYSTAL PULLING TO CZOCHRALSKI
US4330361A (en) * 1980-02-14 1982-05-18 Wacker-Chemitronic Gesellschaft Fur Elektronic-Grundstoffe Mbh Process for the manufacture of high-purity monocrystals
US4390505A (en) * 1981-03-30 1983-06-28 Mobil Solar Energy Corporation Crystal growth apparatus
FR2569430A1 (en) * 1984-08-24 1986-02-28 Sony Corp APPARATUS FOR EXTRACTING SINGLE CRYSTALS FROM A BATH OF MOLTEN SEMICONDUCTOR MATERIAL CONTAINED IN A CRUCIBLE
US5269875A (en) * 1989-10-05 1993-12-14 Shin-Etsu Handotai Company, Limited Method of adjusting concentration of oxygen in silicon single crystal and apparatus for use in the method
US5363795A (en) * 1991-09-04 1994-11-15 Kawasaki Steel Corporation Czochralski crystal pulling process and an apparatus for carrying out the same
EP0530397A1 (en) * 1991-09-04 1993-03-10 Kawasaki Steel Corporation Czochralski crystal pulling process and an apparatus for carrying out the same
US5419277A (en) * 1993-02-10 1995-05-30 Shin-Etsu Handotai Co. Ltd. Method and apparatus for producing a Czochralski growth semiconductor single-crystal
EP0610830A1 (en) * 1993-02-10 1994-08-17 Shin-Etsu Handotai Company Limited Method and apparatus for producing a Czochralski growth semiconductor single-crystal
EP0781869A1 (en) * 1995-12-28 1997-07-02 Shin-Etsu Handotai Company Limited Method and mechanism for lifting gas flow-guide cylinder of a crystal pulling apparatus
US5795383A (en) * 1995-12-28 1998-08-18 Shin-Etsu Handotai Co., Ltd. Method and mechanism for lifting gas flow-guide cylinder of a crystal pulling apparatus
WO1998011280A1 (en) * 1996-09-13 1998-03-19 Seh America, Inc. Apparatus and method for improving mechanical strength of the neck section of czochralski silicon crystal
US5827367A (en) * 1996-09-13 1998-10-27 Seh America Apparatus for improving mechanical strength of the neck section of czochralski silicon crystal
US5865887A (en) * 1996-09-13 1999-02-02 Seh America, Inc. Method for improving mechanical strength of the neck section of czochralski silicon crystal
EP0866150A1 (en) * 1997-03-21 1998-09-23 Wacker Siltronic Gesellschaft für Halbleitermaterialien Aktiengesellschaft Apparatus and process for pulling a single crystal
US6153008A (en) * 1997-03-21 2000-11-28 Wacker Siltronic Gesellschaft Fur Halbleitermaterialien Ag Device and method for pulling a single crystal
EP0926270A1 (en) * 1997-12-18 1999-06-30 Wacker Siltronic Gesellschaft für Halbleitermaterialien Aktiengesellschaft Process and apparatus for producing a single crystal
US6238477B1 (en) 1997-12-18 2001-05-29 WACKER SILTRONIC GESELLSCHAFT FüR HALBLEITERMATERIALIEN AG Process and device for the production of a single crystal

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