IT1289983B1 - Recupero di argon da un forno per cristalli di silicio - Google Patents

Recupero di argon da un forno per cristalli di silicio

Info

Publication number
IT1289983B1
IT1289983B1 IT97MI000422A ITMI970422A IT1289983B1 IT 1289983 B1 IT1289983 B1 IT 1289983B1 IT 97MI000422 A IT97MI000422 A IT 97MI000422A IT MI970422 A ITMI970422 A IT MI970422A IT 1289983 B1 IT1289983 B1 IT 1289983B1
Authority
IT
Italy
Prior art keywords
argon
recovery
silicon crystal
crystal oven
oven
Prior art date
Application number
IT97MI000422A
Other languages
English (en)
Italian (it)
Inventor
Thomas Hsiao-Ling Hsiung
Zbigniew Tadeusz Fidkowski
Rakesh Agrawal
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/785,515 external-priority patent/US5706674A/en
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Publication of ITMI970422A1 publication Critical patent/ITMI970422A1/it
Application granted granted Critical
Publication of IT1289983B1 publication Critical patent/IT1289983B1/it

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/08—Separating gaseous impurities from gases or gaseous mixtures or from liquefied gases or liquefied gaseous mixtures
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • C01B23/001—Purification or separation processes of noble gases
    • C01B23/0094—Combined chemical and physical processing
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0003—Chemical processing
    • C01B2210/0004—Chemical processing by oxidation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0003—Chemical processing
    • C01B2210/0006—Chemical processing by reduction
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0009—Physical processing
    • C01B2210/0014—Physical processing by adsorption in solids
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0043—Impurity removed
    • C01B2210/0045—Oxygen
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0043—Impurity removed
    • C01B2210/005—Carbon monoxide
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2200/00—Processes or apparatus using separation by rectification
    • F25J2200/04—Processes or apparatus using separation by rectification in a dual pressure main column system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2200/00—Processes or apparatus using separation by rectification
    • F25J2200/72—Refluxing the column with at least a part of the totally condensed overhead gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00—Processes characterised by the type or other details of the product stream
    • F25J2215/58—Argon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2270/00—Refrigeration techniques used
    • F25J2270/02—Internal refrigeration with liquid vaporising loop

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Gas Separation By Absorption (AREA)
  • Silicon Compounds (AREA)
IT97MI000422A 1996-02-28 1997-02-26 Recupero di argon da un forno per cristalli di silicio IT1289983B1 (it)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US1243996P 1996-02-28 1996-02-28
US08/785,515 US5706674A (en) 1997-01-17 1997-01-17 Argon recovery from silicon crystal furnace

Publications (2)

Publication Number Publication Date
ITMI970422A1 ITMI970422A1 (it) 1998-08-26
IT1289983B1 true IT1289983B1 (it) 1998-10-19

Family

ID=26683562

Family Applications (1)

Application Number Title Priority Date Filing Date
IT97MI000422A IT1289983B1 (it) 1996-02-28 1997-02-26 Recupero di argon da un forno per cristalli di silicio

Country Status (5)

Country Link
JP (1) JP3092101B2 (de)
KR (1) KR100199883B1 (de)
DE (1) DE19708025A1 (de)
IT (1) IT1289983B1 (de)
MY (1) MY116855A (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4519954B2 (ja) * 1998-07-07 2010-08-04 大陽日酸株式会社 高清浄乾燥空気と乾燥空気の製造方法及び装置
JP2000024444A (ja) * 1998-07-07 2000-01-25 Nippon Sanso Kk 高清浄乾燥空気の製造方法及び装置
TW423987B (en) * 1998-07-07 2001-03-01 Nippon Oxygen Co Ltd A manufacture method and device of highly pure dry air
JP3572548B2 (ja) 2002-05-24 2004-10-06 日本酸素株式会社 ガス精製方法及び装置
KR20020096026A (ko) * 2002-10-16 2002-12-28 장성진 고순도의 염기성／불활성 가스 제조를 위한 정제방법 및장치
US7862645B2 (en) 2008-02-01 2011-01-04 Air Products And Chemicals, Inc. Removal of gaseous contaminants from argon
DE102009003350C5 (de) 2009-01-14 2017-02-09 Reicat Gmbh Verfahren und Vorrichtung zur Abtrennung von Argon aus einem Gasgemisch
JP5321401B2 (ja) 2009-08-06 2013-10-23 信越半導体株式会社 シリコン酸化物除去装置及びシリコン単結晶製造装置の不活性ガス回収設備
KR101151272B1 (ko) * 2009-09-09 2012-06-14 박현진 고순도 다결정 실리콘 제조장치
DE102009044249B3 (de) * 2009-10-14 2011-06-30 ReiCat GmbH, 63571 Verfahren und Vorrichtung zur Abtrennung von Argon aus einem Gasgemisch
GB2477322B (en) * 2010-02-01 2015-10-21 Gas Recovery & Recycle Ltd Inert gas recovery system
TWI476038B (zh) * 2010-02-10 2015-03-11 Sumitomo Seika Chemicals 氬氣之純化方法及純化裝置
TWI478761B (zh) * 2010-02-25 2015-04-01 Sumitomo Seika Chemicals 氬氣之純化方法及純化裝置
JP5403685B2 (ja) * 2010-02-25 2014-01-29 住友精化株式会社 アルゴンガスの精製方法および精製装置
DE102011050247B4 (de) * 2011-05-10 2019-02-21 Reicat Gmbh Verfahren und Vorrichtung zur Abtrennung von Argon aus einem Gasgemisch
US20140165648A1 (en) * 2012-12-18 2014-06-19 Air Liquide Process & Construction, Inc. Purification of inert gases to remove trace impurities
WO2015094175A1 (en) * 2013-12-17 2015-06-25 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Purification of inert gases to remove trace impurities
CN105139897B (zh) * 2015-07-23 2017-08-11 清华大学 一种大规模连续制备包覆颗粒的系统
CN106288653A (zh) * 2016-10-21 2017-01-04 上海跃绅能源科技有限公司 一种单塔低温精馏回收氩气的装置及纯化回收氩气的方法
DE102018122312A1 (de) * 2018-09-12 2020-03-12 Air Liquide Deutschland Gmbh Anordnung und Verfahren zum Bereitstellen eines Gases wie eines Zerstäubergases zum Erzeugen eines Pulvers an einem Verwendungsort
CN110608367A (zh) * 2019-09-30 2019-12-24 苏州苏净保护气氛有限公司 一种氩气循环利用系统及方法
CN111634896B (zh) * 2020-05-19 2023-03-21 北京北大先锋科技有限公司 一种氩气净化与回收方法及系统

Also Published As

Publication number Publication date
JP3092101B2 (ja) 2000-09-25
JPH107410A (ja) 1998-01-13
KR19980068982A (ko) 1998-10-26
ITMI970422A1 (it) 1998-08-26
MY116855A (en) 2004-04-30
KR100199883B1 (ko) 1999-06-15
DE19708025A1 (de) 1997-09-04

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