TW423987B - A manufacture method and device of highly pure dry air - Google Patents

A manufacture method and device of highly pure dry air Download PDF

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Publication number
TW423987B
TW423987B TW088111435A TW88111435A TW423987B TW 423987 B TW423987 B TW 423987B TW 088111435 A TW088111435 A TW 088111435A TW 88111435 A TW88111435 A TW 88111435A TW 423987 B TW423987 B TW 423987B
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TW
Taiwan
Prior art keywords
air
dry air
clean dry
definition
definition clean
Prior art date
Application number
TW088111435A
Other languages
Chinese (zh)
Inventor
Daiji Nakajima
Hideyuki Honda
Yoshio Ishihara
Masaki Hirokawa
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Nippon Oxygen Co Ltd
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Publication date
Priority claimed from JP10192092A external-priority patent/JP2000024444A/en
Priority claimed from JP19209598A external-priority patent/JP4519954B2/en
Priority claimed from JP10192086A external-priority patent/JP2000024464A/en
Priority claimed from JP10192090A external-priority patent/JP2000028169A/en
Application filed by Nippon Oxygen Co Ltd filed Critical Nippon Oxygen Co Ltd
Application granted granted Critical
Publication of TW423987B publication Critical patent/TW423987B/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/869—Multiple step processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26—Drying gases or vapours
    • B01D53/261—Drying gases or vapours by adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40086—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by using a purge gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/402—Further details for adsorption processes and devices using two beds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0446—Means for feeding or distributing gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption

Abstract

A manufacture method of highly pure dry air includes air compression step, catalyst purification step to raise the reaction between hydrogen, carbon monoxide and oxygen and adhesion purification step to remove water and carbon dioxide. The space velocity of catalyst purification step is under 3000h<-1>. The air will flow through dehumidizer bed and purification bed in the adhesive purification step. The space velocity of the dehumidizer bed and in purification bed is under 11000h<-1> and 6000h<-1>, respectively.

Description

A7 B7 3^9 8'7 五、發明說明（ [技術領域] 本發明係關於高清淨乾燥空氣之製造方法及裝置*尤其 覦於可將半導體製造工廠或液晶製造工廠之製造過程等之 工業生產過程上使用之乾燥空氣予Μ掻力減少水分（濕氣 ，B〇isture)及其他不純物而供給之高清淨乾燥空氣之製 造方法及裝置者。 更詳细而言，本發明係闞於高清淨乾燥空氣之製造用之 方法及裝置*該高清淨乾煉空氣例如在半導體製造工廠中 不僅可用於晶Μ (薄板狀基體或基板）之處理步驟，亦有可 能用於保管晶片時及運送晶片時等之場合，在有可能與外 氣接觸之處所被用作保護晶Η為目的之氧體者。 [背景技術] 在Κ往之情形，被使用於半導體製造工瘢或液晶製造工 廠等之工業生產過程中之.乾燥空氣係Μ機械之驅動，閥之 動作，藥液之壓送，純水槽之換氣等為其被使用之主要目 的。為此種乾燥空氣，將大氣藉壓縮機壓縮至所指定之壓 力，視情利用濾器除去粒子後*藉吸附分離或膜分離手段 除去所含之水分*而Μ此製造該乾燥空氣。 通常使用之乾燥空氣之一般規格為，壓力0.5〜0.7HPa ，露點，流量1500〜3000Hra3 /h(其中Nbs為標準狀 態（ου，1氣壓）時之體積），使用廠商乃將上述各機器設 在自己之公司之工廠内，而施行自主管理。 另一方面，在半導體製造工廠或液晶製造工廠等之製造 過程中，例如以晶片而言，在機械間之移動，保管等之際 -----I I ---I II &lt; - — ---— I !訂--- ---I-- (請先閱讀背面之泷意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 4A7 B7 3 ^ 9 8'7 V. Description of the invention ([Technical Field] The present invention relates to a method and device for manufacturing high-definition clean dry air * especially for industrial production that can process semiconductor manufacturing plants or liquid crystal manufacturing plants, etc. The manufacturing method and device of high-definition clean dry air supplied by the dry air used in the process to reduce the moisture (moisture, moisture) and other impurities. More specifically, the present invention is based on the high-definition clean air. Method and device for manufacturing dry air * The high-definition clean dry air can be used, for example, in a semiconductor manufacturing plant not only for processing steps of a wafer (thin plate-like substrate or substrate), but also when storing and transporting wafers. In other cases, it is used as an oxygen body for the purpose of protecting crystals in places where it may come in contact with outside air. [Background Art] In the past, it is used in industries such as semiconductor manufacturing processes and liquid crystal manufacturing plants. In the production process, the dry air is driven by the M machine, the action of the valve, the pressure feeding of the medicinal solution, the ventilation of the pure water tank, etc. are the main purposes for which it is used. For this dry air Compress the atmosphere to a specified pressure by a compressor, remove particles using a filter as appropriate * remove the contained moisture by means of adsorption separation or membrane separation * and make this dry air. The general specifications of dry air used are , Pressure 0.5 ~ 0.7HPa, dew point, flow 1500 ~ 3000Hra3 / h (where Nbs is the volume in standard state (ου, 1 bar)), the manufacturer uses the above-mentioned machines in their own company's factory and implements On the other hand, during the manufacturing process of a semiconductor manufacturing plant or a liquid crystal manufacturing plant, for example, in the case of wafers, movement between machines, storage, etc. --- II --- I II &lt; -— ---— I! Order --- --- I-- (Please read the notice on the back before filling out this page) The paper size printed by the Employee Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs applies the Chinese national standard ( CNS) A4 size (210 X 297 mm) 4

A A7 _B7_五、發明說明（2 ) 若未充分施加保護措施，晶片則會暴露於空氣*而由於空 氣中之水分含量、氧含量、烴含量等之影饗，有不純物附 著於其上，因此發生特性之降低|洗滌步驟之增加等各種 不便或提高成本之因素。為了防止晶片被暴露於空氣，亦 有製備一種簡易箱子以實施使用氮氣之換氣操作等之處置 之例子。 然而，半導體製造工廠或液晶製造工廠等之製造技術被 .求嚴格之品質，又由於價格上之競爭，而被要求產品之更 經濟有效之生產。尤其是，晶片之保護對策*在半導體製 造工廠或疲晶製造工廠等之製造過程所採取者，在維持產 品特性*降低成本之觀點上被認為重要之項目。為保護晶 Η之氣氛氣髖，Μ相當高度之必需品需求高清淨乾燥空氣 。目前在半導體製造工廠或液晶製造工廠蚁氣氛氣體要求 之高清淨乾燥空氣之規格為•設法使空氣中所含之各不純 物（例如水分、一氧化碳、二氧化碳、氫氣等之不純物）量 各別達到1 Ο ρ P b Κ下之程度後供給該空氣之如此嚴格之規 ---------------裝--------~ ^ -------線 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 件 條 化 純 之驟 步 各 中 法 方 化 純 在 格。 規值 項定 此設 合 之 符格 了 嚴 為要 0 需 格亦 示 揭 之 明 發 效提 之於 好在 良的 M目 氣 一 空 另 燥之 乾明 淨發 清本 高 〇 將置 可裝 供及 提法 於方 在造 目 之 之給 明供 發定 本安 率 置從 裝止 及防 法在 方可 造 .， 製氣 之空備 氣燥設 空乾之 燥淨氣 乾清，空 淨高燥 清給乾 高供淨 之濟清 項經高 事力用 述壓使 下,ΜΓ 規所備 實照設 可依氣 供可用 乾 淨 清 高 之 出 bu— 0 本紙張尺度適用中國國家標準（CNS)A4規格（210x 297公釐） -5 _ ^23987 4 a? _B7 五、發明說明（3 ) 燥空氣之污染之下，經濟且有效地循環供給高清淨乾燥空 氣0 本發明之高清淨乾燥空氣之製造方法包含：胞行原料空 氣之壓縮之壓縮步驟；使該原料空氣中之氫氣及一氧化碳 與氧氣起反應之觸媒純化步驟；K及除去該原料空氣中之 水分、二氧化碳等不純物之吸附純化步驟，上述觸媒純化 步驟之空間速度為3000h_ 1 K下，上述吸附純化步驟在 利用一沿著原料空氣之流動芳向使乾燥劑床及氣體不純物 去除劑床通過之手段之下被進行 &gt; 該乾燥劑床之空間速度 為11000h_ 1以下，而氣體不純物去除劑床之空間速度為 6000h - 1 Μ 下0 本發明之高清淨乾燥空氣之製造裝置包含：被用Μ壓縮 原料空氣之壓縮機；被用以使該原料空氣中之氫氣及一氧 化碳與氧氣起反應之觸媒純化器；Μ及被用以除去該原料 空氣所含之水分、二氧化碳等不純物之吸附純化器，在上 述觸媒純化器中填充有以Pd1· Pt、Au、Rh、Ru、Fe、Cr、 (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員Κ消費合作社印製 主為起丨中 所氣 或 為金部 / 其 等氫 合合 口及， 廠如 組之入鋁層 Η 例 之成其化劑 造將 種製從氧除 製已 數所器性去 晶給 複合化活物 液供 或組純含纯 或濟 獨之附有不 廠經 單中 吸充體 . 工且 鼷靥逑填氣 造定 金金 上中及 製安 等等在其 Κ 體可 ζη此 而，； 導， 、Μ , 床劑 半氣 sη或媒劑燥 於空 、 媒觸燥乾。關燥 CU觸系乾之石，乾 、 糸屬：膠沸明淨 ΜΠ羼金有凝成發清 、 金 之層矽 合本高 C0之 分積化 有照之 、 分 成次氧 充依要 Ν1成主依二填 需 6 本紙張尺度適用中國©家標準（CNS)A4規格（210 X 297公釐） 423 98 A7 B7 五、發明說明（4 ) 、一氧化氮、水分、二氧化等不純物各別除去純化至1 0 p p b Μ下而整體達到不純物lOppb程度之高清淨乾煉空氣。 (請先閱讀背面之注意事項再填寫本頁) 再者，在本發明之方法中|在轉換使用至少二涸吸附器 之下胞行上述吸附純化步驟，上述轉換之時間為4至12小 時，再生溫度為100T： k上，再生氣體比率為40；SM下。 纆過上述吸附純化步驟處理後之高清淨乾煉空氣Μ產品 被供給於用氣設備，被該用氣設備使用後之高清淨乾燥空 氣經過画收而被提高壓力後，被混入上逑壓縮步驟之前段 或後段之空氣流，或被混入上述吸附純化步驟之前段或後 段之空氣流。使經過上述吸附純化步驟處理後之高濟淨乾 燥空氣至少一部分膨脹· Κ利用該項膨脹之能量使上述壓 縮步驟後之原料空氣進一步升壓。 經濟部智慧財產局員工消費合作社印f衣 經過上述吸附純化步揉處理後之高清淨乾燥空氣Μ產品 被供給於用氣設備*經過該用氣設備使用後被回收，而茌 利用新近供給於上述用氣設備之高清淨乾燥空氣之壓力之 下被壓縮或驅動* Μ便再次供給於上述用氣設備。上述新 近供給之高清淨乾燥空氣藉風扇驅動用之膨脹渦輪機之作 用膨脹，而上述使用後被回收之高清淨乾燥空氣藉膨脹渦 輪機所驅動之風扇之作用被壓縮。上述新近供給之高清淨 乾燥空氣有一部分Κ封閉氣體被供給於上逑膨脹渦輪機及 風扇之對外氣封閉之部分。 在上述壓縮步驟與上述觸媒純化歩驟之間皰行預純化步 驟Κ除去上述原料空氣中之水分，而將經過該預純化步驟 處理後之空氣流之一部分隨時採取Μ作為乾燥空氣產品。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) -7 - 4 23 987 A7 B7 五、發明說明（ 5 經濟部智慧財產局員工消費合作社印製 上述預純化步驟為藉吸附作用除去水 度為 1 2000h — 1 Μ 下。 在本發明之裝置中，每單位空氣量 系觸媒之填充量為0.33升Μ上，每單 劑之填充量為0.99升Κ上，而每單位 石之填充量為0.14升以上。 再者，在本發明之裝置中，設有熱 上述觭媒純化器導出之原料空氣與一 出之高清淨乾燥空氣之至少一部分進 再者*在本發明之裝置中*具備有 脹渦輪機，藉以使一從上逑吸附純化 空氣之至少一部分膨脹；Κ及與該膨 升壓機，藉Μ使上述壓縮機所壓縮之 ，又設有熱交換器，藉Μ使一從上述 壓高清淨乾煉空氣與一從上述觸媒純 進行熱交換。在上述膨脹渦輪機之導 間設有一具備旁通閥之旁通管路。 再者*在本發明之裝置中，具備有 渦輪機，藉Κ使一從上述吸附純化器 氣膨脹而被充作低壓產品供給於用氣 渦輪機同軸設置之風扇*藉Κ將經過 被回收之高清淨乾燥空氣予Κ壓縮Μ 設備。 在上述壓縮機與上述觸媒純化器之 分之步驟，其空間速 (IHm3 )之上述金屬 位空氣童之上述乾燥 空氣量之上述合成沸 交換器 從上述 行熱交 :升壓 器等出 腺渦輪 原料空 膨脹渦 化器導 入路線 ，藉以使一從 吸附純化器導 換。 機驅動 之高清 機同軸 氣進一 輪機導 出之原 與導出 用之膨 淨乾燥 設置之 步升壓 出之低 料空氣 路線之 :風扇驅動用之膨脹 導出之高清淨乾燥空 設備；Μ及與該膨脹 上述用氣設備使用後 再次供給於上述用氣 間具備有預純化器， --------- ------ 裝 -------—-訂--.------•線 (請先閱讀背面之注意事項再堉寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 8 A7 B7 五、發明說明（6 ) (請先閱讀背面之注意事項再填寫本頁) 被用Μ除去上述原料空氣中之水分。為此預純化器使用膜 分雛器，或在此預純化器至少填充1種有氧化鋁凝膠及/或 二氧化矽凝膠及/或沸石。 [圖式之簡單說明] 圖1為展示本發明之高清淨乾燥空氣之製造方法及裝置 之第一形態例之糸統圖。 圖2為展示本發明之高清淨乾燥空氣之製造方法及装置 之第二形態例之系統圖。 圖3為展示本發明之髙清淨乾燥空氣之製造方法及裝置 之第三形態例之系統圖。 圖4為展示被使用於第三形態例中之風扇驅動用之膨脹 渦輪機及風扇之另一態樣之糸統圖。 圖5為展示被使用於第三形態例中之風扇驅動用之膨脹 渦輪機及風扇之另一不同態樣之系統圖。 圖6為展示本發明之高清淨乾燥空氣之製造方法及裝置 之第四形態例之系統圖。 1.,.壓縮機* 2.,.觸媒純化器， 3...吸附純化器， 經濟部智慧財產局員工消費合作社印製 3a,3b...吸附茼， 4...濾器， 5...第一熱交換器， 6.. ·第一加熱器，7...第二熱交換器，8...冷卻器， 9.. .用氣設備，10...第二加熱器，11...供給路線， 12.38.. .分歧路線，13...回收路線，14,16,18,20,22, 4 3, 47.…閥， 15, 44...再生氣體路線， 17,..第一混 人路線* 19...第二混人路線，2i...第三混入路線， 23.. .第四混人路線， 24...回收用之壓縮機， 31.., 9 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 23 987 A7 B7 五、發明說明（7 經濟部智慧財產局員工消費合作社印制衣 升壓機驅動用之膨脹渦輪機， 32...升壓機， 33... 動力回收機構， 34...壓後冷卻器， 35,54,71,74.., 軸， 36...第三熱交換器， 37...冷凝水分離器* 39.. ·水冷卻器，40,48,56,56a,56b,57,62,64,65,67, 68,69,79,δ0,8 1,82,83...路線， 41...低壓產品供給路 線* 42..,低壓產品使用設備，45...旁通閥，46... 旁通路線，49...合流路腺，51...風扇驅動用之膨脹渦 輪機，52 ,72,73...風扇* 53.,.循環供給機構，55, 55a，55b , 55c ·,.封閉氣體路線，6 1 ...第一風扇，63 .,. 第二風扇，66,..膨脹渦輪機* 75 ...齒輪式變速機構， 76.77.78.. .封閉部，91.,,預純化器，91a,91b...吸附 筒，92...熱交換器，93...預冷設備* 94...再生氣體 路線，95...加熱器，96,97,99...路線，98...乾燥空 氣使用設備 [實施發明之最佳形態] 茲根摟圖1說明本發明之第一形態例。本例之高清淨乾 燥空氣之製造裝置具有被用Μ壓縮,原料空氣之壓縮機1， 被用Κ使該原料空氣中之氫氣及一氧化碳與氧氣起反應之 觸媒純化器2，Μ及被用Κ除去該原料空氣中之水分、二 氧化碳等不純物之吸附純化器3。 原料空氣經過濾器4除去粉塵者在上述壓縮機1被壓縮至 指定壓力。此壓縮原料空氣被第一熱交換器5及第一加熱 器6加熱而被導入上述觸媒純化器2。在該觸媒純化器2内 ，壓縮原料空氣中之氫氣及一氧化碳與原料空氣中之氧氣 -------1 I I J — I ---—---！訂 1'--I--— I (請先閲讀背面之注意事項再锣寫本頁) 本紙張尺度適用令國國家標準（CNS)A4規格（210 X 297公釐） 10 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 4 2 3 9 8 / '扑 A7 _B7_ 五、發明說明（8 ) 進行反應而成為水及二氧化碳。從上逑觸媒純化器2導出 之壓縮原料空氣經過上述第一熱交換器5、第二熱交換器7 以及冷卻器8冷卻*而被導入上述吸附純化器3。 在該吸附純化器3中，上述因與氧氣發生反應而產生之 水及二氧化碳連同原料空氣原有之水分、二氧化碳等之不 純物被吸附除去。因此《可得到已除去一氧化碳、氫氣、 二氧化碳、水分至各含量均達lOppb Μ下之高清淨乾燥空 氣。此高清淨乾燥空氣成為產品被供給於用氣設備9。 上逑壓縮機1係用Μ將大氣吸人而予Μ壓縮至所需壓力 者*為此可依照壓縮歷力或流量採取任選之形式。例如， 在所需要之壓力為0.75MPa且流量為5000Hni3 /h之場合， 可採用渦輪壓縮機。 上述觸媒純化器2在筒内填充有金屜糸觸媒。所使用之 金屬系觸媒係採用 Pd、 Pt、 An、 Rh、 Ru、 Fe、 Cr、 Hi、 Co 、Hn、Cu、Sn、Zn等金屬單獨或複數種之組合為主成分， 或採用此等金屬中之組合所製成之合金為主成分者。 在金屬系觸媒中，例如為貴金屬糸觸媒使用Pd系觸媒之 場合，將該Μ系觸媒按單位空氣量（即原料空氣INie3 )填 充0.33升Μ上而將空間速度設定為3000h - 1 Μ下（W2 00 0 〜3000h· 1較佳）時，可藉觸媒反應使原料空氣中之氫氣 、一氧化碳被氧化成水、二氧化碳*而將氫氣、一氣化碳 之含量各別減低至lOppbK下。此時，若空間速度過度高 於3000h~ 1 *則有時會造成去除效率之降低，另若此項 空間速度太低，則會造成處理量之減少或觸媒量之增加而 -—11 - ~ I---11 u I · —---111 訂—-I —----- (請先閱讀背面之注意事項再墣寫本頁) A7A A7 _B7_ V. Description of the invention (2) If the protective measures are not sufficiently applied, the wafer will be exposed to the air *, and due to the moisture content, oxygen content, hydrocarbon content, etc. in the air, impurities will adhere to it, Therefore, various inconveniences such as a decrease in characteristics and an increase in washing steps or cost increase factors occur. In order to prevent the wafer from being exposed to the air, there is also an example in which a simple box is prepared for performing a ventilation operation using nitrogen or the like. However, manufacturing technologies such as semiconductor manufacturing plants or liquid crystal manufacturing plants are demanded for strict quality, and due to price competition, more cost-effective production of products is required. In particular, measures taken to protect wafers * in semiconductor manufacturing plants or manufacturing processes such as fatigue crystal manufacturing plants are considered important in terms of maintaining product characteristics * and reducing costs. In order to protect the atmosphere and hips of the crystal, the high-level necessities require high-definition clean dry air. At present, the specifications of the high-definition clean dry air required by the ant atmosphere gas in the semiconductor manufacturing plant or the liquid crystal manufacturing plant are: • Try to make the amount of each impurity (such as moisture, carbon monoxide, carbon dioxide, hydrogen, etc.) in the air reach 1 〇 Such a strict rule for supplying the air after the degree of ρ P b κ ---------- ~ ^ ------- line (Please read the notes on the back before filling out this page.) The steps for the printing of printed articles by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs are pure. The value of this item is consistent with the strict requirements of 0. It is necessary to also reveal the effect of the clear hair. It is better than the good-looking M eyesight. The clean and clear hair is high. It will be available for installation. And the reference to the side in the creation of the project for the establishment of the intrinsic safety rate is set to stop and prevent the law can only be made., Air preparation for air drying, air drying, air cleaning, air cleaning With the help of high pressure, the clean items for dry cleaning and high cleaning can be used under the pressure, and the actual photos set by the MΓ gauge can be used according to the gas supply. Clean and high-quality products can be used. — 0 This paper size applies to Chinese National Standards (CNS) A4 specifications (210x 297 mm) -5 _ ^ 23987 4 a? _B7 V. Description of the invention (3) Economically and efficiently circulating high-definition clean dry air under the pollution of dry air 0 The high-definition clean dry air of the present invention The manufacturing method includes: a compression step of compressing raw material air; a catalyst purification step for reacting hydrogen and carbon monoxide with oxygen in the raw material air; K and an adsorption purification step for removing impurities, such as moisture, carbon dioxide, in the raw material air , The above catalyst The space velocity of the purification step is 3000 h_ 1 K. The above adsorption purification step is performed by means of passing a desiccant bed and a gas impurity removing agent bed through a flow of aromatic air along the raw material direction. &Gt; The desiccant bed The space velocity is below 11000h_1, and the space velocity of the gas impurity remover bed is 6000h-1M under 0. The manufacturing device of the high-definition clean dry air of the present invention includes: a compressor that compresses raw material air by M; Catalyst purifiers for hydrogen and carbon monoxide reacting with oxygen in raw material air; M and adsorption purifiers for removing impurities such as moisture and carbon dioxide contained in the raw material air. The catalyst purifier is filled with Pd1 · Pt, Au, Rh, Ru, Fe, Cr, (Please read the precautions on the back before filling out this page) Member of the Intellectual Property Bureau of the Ministry of Economic Affairs, κ Consumer Cooperative, printed by Qiu Zhongqi or Gold Department / etc. Hydrogenation and synthesis, such as the group into the aluminum layer, for example, its chemical agent will be made from oxygen to remove a few organic decrystallization to the composite living liquid supply or group pure or pure Uniquely, there is a suction and filling body in the factory's factory sheet. Workers can fill gas deposits, make deposits, make safety, etc. in their K body. Or the medium is dry and the medium is dry. Guanzao CU touches the dry stone, dry and genus: glue boiled and clear MII, gold has condensed hair, gold layered silicon compound with high C0, the product is well-lit, divided into secondary oxygen filling according to N1 into the main Fill in 6 as required. This paper size is in accordance with China Standard (CNS) A4 (210 X 297 mm) 423 98 A7 B7 5. Description of the invention (4), impurities such as nitric oxide, moisture, and dioxide are removed separately High-definition clean dry air purified to 10 ppb M and reaching an overall level of 10 ppb of impurities. (Please read the notes on the back before filling this page) Furthermore, in the method of the present invention, the above adsorption and purification steps are performed under the conversion using at least two hydrazone adsorbers. The above conversion time is 4 to 12 hours. The regeneration temperature is 100T: at k, the regeneration gas ratio is 40; at SM.高清 The high-definition clean dry air M product processed after the above adsorption and purification step is supplied to the gas-using equipment. After the high-definition clean-dry air used by the gas-consuming equipment is drawn and raised in pressure, it is mixed into the upper compression step. The air flow in the previous or subsequent stage, or the air flow mixed in the previous or subsequent stage of the adsorption and purification step. At least a part of the high-purity dry air treated through the adsorption and purification step is expanded. K utilizes the energy of the expansion to further increase the raw air pressure after the compression step. The high-definition clean dry air M product of the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs ’consumer clothing after the above adsorption and purification process is supplied to the gas-consuming equipment * After the gas-consuming equipment is used, it is recovered, and it is newly supplied to the above. Compressed or driven under the pressure of high-definition net dry air of the air-consuming equipment * Μ is supplied to the above-mentioned air-consuming equipment again. The above-mentioned newly supplied high-definition clean dry air is expanded by the function of an expansion turbine driven by a fan, and the above-mentioned recovered high-definition clean dry air is compressed by the action of a fan driven by an expansion turbine. A part of the K-closed gas of the newly supplied high-definition clean dry air is supplied to the outer air-enclosed part of the upper expansion turbine and fan. A pre-purification step K is performed between the compression step and the catalyst purification step to remove the moisture in the raw air, and M is used as a dry air product at any time in a part of the air stream treated by the pre-purification step. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -7-4 23 987 A7 B7 V. Description of the invention (5 The above-mentioned pre-purification steps printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs are based on adsorption The water removal effect is 1 2000h-1M. In the device of the present invention, the amount of air per unit is 0.33 liters of catalyst, and the filling amount per unit is 0.99 liters, and per unit The filling amount of stone is more than 0.14 liters. Furthermore, in the device of the present invention, at least a part of the raw material air and the high-definition clean dry air derived from the above media purifier are provided. The device * is provided with an expansion turbine to expand at least a part of the purified air adsorbed from the upper shaft; and K and the expansion booster, which is compressed by the compressor, and a heat exchanger is provided, by which A heat exchange is performed from the above-mentioned high-pressure clean dry air and the above-mentioned catalyst. A bypass line with a bypass valve is provided between the guides of the expansion turbines. Furthermore, in the device of the present invention, With turbine A fan that is inflated from the above-mentioned adsorption purifier and supplied as a low-pressure product to the gas turbine coaxially is provided by K. The compressed high-definition clean dry air is passed to K by the K compressor. The catalyst purification unit is divided into steps, the space velocity (IHm3) of the above-mentioned metal-level air child, the above-mentioned dry air volume, and the above-mentioned synthetic boiling exchanger is heat-transferred from the above line: the turboexpander and other raw materials of the gland turbine are expanded and vortexed. The machine guides the route, so that one is switched from the adsorption purifier. The machine-driven high-definition machine coaxial air enters the turbine and the export and the expansion and drying settings are used to boost the low-pressure air route: fan-driven Pre-purifier with high-definition clean-drying equipment derived from expansion; M and the expansion gas-supplying equipment used in the above-mentioned gas-supplying room are equipped with a pre-purifier, --------- ------ --------- Order --.------ • Line (Please read the notes on the back before writing this page) This paper size applies to China National Standard (CNS) A4 (210 X 297 Mm) 8 A7 B7 V. Description of the invention (6 ) (Please read the precautions on the back before filling this page) The moisture in the raw material air is removed by M. For this purpose, a membrane separator is used for the prepurifier, or at least one kind of alumina condensate is filled in the prepurifier. Glue and / or silica gel and / or zeolite. [Simplified description of the drawing] Fig. 1 is a general view showing a first form example of the manufacturing method and device of the high-definition clean dry air of the present invention. Fig. 2 is A system diagram showing a second embodiment of the method and apparatus for manufacturing high-definition clean dry air according to the present invention. FIG. 3 is a system diagram showing a third embodiment of the method and apparatus for producing clean dry air according to the present invention. Fig. 4 is a general view showing another aspect of an expansion turbine and a fan used for driving a fan in the third embodiment. Fig. 5 is a system diagram showing another different aspect of an expansion turbine and a fan for fan driving used in the third embodiment. Fig. 6 is a system diagram showing a fourth embodiment of the method and device for manufacturing high-definition clean dry air according to the present invention. 1., Compressor * 2.,. Catalyst Purifier, 3 ... Adsorption Purifier, printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, 3a, 3b ... adsorption plutonium, 4 ... filter, 5 ... the first heat exchanger, 6 .. · the first heater, 7 ... the second heat exchanger, 8 ... the cooler, 9 .. the air-conditioning equipment, 10 ... the second heating Device, 11 ... supply route, 12.38 ..... divided route, 13 ... recovery route, 14,16,18,20,22, 4 3, 47 ... valve, 15, 44 ... regeneration gas route 17, 17, the first mixed route * 19 ... the second mixed route, 2i ... the third mixed route, 23 .. the fourth mixed route, 24 ... the compressor for recycling, 31 .., 9 This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 23 987 A7 B7 V. Description of the invention (7 Driver for printed press booster of the Intellectual Property Bureau employee consumer cooperative of the Ministry of Economic Affairs Expansion turbine, 32 ... booster, 33 ... power recovery mechanism, 34 ... after cooler, 35, 54, 71, 74 .., shaft, 36 ... third heat exchanger , 37 ... Condensate water separator * 39 .. · Water cooler, 40,48,56,56a, 56b, 57,62,64,65,67, 68,69,79, δ0,8 1,82 , 83 ... route, 4 1 ... low-pressure product supply route * 42 .., equipment for low-pressure products, 45 ... bypass valve, 46 ... bypass line, 49 ... combination glands, 51 ... for fan drive Expansion turbine, 52, 72, 73 ... fan * 53.,. Circulating supply mechanism, 55, 55a, 55b, 55c · ,. closed gas route, 6 1 ... first fan, 63 .., second Fan, 66 .. Expansion turbine * 75 ... Gear-type speed change mechanism, 76.77.78 .. Closed section, 91. ,, Pre-purifier, 91a, 91b ... Adsorption cartridge, 92 ... Heat exchange Device, 93 ... pre-cooling equipment * 94 ... regenerative gas route, 95 ... heater, 96,97,99 ... route, 98 ... dry air using equipment [best form for implementing invention ] Figure 1 illustrates the first embodiment of the present invention. The high-definition clean dry air manufacturing device of this example has a compressor 1 compressed with raw material air, and hydrogen and carbon monoxide in the raw material air are used by K Catalyst purifier 2 that reacts with oxygen, M and adsorption purifier 3 that removes impurities such as moisture and carbon dioxide in the raw material air by using K. The raw material air is removed by the filter 4 to remove the dust in the compressor 1 to the designated compressor Press This compressed feed air 5 is a first heat exchanger 6 and a first heater heating the catalyst is introduced into the purifier 2. In the catalyst purifier 2, hydrogen and carbon monoxide in the raw material air and oxygen in the raw material air ------- 1 I I J — I --------! Order 1 '-I --- I (Please read the notes on the back before writing this page) This paper size applies the national standard (CNS) A4 specification (210 X 297 mm) 10 Intellectual Property Bureau of the Ministry of Economic Affairs The paper size printed by the employee consumer cooperative is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 4 2 3 9 8 / '扑 A7 _B7_ V. Description of the invention (8) The reaction becomes water and carbon dioxide. The compressed raw air discharged from the upper catalyst purifier 2 passes through the first heat exchanger 5, the second heat exchanger 7, and the cooler 8 to be cooled * and is introduced into the adsorption purifier 3. In this adsorption purifier 3, the above-mentioned water and carbon dioxide generated by the reaction with oxygen, together with impurities such as moisture and carbon dioxide existing in the raw material air, are adsorbed and removed. Therefore, "high-definition clean dry air with carbon monoxide, hydrogen, carbon dioxide, and moisture removed to a content of 10 ppb M can be obtained. This high-definition clean dry air is supplied to the air-using equipment 9 as a product. The upper compressor 1 is a person who sucks the atmosphere with M and compresses it to the required pressure. * For this purpose, an optional form may be adopted according to the compression history or flow rate. For example, where the required pressure is 0.75 MPa and the flow rate is 5000 Hni3 / h, a turbo compressor can be used. The catalyst purifier 2 is filled with a gold drawer catalyst in a cylinder. The metal catalysts used are based on Pd, Pt, An, Rh, Ru, Fe, Cr, Hi, Co, Hn, Cu, Sn, Zn and other metals alone or in combination, or use these An alloy made of a combination of metals as the main component. In the case of metal catalysts, for example, when Pd catalysts are used for precious metal 糸 catalysts, the M-type catalyst is filled with 0.33 liters of M per unit of air volume (that is, raw air INie3), and the space velocity is set to 3000h- At 1 M (W2 0 0 0 ~ 3000h · 1 is better), the hydrogen and carbon monoxide in the raw material air can be oxidized to water and carbon dioxide by the catalyst reaction, and the hydrogen and monogasified carbon can be reduced to lOppbK. under. At this time, if the space velocity is excessively higher than 3000h ~ 1 *, sometimes the removal efficiency will be reduced, and if this space velocity is too low, it will cause a reduction in the processing capacity or an increase in the catalyst amount. ~ I --- 11 u I · —--- 111 Order —-I —----- (Please read the precautions on the back before writing this page) A7

4 23 98 7 JrS __ B7_ 五、發明說明（9) 變得不經濟。 利用上述觸媒反應之氫氣、一氧化碳之去除處理係依觸 媒而不同者，而可在30〜150Ό溫度下施行之。在亦將極 微量之甲烷、乙烷、丙烷等之烴類同時利用觸媒反應予K 除去之場合，則升溫至3 5 0 υ之程度Μ施行處理即可〇上 述第一熱交換器5及第一加熱器6被設置成一種使壓縮原料 空氣之溫度上升至上述觸媒反應溫度為目的之機構。即， 予以設計為*在觸媒反應溫度高於利用上述壓縮機1之壓 縮熱所達成之溫度之場合，使觸媒純化器2之入口空氣與 出口空氣藉第一熱交換器5施行熱交換，藉此回收其反應 後之高溫空氣所擁有之熱，然後藉第一加熱器6之加熱來 補充所不足之熱量。因此*可提高熱效率。 上述冷卻器8被用Μ將上述吸附純化器3之入口空氣冷卻 至5〜10Γ。此冷卻器8例如為一種由水冷卻器與脫水器（ 冷凝水分離器）之組合而成之裝置。此冷卻器8具有一種功 能如下：即，冷卻該觸媒反懕後之原料空氣，以使水分凝 縮而予Μ除去，藉此減少水分侵入上逑吸附純化器3內之 量。因此*可提高吸附純化器3之運轉效率。此時之原料 空氣之冷卻溫度愈低，其水分童愈減少，而可減輕吸附純 化器3之負荷，不過冷卻溫度主要在上述之溫度範圍（5〜 1 0 t )内即可*並且冷卻方法亦未特別受到限制。 上述附純化器3為筒内填充有吸附劑，用以吸附除去水 分、二氧化碳者。在該吸附純化器3從上述原料空氣之入 口部起依次積層有•·乾燥劑床，其中填充有含活性氧化鋁 紙張尺度適用_國國家標準（CNS)A4規格（210 X 297公釐) -12- I ------- J--- - — I I I — I ! itl — I (請先閲讀背面之注意事項再磺寫本頁) 經濟部智慧財產局員工消費合作社印製 A7 423987 _B7___ 五、發明說明（10 ) 及/或二氧化矽凝膠之乾燥劑（水分去除劑）；以及氣體不 純物去除劑層，其中填充有合成沸石。為該合成沸石1可 將Ha-X型、Ca-χ型、Li-X型、tia-Α型，Ca-A型單獨或複數 組合使用之。又按，對於上述吸附純化器3亦可以將適當 之吸附劑單獨或複數種混合填充於筒內全體。 例如，對於上逑吸附純化器3，將作為乾煉劑之氧化鋁 凝膠積層填充於入口部之简底附近，而將作為氣體不純物 去除劑之Ha-Χ型合成沸石積層填充於出口側時，可將原料 空氣原有之水分、二氧化碳連同由上述觸媒純化器2内之 反應所產生之水及二氧佾碳K良好之效率一起吸附除去。 此時•氧化鋁凝膠與合成沸石之填充比率通常按容積比計 算時為1 : 2之程度。 再者，上述乾燥劑床之空間速度為UOOOh - 1以下，K 9000〜llOOOh - 1較佳。上述氣體不純物去除劑床之空間 速度為6000h - 1 Μ下，M4000〜6000h - 1較佳。藉此， 可將水分及二氧化碳各別去除至lOppbK下。此時，若空 間速度高於上逑各數值，則有時會造成去除效率之降低， 另若此項空間速度太低，則會招致處理量之減少或吸附劑 量之熠加而變得不經濟。 再者，吸附純化器3以後之供高濟淨乾燥空氣流動之用 之管路乃以不銹網製品較合適，最好能為對不銹鋼施加電 解磨先處理以使内面成為鏡面者。又按，雖然在本形態例 中分開設置觸媒純化器2與吸附純化器3，但亦可Μ採取一 個容器内填充有觸媒及吸附劑之方式。 私紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） --I---I I---1裝 ----I---訂--.--I----線 (請先閱讀背面之注意事項再堉寫本頁) 經濟部智慧財產局員工消費合作社印製 -13 - A7 423 987 _B7_ 五、發明說明（11 ) 上述吸附純化器3具備二個填充有上述吸附劑之吸附筒 3a,3b，其設計為，Μ吸附筒3a皰行吸附步驟時可麴吸附 筒3b來施行再生步驟之方式被轉換運轉，俾可連續施行原 料空氣之鈍化處理。 此等吸附筒之再生步驟係依照加熱再生階段及冷卻階段 施行者。加熱再生階段所用之加熱再生氣體及冷卻階段所 用之冷卻氣體均在基本上利用經過吸附步驟後之純化氣體 (高清淨乾燥空氣產品）之一部分。但在使用未含或極少含 不純物（如水分、二氧化碳、氫氣、一氧化碳等）之氣體例 如經過用氣設備9用過之高清淨乾燥空氣或自空氣液化分 離裝置（未圖示）排出之氣體時，可提高高清淨乾燥空氣產 品之產率。上述用氣設備9例如為半導體積體電路、液晶 面板、太陽電池面板等之製造用之装置。 上述加熱再生階段之再生溫度乃依加熱再生時間、加熱 再生氣體量等之條件而不同，通常為100〜1501C、在本形 態例之裝置中|為一種使加熱再生氣體升溫至此項溫度所 需之加熱機構*設有第二熱交換器7及第二加熱器10。第 二熱交換器7使經過第一熱交換器5之觸媒純化器2之出口 氣體興加熱再生氣體用之氣體進行熱交換，Μ回收該出口 空氣所擁有之熱量而使該加熱再生氣體升溫。在第二熱交 換器7所行之熱交換之結果該加熱再生氣體並未升溫至所 指定之溫度之場合，第二加熱器10被用以使該加熱再生氣 體更升溫至所指定之溫度。 又按，亦珂Μ設法使加熱再生氣體先通過第一熱交換器 紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) -14- ----- —----( — ----—----訂—ί ----— &lt;請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 423987 « A7 _B7_ 五、發明說明（12 ) 5後再通過第二熱交換器7，藉此升溫。在第二熱交換器7 有能力使加熱再生氣體升溫至所指定之溫度之場合，不需 要設置第二加熱器10。再者，亦可以不設置第二熱交換器 7，而僅藉第二加熱器10來加熱該加熱再生氣體。上述冷 卻階段之冷卻氣體不必通過第二熱交換器7或第二加熱器 10，而直接予以導入吸附筒即可。 如此將二個吸附简3a,3b轉換以用於吸附步驟與再生步 驟以施行原料空氣之鈍化之埸合，設定兩步驟之轉換時間 為4〜1 2小時（K 6〜1 2小時較佳），再生溫度為1 0 0 C以上（ K1201CM上較佳Μ及再生氣體比率為40¾^下（M20X Μ下較佳）時，可施行效率良好之運轉。 又按，為再生用之氣體，使用如被用過之高清淨乾燥氣 體或空氣液化分離裝置所排出之氣體等之來自其他製程之 氣體之場合，在勘酌該製程之運轉條件上之平衡之下施行 操作。 經過上述吸附純化器3純化後，所得之高清淨乾燥空氣 通過供給路線11被供給於半導體製造工廠、高密度記錄媒 體製造工廠或液晶製造工廠等工廠之用氣設備9。再者， 由於在供給路線11設有分歧路線12，可供給高清淨乾燥空 氣之一部分Μ作為空氣液化分雛裝置（未圖示）之原料。 此外*在本形態例中，設計至可從回收路線13回收其經 過用氣設備9使用後之高清淨乾燥空氣。所回收之高清淨 乾煉空氣依照其污染度或回收量可藉由具有閥14之再生氣 體路線15被用作吸附純化器3之再生氣體*或藉由具有閥 -15 - I I I I 111 I I —r I I . - I ---I -. ^ » Γ— — I — I (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 Α7 _Β7_ 五、發明說明（13 ) 16之第一混入路線17被混人吸附純化器3後段之高清淨乾 燥空氣流，或藉由具有閥18之第二混入路線19被混入吸附 純化器3前段之原料空氣流，或藉由具有閥20之第三混入 路線21被混入壓縮機1後段之原料空氣流，或藉由具有閥 22之第四混入路媒23被绲入壓縮機1前段之原料空氣流。 藉此，可提高高清淨乾燥空氣之利用效率*而可企求高 清淨乾燥空氣製造裝置之小型化或蓮轉成本之降低。又按 ，在高清淨乾燥空氣被回收Μ供再利用之場合，依照所混 入對象之壓力，藉回收用之壓縮機24予以壓縮。 其次，根據圖2說明本發明之第二彤態例。又按，在Μ 下之各形態例中*對於具有與圖1之功能相同之功能之構 件編以共同之符號而省略其詳细說明。 本例之高清淨乾燥空氣之製造裝置具備一動力回收機構 1.3包含：使一從上述吸附純化器3導出之高清淨乾煥空氣 之至少一部分膨脹之膨脹渦輪機31; Μ及與該膨脹渦輪機 31同軸設置之升歷機32。該升壓機32在利用膨脹渦輪機31 所產生之膨脹能量之下被驅動，Μ使上逑壓縮步驟後之原 料空氣進一步升壓。 原料空氣通過濾器4後被壓縮機1壓縮至指定壓力*而經 過一壓後冷卻器34冷卻後被導入上述升壓機32。此項壓縮 原料空氣藉升壓機32升壓至適於觸媒純化步驟之壓力，例 如 0.46MPa等。 上逑升壓機32係利用從上述吸附純化器3導出之高清淨 乾燥空氣之壓力Μ使原料空氣升壓者。為上述膨脹渦輪機 氏張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) —16 — f —. 裝 ---------訂· I--------線 &lt;請先閱讀背面之注意事項再垓寫本頁) A7 4 23 987 d ___B7_ 五、發明說明（I4 ) 31與升壓機32之連接，採取藉軸35連接之一軸式連接，而 為軸35之軸承*較佳的是，採用一種利用高清淨乾燥空氣 之一都分之氣體軸承，或磁牷軸承。此等軸承之摩擦阻力 小，可提高動力之回收效果之同時，可完全切斷其與外氣 等之污染源之接觸，而可防止高清淨乾燥空氣被污染。又 按，為軸承，亦可採用滾珠與滾子支承•合金支承等之方 式。 藉上述升壓機32升壓後，升壓空氣通過第一熱交換器5 及第一加熱器6而被導入觸媒純化器2。該觸媒純化器2内 所產生之水及二氧化碳連同升壓空氣被上述第一熱交換器 5冷卻後，依次經過第二熱交換器7、第三熱交換器36冷卻 ，凝縮之水藉脫水器（冷凝水分離器）37分離後，被導人吸 附純化器3。又按，必要時亦可以設置冷卻器。 升壓空氣被導入上述吸附純化器3後，變為一被吸附除 去水分及二氧化碳至各達lOppb Μ下之高清淨乾燥空氣， 而經過供給路線11被供給於用氣設備9。回收路線13回收 之高清淨乾燥空氣可藉由第三混入路線21被混人升壓機32 後段（代替壓締機1後段）之升壓空氣流。 上述供給路線11之高清淨乾煉空氣有一部分被分歧（分 出）於分歧路線38，而被利用Μ作為吸附純化器3之再生氣 體及低壓產品。該分歧路線38之高清淨乾燥空氣在上述第 二熱交換器7中與一從上述觸媒純化器2導出之高溫升壓空 氣施行熱交換而升溫。升溫後之高清淨乾燥空氣*從上述 第二熱交換器7導出者，經過一具有水冷器39之路線40被 紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱) ~ 1 7 - ----it------· — I-----'訂· i Γ-----*&quot;5^ (請先閲讀背面之注意事項再埤寫本頁) 經濟部智慧財產局員工消費合作社印製 4 2 3 98 7.、 47 A7 _B7 五、發明說明（is) 經濟部智慧財產局員工消費合作社印製 力 之 生 產 所 脹 膨 項 〇 該力 由動 ’ 驅 脹之 膨32 而機 31壓 機升 輪述 渦上 脹為 膨作 述K 上用 人利 導被 換產 交壓 熱低 三 過 第通 在 ， 者後 壓溫 低 升 溫而 低換 成交 形熱 而行 脹施 膨氣 由空 氣壓 空升 燥述 乾上 淨與 清中 高36 器 該而 從44 ’ 線 外路 此體 。 氣 42生 備再 設之 用43 使閥 品有 產具 壓於 低歧 於 分 給 4 供線 被路 41給 線供 路品 給產 供壓 品低 攢 氣 生 再 產 壓 低 照 依 係 力 壓□ 出 之 1- 3 機 輪 渦 脹 匕膨 之 XI 3 之 器用 化動 純驅 附機 吸壓 為升 成 為 定 設 能 好 定 最 設量 Μ 洩 予漏 力部 壓外 之之 2 1 4 3 備機 設輪 用渦 使脹 品膨 是 其 尤 下Μ 如 例 按 又 ο 者 \ly 等4 23 98 7 JrS __ B7_ V. Description of the invention (9) It becomes uneconomical. The removal of hydrogen and carbon monoxide by the above-mentioned catalyst reaction depends on the catalyst, and it can be performed at a temperature of 30 to 150 ° C. Where hydrocarbons such as methane, ethane, propane, etc. are also removed by a catalyst reaction at the same time, the temperature may be raised to a level of 3 5 0 and the treatment may be performed. The above first heat exchanger 5 and The first heater 6 is provided as a mechanism for the purpose of raising the temperature of the compressed raw material air to the above-mentioned catalyst reaction temperature. That is, it is designed to * perform heat exchange between the inlet air and the outlet air of the catalyst purifier 2 through the first heat exchanger 5 when the catalyst reaction temperature is higher than the temperature reached by the compression heat of the compressor 1 described above. Therefore, the heat of the high-temperature air after the reaction is recovered, and then the insufficient heat is supplemented by the heating of the first heater 6. Therefore * thermal efficiency can be improved. The cooler 8 is cooled by M to the inlet air of the adsorption purifier 3 to 5 to 10 ?. The cooler 8 is, for example, a device composed of a combination of a water cooler and a dehydrator (condensate water separator). This cooler 8 has a function as follows: That is, the raw material air after the reaction of the catalyst is cooled to condense and remove the water, thereby reducing the amount of water intruding into the upper adsorption adsorption purifier 3. Therefore * the operation efficiency of the adsorption purifier 3 can be improved. At this time, the lower the cooling temperature of the raw material air, the less the moisture content of the raw air, which can reduce the load on the adsorption purifier 3. However, the cooling temperature is mainly within the above-mentioned temperature range (5 to 10 t). * And the cooling method Nor is it particularly restricted. The purifier 3 is a cartridge filled with an adsorbent for adsorbing and removing water and carbon dioxide. A desiccant bed is laminated in this adsorption purifier 3 in order from the inlet of the raw material air, which is filled with activated alumina-containing paper. Applicable to national standards (CNS) A4 (210 X 297 mm)- 12- I ------- J ----— III — I! Itl — I (Please read the notes on the back before writing this page) Printed by A7 423987 _B7___ 5. Description of the invention (10) and / or desiccant (moisture removing agent) of silica gel; and a layer of gas impurity removing agent, which is filled with synthetic zeolite. For this synthetic zeolite 1, Ha-X type, Ca-x type, Li-X type, tia-A type, Ca-A type can be used alone or in combination. In addition, for the above-mentioned adsorption purifier 3, an appropriate adsorbent may be filled in the whole of the cylinder either alone or in combination. For example, in the case of the upper adsorption adsorption purifier 3, an alumina gel layer as a drying agent is filled near the bottom of the inlet, and a Ha-X type synthetic zeolite layer as a gas impurity removing agent is filled on the outlet side. The original moisture and carbon dioxide of the raw material air can be adsorbed and removed together with the good efficiency of the water and dioxin carbon K produced by the reaction in the catalyst purifier 2 described above. At this time, the filling ratio of alumina gel and synthetic zeolite is usually about 1: 2 when calculated by volume ratio. In addition, the space velocity of the desiccant bed is below UOOOOh-1, and K 9000 ~ llOOh-1 is preferred. At a space velocity of the above-mentioned gas impurity removing agent bed of 6000h-1M, M4000 ~ 6000h-1 is preferable. Thereby, moisture and carbon dioxide can be separately removed to 10 ppbK. At this time, if the space velocity is higher than the above values, it will sometimes cause a reduction in removal efficiency. If the space velocity is too low, it will lead to a reduction in processing capacity or an increase in the amount of adsorbent, making it uneconomical. . In addition, after the adsorption purifier 3, the pipeline for the flow of Gaojin dry air is more suitable as a stainless steel net product. It is best to apply electrolysis grinding to stainless steel to make the inner surface a mirror surface. Also, although the catalyst purifier 2 and the adsorption purifier 3 are separately provided in this embodiment, a method in which a container is filled with a catalyst and an adsorbent may be adopted. Private paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) --I --- I I --- 1 pack ---- I --- order --.-- I --- -Line (Please read the notes on the back before writing this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs -13-A7 423 987 _B7_ V. Description of the invention (11) The above adsorption purification device 3 has two filled with The adsorption cartridges 3a and 3b of the above-mentioned adsorbent are designed so that when the M adsorption cartridge 3a performs the adsorption step, the adsorption cartridge 3b can be switched to perform the regeneration step, and the passivation treatment of the raw material air can be continuously performed. The regeneration steps of these adsorption cylinders are performed according to the heating regeneration stage and the cooling stage. Both the heating regeneration gas used in the heating regeneration stage and the cooling gas used in the cooling stage are basically a part of the purified gas (high-definition clean dry air product) after the adsorption step. However, when using gas that contains no impurities (such as moisture, carbon dioxide, hydrogen, carbon monoxide, etc.), such as high-definition clean dry air that has been used by the gas equipment 9, or gas that is discharged from the air liquefaction separation device (not shown), , Can improve the yield of high-definition net dry air products. The gas-using equipment 9 is, for example, a device for manufacturing a semiconductor integrated circuit, a liquid crystal panel, a solar cell panel, or the like. The regeneration temperature in the above heating regeneration stage varies depending on the conditions such as the heating regeneration time and the amount of heating regeneration gas. Usually, it is 100 ~ 1501C. In the device of this embodiment, it is a heating required to heat the heating regeneration gas to this temperature. The mechanism * is provided with a second heat exchanger 7 and a second heater 10. The second heat exchanger 7 exchanges heat between the outlet gas passing through the catalyst purifier 2 of the first heat exchanger 5 and the gas for heating the regeneration gas, and recovers the heat possessed by the outlet air to raise the heating regeneration gas. . Where the heating regeneration gas does not rise to the specified temperature as a result of the heat exchange performed by the second heat exchanger 7, the second heater 10 is used to further increase the heating regeneration gas to the specified temperature. Pressing again, Yikem managed to make the heated regeneration gas first pass the paper size of the first heat exchanger to apply the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -14- ----- —---- ( — ----—---- Order—ί ----— &lt; Please read the notes on the back before filling out this page) Printed by the Intellectual Property Bureau Employee Consumer Cooperatives of the Ministry of Economic Affairs Printed by the Intellectual Property Bureau Employee Consumer Cooperatives of the Ministry of Economic Affairs The printed paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 423987 «A7 _B7_ V. Description of the invention (12) 5 and then passed through the second heat exchanger 7 to increase the temperature. Where the second heat exchanger 7 is capable of heating the regenerating gas to a specified temperature, the second heater 10 need not be provided. Furthermore, the second heat exchanger 7 may not be provided, and only the second heater 10 may be used to heat the heated regeneration gas. The cooling gas in the aforementioned cooling stage does not need to pass through the second heat exchanger 7 or the second heater 10, and may be directly introduced into the adsorption cylinder. In this way, the two adsorptions 3a, 3b are converted for the combination of the adsorption step and the regeneration step to passivate the raw material air. The conversion time of the two steps is set to 4 to 12 hours (K 6 to 12 hours is preferred) When the regeneration temperature is above 100 ° C (the best M on K1201CM and the ratio of the regeneration gas is 40¾ ^ (the best under M20X M)), it can perform efficient operation. Press again, for the regeneration gas, use such as In the case of used high-definition clean dry gas or gas discharged from the air liquefaction separation device and other gases from other processes, the operation is performed under the balance of the operating conditions of the process. Purified by the above-mentioned adsorption purifier 3 Then, the obtained high-definition clean dry air is supplied to the gas-using equipment 9 of a semiconductor manufacturing factory, a high-density recording medium manufacturing factory, or a liquid crystal manufacturing factory through a supply route 11. Furthermore, since the supply route 11 is provided with a branch route 12 It can supply a part of the high-definition clean dry air as the raw material of the air liquefaction separation device (not shown). In addition, * In this example, the design is designed so that it can be returned 13 times from the recovery route. The high-definition clean dry air after it is used by the gas equipment 9. The recovered high-definition clean dry air can be used as the regeneration gas of the adsorption purifier 3 through the regeneration gas route 15 with the valve 14 according to its pollution degree or recovery amount. * Or by having valve -15-IIII 111 II —r II.-I --- I-. ^ »Γ — — I — I (Please read the notes on the back before filling this page) Intellectual Property Bureau, Ministry of Economic Affairs Printed by the employee consumer cooperative A7 _Β7_ V. Description of the invention (13) The first mixed route 17 of the 16 is mixed with the high-definition clean dry air flow at the rear of the adsorption purifier 3, or mixed by the second mixed route 19 with the valve 18 The raw material air stream in the front stage of the adsorption purifier 3 is mixed into the raw material air stream in the rear stage of the compressor 1 through the third mixing route 21 with the valve 20, or is compressed by the fourth mixed road medium 23 with the valve 22. The raw material air flow in the front section of machine 1. This can improve the utilization efficiency of high-definition clean dry air * and reduce the miniaturization of the high-definition clean dry air manufacturing equipment or reduce the cost of lotus conversion. Press again, and the high-definition clean dry air is recovered. For reuse In this case, the compressor 24 is used for compression according to the pressure of the mixed object. Next, a second example of the present invention will be described with reference to FIG. 2. The components with the same function in 1 are coded with common symbols and detailed descriptions are omitted. The high-definition clean dry air manufacturing device of this example is provided with a power recovery mechanism 1.3 including: a high-definition clean At least a part of the dry air of the expansion expands the expansion turbine 31; M and a calendar 32 arranged coaxially with the expansion turbine 31. The booster 32 is driven by using the expansion energy generated by the expansion turbine 31, and the upper原料 The raw air after the compression step is further boosted. The raw air passes through the filter 4 and is compressed by the compressor 1 to a predetermined pressure *. After passing through the first-pressure cooler 34, the raw air is introduced into the booster 32 described above. This compressed raw air is boosted to a pressure suitable for the catalyst purification step by the booster 32, for example, 0.46 MPa. The upper pressure booster 32 boosts the raw material air by using the pressure M of the high-definition clean dry air derived from the adsorption purifier 3 described above. Applicable to China National Standard (CNS) A4 specifications (210 X 297 mm) for the expansion scale of the above-mentioned expansion turbines —16 — f —. Installation --------- Order · I -------- (Please read the precautions on the back before writing this page) A7 4 23 987 d ___B7_ V. Description of the invention (I4) 31 The connection between the booster 32 and the shaft is connected by the shaft 35. For the bearing of the shaft 35, it is preferable to use a gas bearing that uses one of the high-definition clean dry air, or a magnetic bearing. The frictional resistance of these bearings is small, while improving the power recovery effect, it can completely cut off its contact with pollution sources such as outside air, and prevent the high-definition clean dry air from being polluted. It can also be used as a bearing, and it can also adopt ball, roller, and alloy bearings. After being boosted by the booster 32, the boosted air passes through the first heat exchanger 5 and the first heater 6 and is introduced into the catalyst purifier 2. The water and carbon dioxide generated in the catalyst purifier 2 together with the pressurized air are cooled by the first heat exchanger 5 and then sequentially cooled by the second heat exchanger 7 and the third heat exchanger 36, and the condensed water is dehydrated by dehydration. After the separator (condensate water separator) 37 is separated, it is guided to the adsorption purifier 3. Press again, you can also set a cooler if necessary. After the pressurized air is introduced into the above-mentioned adsorption purifier 3, it becomes a high-definition clean dry air which is adsorbed to remove moisture and carbon dioxide to 10 ppb M, and is supplied to the gas-consuming equipment 9 through the supply route 11. The high-definition clean dry air recovered by the recovery route 13 can be mixed into the booster air flow of the rear section of the booster 32 (instead of the rear section of the press machine 1) through the third mixing route 21. A part of the high-definition clean dry air in the above supply route 11 is divided (separated) into the branch route 38, and M is used as the regeneration gas and low-pressure product of the adsorption purifier 3. The high-definition clean dry air of the branch route 38 is heated in the second heat exchanger 7 by exchanging heat with a high-temperature pressurized air derived from the catalyst purifier 2. The high-definition clean dry air after heating * is derived from the second heat exchanger 7 described above, and passes through a route 40 with a water cooler 39. The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public love) ~ 1 7 ----- it ------ · — I ----- 'Order · i Γ ----- * &quot; 5 ^ (Please read the notes on the back before writing this page) Economy Printed by the Ministry of Intellectual Property Bureau ’s Consumer Cooperatives 4 2 3 98 7., 47 A7 _B7 V. Description of the Invention (is) The expansion of the printing power production of the Intellectual Property Bureau ’s Employees ’Cooperatives’ printing force. The bulge 32 and the machine 31 press the lifting wheel and the vortex expands to swell as described in K. The user ’s guide is switched for production. The cross-pressure heat is lower than the third pass, or the pressure is lower and the heat is lowered. Expansion and inflation are performed by air pressure, air conditioning, drying, cleaning, and clearing, and the high and low 36 vessels should be removed from the 44 'line. The use of gas 42 is re-established 43 to make the valve products have a lower pressure than the distribution of the 4 supply line by the road 41 to the line supply to the supply of low pressure products □ 1-3 of the wheel bulging XI 3 of the turbulent device is used to drive the pure drive drive attached machine. The suction pressure rises to become the set value, which can be set to the best setting. The vortex of the machine is used to make the bulging product inflated. This is especially the case.

X 下 以 率 效 高 提 而 度 器溫 換口 交入 熱 之 • 11 二 3 第機 逑輪 上渦 用脹 利膨 於低 由降 可 溫 升 氣 空 燥 乾 淨 清 高 使 利 於 由 且 並 量乾 bb S. i 泻 求清 企 高 可壓 亦高 ， 與 能 中 熱？ 之 氣 空 溫 升 之 出 導， 2¾按 器又 化 〇 純用 媒利 觸效 從有 用之 器 換 交 熱 二 第 為 體 源 空 熱縮 之韌 換壓 交p^ 熱出 ιπ-ιίΰ 施機 氣縮 空壓 燥用 利 可 亦 外 M 例 態 形 本 在 分 被 分 部1 有 氣 空 燥 乾 淨6* ^ Μ 路 高 -線 之 II ΰ通 導旁 7 之 器45 換閥 交通 熱旁 二 有 第具 從於 歧 輪 渦 脹 膨 述 上 從1 與 而 流 合36 氣器 空換 燥交 乾熱 淨 三 清第 高入 壓導 低被 之在 出氣 導空 31燥 機乾 線 路 之 7 4 閥 有 具 (請先閱讀背面之注意事項再填寫本頁) 裝 訂： -線- 者 再 有 4- 前 之 淨一 清過 高通 壓分 低部 壓 低 低逑 之 上 溫於 升給 36供 器被 換節 交調。 熱當度 三 適溫 第可之 過，品 經此產 與藉壓 Μ。 低 ， 流 之 8*2 4 合 4 氣備 空 設 燥用 乾使 淨品 清產 高 壓 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） 18 經濟部智慧財產局員工消費合作社印製 4 2 3 9 8 7、 A7 B7 五、發明說明（16 ) 關於在上述第二熱交換器7之熱交換量，旁通路線46之 流量Μ及水冷卻器39之冷卻量，將通過合流路線49被導入 上述第三熱交換器36之低壓高清淨乾燥空氣之溫度設定為 上，且Μ儘量可成為低溫之方式予以設定。即* Κ 可達到下逑溫度之方式被控制：在第三熱交換器36施行熱 交換之上述升壓空氣中之水分在第三熱交換器36内不致結 冰之溫度。 低壓高清淨乾燥空氣因膨脹而呈低溫者在第三熱交換器 36施行熱交換Μ升溫至常溫*藉此可防止以後之管路等之 外壁上之结露。又按，為低壓高清淨乾燥空氣往第三熱交 換器36之流量*利用閥47來調節該流量。 如此，將具有膨脹滿輪機31及升壓機32之動力回收機構 33，第二熱交換器7，第三熱交換器36等有效配置時，有 可能Κ良好效率施行原料空氣之升壓*而可減低壓縮機1 之消耗電力。再者|不僅可供給高清淨乾燥空氣，亦可同 時供給低壓之高清淨乾燥空氣。 其次|根據圖3說明本發明之第三形態例。 本例之高清淨乾燥空氣之製造裝置具備一循環供給機構 53包含：使一從上述吸附純化器3導出於供給路線之高清 淨乾燥空氣膨脹之膨脹渦輪機51; Μ及與該膨脹渦輪機51 同軸設置之風扇52。該風扇52在利用膨脹渦輪機51所產生 之膨脹能量之下被驅動，Μ將使用後之高清淨乾燥空氣&gt; 從用氣設備9回收於回收路線13者* 一部分予Μ壓縮而供 給於用氣設備9。膨脹渦輪機51使較高壓力之高清淨乾燥 本紙張尺度適用中國國家標準（CNS)A4規格（21CU 297公釐） ~ 1 9 ~ ----------裝.-------- ^ ---! ~ 線 (請先閱讀背面之注意事項寫本頁) A7 423 987 _B7_ 五、發明說明（l7 ) 空氣，從供給路線11供給於用氣設備9者 &gt; 減壓至用氣設 備9之使用壓力。 為上述膨脹渦輪機51與風扇52之連接*採取藉軸54直接 連接之一軸式連接。為此軸54之軸承，探用氣體軸承或磁 性軸承，因為在其構造上摩擦阻力小，動力之回收效果高 ，並且可完全切斷其與外氣等之污染源之接觸。此等軸承 所用之封閉氣體為從上述供給路線11分歧於封閉氣體路線 55之高清淨乾燥空氣。又按，為了用作封閉氣體，可直接 從一路線56排氣*不過亦可Μ與流入該路線57之膨脹後之 高清淨乾燥空氣合流，Μ供給於用氣設備9。 如此*在本形態例中，將高清淨乾燥空氣藉風扇驅動用 之膨脹渦輪機51予Κ減壓Μ供給於用氣設備9並且利用該 膨脹渦輪機51所產生之動力能量來鼷動該風扇52，Κ將從 用氣設備9排出之使用後之高清淨乾燥空氣予以循環供給 於用氣設備9，因此不必另外準備風扇驅動用之動力。又 按•為循環供給機構53，可依照其循環之高清淨乾燥空氣 之處理量設置複數之循環供給機構。 圖4為展示循環供給機構5 3之另一態樣之糸統圖。在此 循環供給機構53設有二組各具同軸構成之膨脹渦輪機及風 扇。其膨脹渦輪機51與圖3之膨脹渦輪機51—樣，使流人 供給路線11之補給用之高清淨乾燥空氣減壓至用氣設備9 之使用壓力。 另一方面，循環用之高清淨乾煉空氣，經過用氣設備9 使用後被回收於回收線路13者，被分歧於往第一風扇61之 -~2D~- ---------------裝·-------1訂---------線 (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印制衣 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 3 98 7 ^ _B7_ 五、發明說明（18 ) 路線62與往第二風扇63之路線64。高清淨乾燥空氣分歧於 該路線62者被膨脹渦輪機51所驅動之第一風扇61壓縮Μ達 到比用氣設備9之使用壓力為高之壓力後，從一路線65被 導人膨脹渦輪機66。再者，高清淨乾燥空氣分歧於該路線 6 4者藉上逑膨脹渦輪機66所驅動之第二風扇63升壓至所指 定之壓送壓力。 下述三種高清淨乾燥空氣均各在同一壓力下合流於一路 線69而被供給於用氣設備9 :即，藉膨脹渦輪機51之作用 膨脹而被導出於一路線57之高清淨乾燥空氣；經過第一風 扇61升壓後藉上逑膨脹渦輪機66膨脹而被導出於一路線67 之循環用之高清淨乾燥空氣；以及經過第二風扇63升壓而 被導出於一路線68之高清淨乾燥空氣。 例如*高清淨乾燥空氣從供給路線11按壓力0.45MPa供 給者在膨脹渦輪機51内膨脹至數lOOmmAq。再者，路線62 之高清淨乾燥空氣藉第一風扇61升壓至約0.07MPa後，在 膨脹渦輪機66内膨脹至數lOOramAq。此外，路線64之高清 淨乾燥空氣藉第二風扇63升壓至數lOOmiiiAq。 再者，膨脹渦輪機51、66及風扇61、63之各軸承為與圖 3之場合相同之氣體軸承或磁性軸承。對各軸承各別供給 有從上述供給路線11分歧於封閉氣體路線55a、55b之高清 淨乾燥空氣以作為封閉氣體。封閉氣體被使用後，通過路 線56a、56b，K與供給於用氣設備9之高清淨乾燥空氣合 流。 在圖3之一軸式之場合，膨脹渦輪機側與風扇側在葉片 -Ζ ί - -----------!裝------- 訂---------線 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作杜印制衣 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 B7 423987 m 五、發明說明（19 ) (請先閱讀背面之注意事項异填寫本頁) 之旋轉數上相同*而風扇側之處理風量有一限度。圖4之 形態例由於設有複數組之膨脹渦輪機及風扇，可有效利用 其補給用之高清淨乾燥空氣所具之壓力能量。從而，葑於 補給用之高清淨乾燥空氣*有可能使循環用之高清淨乾燥 空氣大量（例如2倍）循環。又按，在補給用之高清淨乾燥 空氣之壓力高之場合，可用複數段之膨脹渦輪機使之順次 膨脹，而在各階段驅動風扇。 經濟部智慧財產局員工消費合作社印制衣 圖5為展示循環供給機構53之另一不同態樣之系統圖。 在此循環供給機構53中，藉齒輪式變速機構75使膨脹渦輪 機51(用Μ使補給用之高清淨乾燥空氣膨脹者）之軸71與風 扇72、73(用Μ壓送其循環用之高清淨乾燥空氣者）之軸74 連接。即，膨脹渦輪機51所產生之動力藉由齒輪式變速機 構75傳給風扇72、73。因此，對於1台之膨賬渦輪機51， 可按任選之轉數使2台之風扇72、73旋轉。使用此種齒輪 式變速機構時，可依照循環用之高清淨乾燥空氣之量、壓 送壓力Μ最適數目設置具有最適之形狀、性能之風扇，而 可在最好之效率之狀態下壓送大量之循環用之高清淨乾燥 空氣。 又按，在圖5之形態例中，由於使用齒輪式變速裝置75 ，採取曲徑構造Κ形成膨脹渦輪機51、風扇72及73中之對 外氣之封閉部76、77、7δ。對於此等封閉部76、77、78供 給有從供給路線11分歧於封閉氣體路媒55a、55b、55c之 高清淨乾燥空氣。又按，為封閉部之曲徑構造可採用習知 構造 &gt; 因此省略其詳细之圖示及說明。 22 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 4 23 98 ： A7 _B7 五、發明說明（20 ) 例如，補給用之高清淨乾燥空氣1從供給路線11按壓力 0.45MPa供給者f在膨脹渦輪機51内膨脹至數lOOmniAq1而 被導出於路線57。循環用之高清淨乾燥空氣，從用氣設備 9排出於回收路線13而分歧於路線79、80者，藉風扇72、 73各別升壓至數lOOtnmAq而被導出於路線81、82，並且與 上述路線57之補給用之高清淨乾燥空氣合流，而經過一路 線83被供給於用氣設備9。 又按，在圖3〜5之形態例中，由於為封閉氣體使用補給 用之高清淨乾燥空氣*其系統内完全與其他系铳分離，而 幾乎完全消除污染之可能性。再者，充作封閉氣體被使用 後降低壓力之高清淨乾燥空氣係與補給用之高清淨乾燥空 氣一起被供姶於用氣設備9，因此可有效予以利用。但在 補給用之高清淨乾燥空氣之壓力低而不適於用作封閉氣體 之場合*亦可Μ使用其他之適當氣體。 再者，茌圖4、5之形態例中*雖然使膨脹後之補給用之 高清淨乾燥空氣與升壓後之循環用之高清淨乾燥空氣合流 (請先閱讀背面之注音？事項再填寫本頁) 備 設 氣 用 照 依 Μ 可 亦 但 經濟部智慧財產局員工消費合作社印製 分 咅 他 其 之 備 設 9 氣 備用 設於 氣給 用供 於線 給路 供之 後他 者 再 其高 從之 況用 情環 之循 或 構 結 燥 乾 淨 之清 9 高 備之 設用 氣給 用補 照 而 依， 能定 可設 有當 力適 壓 Κ 送予 壓件 之條 氣之 空等 燥離 乾距 淨路 清管 組 之 扇 風 與 楗 輪 渦 腊 膨 用 採 。 然 力雖 壓 ’ 之中 選例 任態 屬形 亦之 丨 5力~ 壓 3 之圖 氣在 空 線使 路以 給 ， 供者 過體 經氣 以動 其驅 , 為 泵氣 射一空 噴燥 一 乾 用淨 使清 r 高 為之 成力 構壓 K高 可較 亦之 但給 ’ 供 合11 T3 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） C7 987 _D7_ 五、創作說明（21 ) 一從回收路線13流出之使用後之高清淨乾燥空氣循環。 圖6為展示本發明之高清淨乾燥空氣之製造方法及裝置 之第四形態例之系統圖。本例之高清淨乾燥空氣之製造裝 置係在壓縮機1與觸媒純化器2之間具有預純化器91，用以 除去原料空氣中之水分者。 原料空氣經過壓縮機1壓縮後被導人熱交換器92，以與 用過之高清淨乾燥空氣，從用氣設備9回收者，施行熱交 換，因此降溫而被導入預冷設備93。為此預冷設備93採用 下述型式之設備：即*藉水冷卻器將上述壓縮原料空氣冷 卻至5P〜常溫*繼之予Μ導人冷凝水分離器（未圖示）Μ 除去凝縮之水分。即，儘量除去原料空氣所含之水分，Κ 減少對預純化器91内所帶入之水分量，俾可提高預鈍化器 91之運轉效率。水冷卻器所行之冷卻之溫度愈低，排水量 愈增加*而減輕預純化器9 1之負荷，不過在預純化器9 1為 吸附器之場合，依照普通之運轉時*在上述溫度範圍内施 行即可。 為預純化器91，一般採用吸附器或膜分離器•乃分離原 料空氣中之水分而使露點變為- 3010以下之所謂乾燥機構 。又按，為預純化器91，亦可Μ使用一種Κ除水式熱交換 器、凝縮分離式純化器或冷乾熱交換器為基礎之低溫分離 式乾燥器。 關於膜分離器，可使用聚氛乙烯膜、氟糸聚合物（如特 夫綸、含氟樹脂等）膜、纖維素醅（如乙酸纖維素等）膜、 聚憩胺膜、聚颯膜、聚醢亞胺膜等。 (CNS)A4 (210 χ 297 ) - ολ - ---------------裝--------訂-i--------線 &lt;請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印别农 423987 C7 _D7五、創作說明（22 ) 在預純化器91為基礎之普通之預純化步驟中，使用可轉 換使用之複數（例如2涸）吸附筒91a、91b。普通之吸附简 係採用在縱型圓筒內填充有二氧化矽凝膠、氧化鋁凝膠、 Ca-A型沸石、Na-A型沸石、Ca-X型沸石、或K-A型沸石（商 品名稱：Mo 1 ecu 1 ar siveve 5 A，4 A，10X，或 3 A)等單獨 或複數組合者。 在利用上述吸附純化法來施行前述預鈍化步驟之場合， 在KOOOh-1 W下（M 9000〜llOOh-1較佳）之空間速度 下施行之。又按，若空間速度變高，則有時無法充分除去 水分。在轉換使用2個吸附筒91a、9〗b之場合，在吸附简 91a被用於吸附步驟時，吸附茼91b則被用於再生步驟，而 再生步驟係依照加熱再生階段及冷卻階段施行者。 為再生步驟之加熱再生階段及冷郤階段所用之再生氣體 乾 備淨 設清體 氣高氣 用之之 被94出 其路排 用線程 使體製 上氣他 本生其 基再之 在於分 f 歧 水 經 後 用 使 氣 空 液 氣 空 如 例 含 0 線 £ 置 路 t 裝 收^離 回而分 過化 分 --------------裝--------訂----------線 (諳先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 時 丨率 體效 氣造 之製 之 品 產 S 氣 高 提 可 體 氣 之 用 熱 之0 ^ 體月 ifl CM. 氣SF 用段 使閗 必生 再 為 機換 0交 壓熱 藉行 與施 體92 氣器 生換 再 交 述 上 使 熱 在 氣 空 料 原 締 壓 之 溫 升 熱 縮 壓 之 熱 之 持 保 所 氣 空 料 原 縮 壓 該 收 回 Μ 之 氣 空 料 原 縮 壓 在 而 右 左 °c ο 0 5 用 1®卜 Μ10 予為 而常 溫通 升度 此溫 藉生 ’ 再 量 定再 指 、 至 間 溫時 加生 來 再 源依 熱乃 他度 其溫 或生 95再 器項 熱此 加 〇 用 筒 利 附 , 吸 合入 場導 之Μ 足 予 不 後 量 度 熱 溫 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -25 - A7 423387 _B7_ 五、發明說明（23) 生氣體量等而不同，因此在使用其他製程之排出氣體之場 合，在勘酌該製程之蓮轉條件之平衡等之下予以決定再生 溫度。 乾燥空氣藉預純化器91施行預純化步驟所得到者，通過 一路線96後，有一部分分歧於一路線97而被供姶於半導體 製造工廠或疲晶製造工廠等之乾燥空氣使用設備98。再者 ，殘餘之’乾燥空氣經過一路線99被導入上述觸媒鈍化器2 ，繼之被導人吸附純化器3而成為高淸淨乾燥空氣。此高 清淨乾燥空氣藉由供給路媒11被供給於半導體製造工廠、 高密度記錄媒體製造工廠、液晶製造工廠、或太陽電池面 板製造工廠等之高清淨乾燥空氣使用設備（用氣設備）9。 在本形態例中，由於在預純化步驟除去原料空氣中之水 分，可少用觸媒或吸附劑之填充量。例如，單位空氣量之 觸媒填充量為0.033升以上*尤其以0.4M上較佳。再者， 觸媒純化步驟中之空間速度為30000h~ 1 Μ下，尤其Μ 2000〜30000 h_ 1較佳。若此空間速度變高*則有時無法 施行充分之反應。 單位空氣量之上述吸附劑之填充量為0.14升Μ上，尤其 以0.2升Μ上較佳。再者，該觸媒純化步驟中之空間速度 為 7000h - 1 Μ 下，尤其 Μ4000 〜6000h - 1 較佳。 依照本彫態例，可安定且經濟供給高清淨乾燥空氣或通 用之乾燥空氣。 實施例1 在依照圖1所示第一形態例之裝置之構成下，製成一種 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公1 ) -------+-------裝--------^訂---------- - 線 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 A7 Z3 987 “ ___B7 五、發明說明（24 ) 可製造高清淨乾燥空氣4000Nm3 /h之高清淨乾燥空氣製造 裝置。其運轉條件為如下： 空 氣 壓 緇 機 處 理 量 δΟΟΟΝπι3 /h 出 口 壓 力 0.75HPa 觸 媒 純 化 器 蓮 轉 溫 度 150T： 觸 媒 劑 董 2000 升 空 間 速 度 2500h- 1 吸 附 純 化 器 入 Π 溫 度 10¾ 轉 換 時 間 8小時 再 生 溫 度 12〇r 氧 化 鋁 凝 膠量 500升 *Az 間 速 度 1 0000h - ϊ 合 成 沸 石 最 1 000 升 空 間 速 度 . 5000h- 1 再 生 氣 體 純化氣體 產品 再 生 氣 體 量 lOOONm3 /h 高 清 淨 乾 燥空氣 產 品 量 4000Hms /h 壓 力 0 . 7MPa 在上述條件下，將高清淨乾燥空氣按4000Nm2 /h連壤製 造時之高清淨乾燥空氣產品中之不純物予以每15分鐘一次 連攮測定7000分鐘。其平均值為如下： 不純物 澹度[ppb] 水分 2.6 二氧化碳 2.9 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ------J-----裝·--- ---1 訂--------線 (諳先閱續背面之注意事項声填寫本頁) 經濟部智慧財產局員工消費合作社印製 27 A7 B7 五、發明說明（25 ) 一氧化碳 5.1 氫氣 1.3 如此，在上述運轉條件下運轉製造裝置之結果確認下述 事實：高清淨乾燥空氣產品已被除去其中之水分、二氧化 碳、一氣化碳、氫氣至各別達lOppbM下，即純化至一種 充分有可能被用作保護晶Η為目的之氣體之狀態。 實施例2 關於在依照圖2所示第二形態例所構成之裝置及習知之 高清淨乾燥空氣製造裝置中按4000 Nm3 /h製造低壓之高清 淨乾燥空氣時之動力費用施行比較。雙方之運轉參數及消 耗動力比均示於表1中。 表1 {請先閱讀背面之注意事項ί埃寫本頁) 經濟部智慧財產局員工消費合作社印製 運轉參數 本形態例 習知裝置例 原料空氣童 5500Nm3 /h 5500Nm3 /h 空氣壓縮機出口壓力 0.25HPa 0 . 46HPa 丨^7力回收裝置出口壓力 0.46MPa — 吸附純化器入口壓力 0.44HPa 0.44HPa 吸附，純化器出口壓力 0.43MPa 0.43HPa 腊渦輪機入口壓力 0.42HPa — 高清淨空氣供給壓力 0. lHPa 0.43MPa 高清淨空氣溫度 25 lor &gt;清淨空氣供給量 4000Hm3 /h 4000Ndi3 /h 消耗動力比 0, 73 1 . 00 實施例3 28 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） Α7 α 2 3 9d 7 _Β7_ 五、發明說明（26 ) 關於圖4所示之循環供給機構53中，對膨脹渦輪機51供 給lSOONm3 /h，0.45 MPa之補給用之高清淨乾燥空氣Μ使 之膨脹至16〇fflinAq而使循環用之高清淨乾燥空氣從壓力 120mmAq升壓至160mmA&lt;i時之路線69之循環風量施行測定。 其結果•得到之循環風量為5300Νιπ3 /h。即，減去補給 用之高清淨乾燥空氣時，得以回收從用氣設備9排出之高 清淨乾燥空氣3500N·3 /h而予Μ再利用。再者，此時之循 環供給機構53中之入口及出口之水分濃度均為3ppb，即得 以確認循環供給機構53所行之處理並未造成高清淨乾燥空 氣之被污染。依照本例，有可能處理其補給用之高清淨乾 燥空氣之約2倍量之循環用之高清淨乾燥空氣》而回收利 用率變為約6 6 S：。 實施例4 關於圖5之形態例所示之循環供給機構53中*對膨脹渦 輪機51供給1800ND13 /h，0.45MPa之補給用之高清淨乾燥 空氣以使之膨脹至IGOmmAq而使循環用之高清淨乾燥空氣 從壓力120roniAq升壓至160nnnAq時之路線83之循環風量施行 測定。 其結果|得到之循環風量為148000ΝΠ13 /h。即，減去補 給用之高清淨乾燥空氣時，得以回收從用氣設備9排出之 高清淨乾烽空氣146200NRI3 /h而予Μ再利用。再者，此時 之循環供給機構53中之入口及出口之水分澹度均為3ppb， 即得Μ確認循環供給機構53所行之處理並未造成高清淨乾 燥空氣之被污染。依照本例*有可能處理其補給用之高清 ^紙張尺度適用尹國國家標準（CNS)A4規格（210 X 297公釐） ---------1'-------f 訂------ {請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 -29 - 4 23 987 ' a? __B7 五、發明說明（27 ) 回 而 氣 空 燥 乾 ΕΓ 清 高 之 用 環 循 之 量 ο ^,a^θ ο 9 8 9 約約 之為 氣變 空率 燥用 乾利 淨收 -----------^---裝--------訂-------線 (请先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） J0Under X, the efficiency is improved, and the temperature is changed. Oral sex is hot. 11 2 3 The vortex on the machine wheel is used to swell the swelling to the low. The temperature can be raised, the air can be raised, the air can be cleaned, and the air can be cleaned. S. i Xie Qiu Qing is high in pressure and high, and can heat in the heat? The air and air temperature rises, and the 2¾ button is changed again. The pure medium effect is used to exchange the heat from the useful device. The second is the toughness of the body source air heat shrinkage. Ricoh is also used for air-condensation and air-drying. In the sub-section 1 there is air-air-drying and clean 6 * ^ LM Road-line II, which is connected to the guide 7 and the valve 45 is to change the traffic. The first is based on the expansion and expansion of the manifold, from 1 to the flow, 36 air-conditioners, air-drying, drying, heat-drying, net-clearing, high-pressure, low-pressure, and low-pressure. Valve has tools (please read the precautions on the back before filling in this page) Binding: -line- 者 再 有 4- before the net clears the high-pass pressure, the low part, the low part, and the upper part. Interchange. The temperature should be passed at the right temperature, and the product can be used under this condition. Low, streamlined 8 * 2 4 in 4 air preparation, air-drying, dry cleaning, clean production, high pressure, paper size applicable to China National Standard (CNS) A4 (210 x 297 mm) 18 Intellectual Property Bureau, Ministry of Economic Affairs, employee consumption Printed by the cooperative 4 2 3 9 8 7, A7 B7 V. Description of the invention (16) Regarding the heat exchange amount in the above-mentioned second heat exchanger 7, the flow rate M of the bypass line 46 and the cooling amount of the water cooler 39, The temperature of the low-pressure high-definition clean dry air introduced into the third heat exchanger 36 through the confluence route 49 is set to be upper, and M can be set as low as possible. That is, * κ can be controlled in such a way that the temperature in the pressurized air in which heat exchange is performed in the third heat exchanger 36 does not cause freezing in the third heat exchanger 36. The low-pressure high-definition clean dry air becomes low temperature due to expansion, and heat exchange is performed in the third heat exchanger 36 to increase the temperature to normal temperature *, thereby preventing condensation on the outer walls of the pipelines and the like in the future. Press again to adjust the flow rate of the low-pressure high-definition clean dry air to the third heat exchanger 36 using the valve 47. In this way, when the power recovery mechanism 33, the second heat exchanger 7, and the third heat exchanger 36 having the expansion full turbine 31 and the booster 32 are effectively arranged, it is possible to perform the boosting of the raw air with good efficiency * and It can reduce the power consumption of compressor 1. Furthermore, it can supply not only high-definition clean dry air, but also low-pressure high-definition clean dry air. Next, a third embodiment of the present invention will be described with reference to FIG. 3. The high-definition clean dry air manufacturing device of this example is provided with a circulating supply mechanism 53 including: an expansion turbine 51 that expands the high-definition clean dry air that is led out of the supply path from the adsorption purifier 3; Μ and coaxially arranged with the expansion turbine 51 Fan 52. The fan 52 is driven by using the expansion energy generated by the expansion turbine 51, and M will recover the used high-definition clean dry air from the gas consumption device 9 to the recovery line 13 * and compress a part of it to supply the gas Equipment 9. Expansion turbine 51 enables high-pressure high-definition clean-drying. This paper is sized for China National Standard (CNS) A4 (21CU 297 mm) ~ 1 9 ~ ---------- installed .----- --- ^ ---! ~ Line (please read the notes on the back to write this page) A7 423 987 _B7_ V. Description of the Invention (l7) Air is supplied from the supply route 11 to the air-consuming equipment 9 &gt; Decompression To the use pressure of the gas equipment 9. For the above-mentioned connection of the expansion turbine 51 and the fan 52, a shaft type connection is adopted, which is directly connected by the shaft 54. For this purpose, the bearings of the shaft 54 are gas bearings or magnetic bearings. Because of their low frictional resistance and high power recovery effect, they can completely cut off their contact with pollution sources such as outside air. The closed gas used in these bearings is high-definition clean dry air which diverges from the above-mentioned supply route 11 to the closed gas route 55. In addition, in order to be used as a closed gas, the gas can be directly exhausted from a route 56 *, but M can also be combined with the high-definition clean dry air flowing into the route 57, and M is supplied to the gas-consuming equipment 9. In this way, in this embodiment, the high-definition clean dry air is supplied to the air-consuming equipment 9 by the expansion turbine 51 for driving the fan, and the fan 52 is driven by the power energy generated by the expansion turbine 51. K is used to circulate and supply the high-definition clean dry air exhausted from the air-using device 9 to the air-using device 9, so it is not necessary to separately prepare power for driving the fan. Pressing • again is the circulation supply mechanism 53, and a plurality of circulation supply mechanisms can be set according to the amount of high-definition clean dry air that it circulates. FIG. 4 is a general view showing another aspect of the circulating supply mechanism 53. Here, the circulation supply mechanism 53 is provided with two sets of expansion turbines and fans each having a coaxial configuration. The expansion turbine 51 is the same as the expansion turbine 51 of FIG. 3, and decompresses the high-definition clean dry air for the supply of the supply route 11 to the operating pressure of the air-consuming equipment 9. On the other hand, the high-definition clean dry air used for recycling is recovered to the recovery line 13 after being used by the air-using equipment 9 and is divided into the first fan 61-2D ~--------- ------- Installation -------- 1 Order --------- line (Please read the precautions on the back before filling out this page) The paper size of the garment paper is in accordance with China National Standard (CNS) A4 (210 X 297 mm) A7 3 98 7 ^ _B7_ V. Description of the invention (18) Route 62 and route 64 to the second fan 63. The high-definition clean dry air diverges from the route 62 and is compressed by the first fan 61 driven by the expansion turbine 51 to a pressure higher than the use pressure of the air-consuming equipment 9, and then guided to the expansion turbine 66 from a route 65. Furthermore, the high-definition clean dry air diverges from the route 64. The second fan 63 is boosted to the specified pressure feed pressure by using a second fan 63 driven by the swell expansion turbine 66. Each of the following three types of high-definition clean dry air converges under the same pressure in a route 69 and is supplied to the gas-consuming equipment 9: that is, the high-definition clean dry air led out of a route 57 is expanded by the expansion turbine 51; After the first fan 61 is boosted, the high-definition clean dry air is circulated for use in a route 67 by being expanded by the swell expansion turbine 66; and after the second fan 63 is boosted, the high-definition clean dry air is led for a route 68. . For example, * high-definition clean dry air is expanded from the supply route 11 to a pressure of 0.45 MPa in the expansion turbine 51 to several 100 mmAq. Furthermore, the high-definition clean dry air of route 62 is boosted to about 0.07 MPa by the first fan 61, and then expanded to several 100 ramAq in the expansion turbine 66. In addition, the high-definition clean dry air of route 64 is boosted to 100miiiAq by the second fan 63. The bearings of the expansion turbines 51 and 66 and the fans 61 and 63 are the same gas or magnetic bearings as in the case of FIG. 3. As the closed gas, high-definition clean dry air branched from the supply route 11 to the closed gas routes 55a and 55b is supplied to each bearing. After the closed gas is used, K is merged with the high-definition clean dry air supplied to the gas-using equipment 9 through the lines 56a and 56b. In the case of the shaft type in Figure 3, the expansion turbine side and the fan side are on the blade -Z ί------------! Equipment --------- order -------- -Line (please read the precautions on the back before filling this page) The consumer cooperation of the Intellectual Property Bureau of the Ministry of Economic Affairs Du printed clothing The paper size is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) A7 B7 423987 m V. Description of the invention (19) (Please read the precautions on the back and fill in this page first) The number of rotations is the same *, and there is a limit on the amount of air handled on the fan side. In the example shown in Fig. 4, the expansion turbines and fans provided with a plurality of arrays can effectively utilize the pressure energy of high-definition clean dry air for replenishment. Therefore, high-definition clean dry air for replenishment * may circulate a large amount (eg 2 times) of high-definition clean dry air for recycling. Press again, when the pressure of high-definition clean dry air for replenishment is high, multiple stages of expansion turbines can be used to expand them sequentially, and the fans are driven at each stage. Printing of clothing by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Figure 5 is a system diagram showing a different aspect of the circular supply mechanism 53. In the circulation supply mechanism 53, the shaft 71 and the fans 72 and 73 of the expansion turbine 51 (the high-definition clean dry air for replenishment are replenished with M) are expanded by the gear-type transmission mechanism 75. The clean and dry air) shaft 74 is connected. That is, the power generated by the expansion turbine 51 is transmitted to the fans 72 and 73 via the gear-type transmission mechanism 75. Therefore, for one expansion turbine 51, two fans 72 and 73 can be rotated at an optional number of revolutions. When using this gear-type speed change mechanism, the fans with the optimal shape and performance can be set according to the optimal amount of high-definition net dry air to be circulated and the pressure feeding pressure M, and they can be fed in large quantities under the best efficiency. High-purity clean dry air for circulation. In the embodiment shown in Fig. 5, the gear-type transmission 75 is used, and the toroidal structure K is adopted to form the closed portions 76, 77, and 7δ of the expansion turbine 51, the fans 72, and 73 to outside air. The closed portions 76, 77, and 78 are supplied with high-definition clean dry air that branches from the supply route 11 to the closed gas path media 55a, 55b, and 55c. It is also known that the winding path structure of the closed portion can adopt a conventional structure &gt; therefore, detailed illustrations and explanations thereof are omitted. 22 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 4 23 98: A7 _B7 V. Description of the invention (20) For example, high-definition clean dry air for replenishment 1 Press 0.45 from the supply route 11 The MPa supplier f expands to several hundred milliAq1 in the expansion turbine 51 and is derived on the route 57. The high-definition clean dry air for circulation is discharged from the air-consuming equipment 9 on the recovery route 13 and diverges from the routes 79 and 80. The fans 72 and 73 are respectively boosted to several 100 tnmAq and exported to routes 81 and 82. The high-definition clean dry air for replenishment of the above-mentioned route 57 merges, and is supplied to the gas-consuming equipment 9 through a route 83. Also, in the form examples of Figs. 3 to 5, since the high-definition clean dry air * used for the supply of closed gas is completely separated from other systems in the system, the possibility of pollution is almost completely eliminated. Furthermore, the high-definition clean dry air that is used as a closed gas to reduce the pressure is supplied to the gas-using equipment 9 together with the high-definition clean dry air for replenishment, and therefore can be effectively used. However, where the pressure of high-definition clean dry air for replenishment is low and not suitable for use as a closed gas *, other suitable gases may be used. In addition, in the example of the form in Figures 4 and 5 * Although the high-definition clean dry air for the replenished supply and the high-definition clean dry air for the recirculation after the pressure increase are combined (please read the note on the back? Matters before filling in this (Page) Prepare gas photos according to M Keyi, but printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Other equipment 9 Gas backup equipment is used for gas supply and line supply for road supply. The situation is to use the loop or build a clean and clear 9 Highly prepared equipment to use the supplementary photo to rely on, can be set when the appropriate pressure κ to give the pressure to the air and air dry The fan wind of the dry-distance clean-pipe pigging unit and the snail wheel vortex wax expansion are adopted. However, although the pressure is chosen among the examples, any of the states are in the form of 5 forces ~ the pressure of 3 is used to make the way on the empty line, the donor passes through the body to move it, and the pump air is sprayed out. Use a net to make clear r high for the force to build pressure K high can be compared to but supply '11 11 T3 This paper size applies Chinese National Standard (CNS) A4 specifications (210 X 297 mm) C7 987 _D7_ V. Creative Instructions (21) A high-definition clean dry air circulation after use from the recovery route 13. Fig. 6 is a system diagram showing a fourth embodiment of the method and device for manufacturing high-definition clean dry air according to the present invention. The manufacturing device of the high-definition clean dry air in this example has a pre-purifier 91 between the compressor 1 and the catalyst purifier 2 to remove moisture from the raw air. The raw air is compressed by the compressor 1 and guided to the heat exchanger 92 to exchange heat with the used high-definition clean dry air from the air-using equipment 9 for heat exchange. Therefore, the temperature is lowered and introduced into the pre-cooling equipment 93. For this purpose, the pre-cooling equipment 93 adopts the following types of equipment: that is, * the above-mentioned compressed raw material air is cooled to 5P ~ normal temperature by a water cooler * followed by a M-condensing water separator (not shown) M to remove condensed moisture . That is, the moisture contained in the raw material air is removed as much as possible, and the amount of water carried into the pre-purifier 91 is reduced, so that the operation efficiency of the pre-passivator 91 can be improved. The lower the cooling temperature of the water cooler, the more the drainage capacity is increased *, which reduces the load on the pre-purifier 91, but in the case where the pre-purifier 91 is an adsorber, it is within the above-mentioned temperature range when it is operated according to ordinary operation Just do it. For the pre-purifier 91, an adsorber or a membrane separator is generally used. It is a so-called drying mechanism that separates moisture in the air of the raw material and changes the dew point below -3010. Also, as the pre-purifier 91, it is also possible to use a K-type water-removing heat exchanger, a condensation separation type purifier, or a low-temperature separation type dryer based on a cold-dry heat exchanger. As for the membrane separator, a vinyl film, a fluorene polymer (such as Teflon, a fluorine-containing resin, etc.) film, a cellulose fluorene (such as cellulose acetate, etc.) film, a polypropylene film, a polyfluorene film, Polyimide film and so on. (CNS) A4 (210 χ 297)-ολ---------------- install -------- order-i -------- line &lt; Please read the precautions on the back before filling this page) Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives, India, Bepengong 423987 C7 _D7 V. Creation Instructions (22) In the ordinary pre-purification steps based on the pre-purifier 91, The plural (for example, 2 涸) adsorption cylinders 91a, 91b used for conversion. Ordinary adsorption simply uses silica gel, alumina gel, Ca-A zeolite, Na-A zeolite, Ca-X zeolite, or KA zeolite (trade name) in a vertical cylinder. : Mo 1 ecu 1 ar siveve 5 A, 4 A, 10X, or 3 A) alone or in combination. Where the aforementioned pre-passivation step is performed by the above-mentioned adsorption purification method, it is performed at a space velocity of KOOOh-1 W (M 9000 ~ 1100h-1 is preferred). If the space velocity is increased, the moisture may not be sufficiently removed in some cases. When two adsorption cylinders 91a, 9b are used, when the adsorption unit 91a is used in the adsorption step, the adsorption unit 91b is used in the regeneration step, and the regeneration step is performed according to the heating regeneration stage and the cooling stage. Prepare the regeneration gas used in the heating regeneration phase and the cooling phase of the regeneration step. Clean up the body gas. The high-air gas is used to discharge the air. The thread is used to make the system gas. It is based on f. After the water has passed, use air to air, liquid to air, for example, including 0 line. Set the path t to collect and separate. --Order ---------- line (谙 Read the precautions on the back before filling out this page) When printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Qi Gao can be used for body heat 0 ^ body month ifl CM. Qi SF uses a segment to make the stubborn and then change the machine to 0. The pressure is borrowed and applied to the body. The temperature and temperature of the original air pressure of the air-air material are increased by the heat of the heat. The original pressure of the air-air material is compressed. The original air-air material of the recovered M is compressed at the right and left ° c ο 0 5 At normal temperature, the temperature rises and the temperature is borrowed, and then it is measured again, and when the temperature is reached, it is regenerated, and the source of heat is the temperature of the temperature or the temperature of the 95th item. The 〇 is attached with a tube, and the M of the admission guide is sufficient to measure the thermal temperature. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -25-A7 423387 _B7_ V. Description of the invention (23) The amount of generated gas is different, so when using the exhaust gas from other processes, the regeneration temperature should be determined under the balance of the lotus transfer conditions of the process. The dry air obtained by performing the pre-purification step by the pre-purifier 91 passes a route 96, and a part of the dry air is diverted to a route 97 and is supplied to dry-air use equipment 98 such as a semiconductor manufacturing plant or a fatigue crystal manufacturing plant. Furthermore, the residual 'dry air is introduced into the catalyst passivator 2 through a route 99, and is then guided to the adsorption purifier 3 to become high-purity dry air. This high-purity dry air is supplied to high-definition clean dry air use equipment (air-using equipment) 9 such as a semiconductor manufacturing plant, a high-density recording medium manufacturing plant, a liquid crystal manufacturing plant, or a solar cell panel manufacturing plant through a supply medium 11. In this embodiment, since the moisture in the raw material air is removed in the pre-purification step, the amount of catalyst or adsorbent used can be reduced. For example, the catalyst filling amount per unit air volume is 0.033 liters or more *, particularly preferably 0.4M. Furthermore, the space velocity in the catalyst purification step is from 30,000 h to 1 M, especially M from 2000 to 30,000 h_1 is preferred. If this space velocity becomes high *, a sufficient response may not be performed. The filling amount of the above-mentioned adsorbent per unit of air is preferably 0.14 liter M, particularly preferably 0.2 liter M. Furthermore, the space velocity in the catalyst purification step is below 7000h-1M, especially M4000 ~ 6000h-1 is preferred. According to this carving example, high-definition clean dry air or general-purpose dry air can be supplied stably and economically. Embodiment 1 According to the structure of the device according to the first form example shown in FIG. 1, a paper size is made to apply the Chinese National Standard (CNS) A4 specification (210 X 297 male 1) ------- +- ------ Equipment -------- ^ Order -----------Line (Please read the precautions on the back before filling out this page) Employees ’Cooperatives, Intellectual Property Bureau, Ministry of Economic Affairs Printed A7 Z3 987 "___B7 V. Description of the invention (24) A high-definition clean dry air manufacturing device capable of manufacturing high-definition clean dry air 4000Nm3 / h. Its operating conditions are as follows: Air compressor capacity δΟΟΝΝπι3 / h outlet pressure 0.75HPa Catalyst purifier temperature 150T: Catalyst Dong 2000 liters space velocity 2500h-1 Adsorption purifier inlet Π temperature 10¾ conversion time 8 hours regeneration temperature 12〇r alumina gel volume 500 liters * Az speed between 1 0000h-空间 The maximum space velocity of synthetic zeolite is 1 000 liters. 5000h- 1 regeneration gas purification gas product regeneration gas volume lOOONm3 / h HD net Dry air product volume 4000Hms / h pressure 0.7MPa Under the above conditions, the impure substance in the high-definition clean dry air product at 4000Nm2 / h connected to the high-definition clean dry air product was continuously measured every 15 minutes for 7000 minutes. The average value is as follows: Impurity [ppb] Moisture 2.6 Carbon dioxide 2.9 The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ------ J ----- packed ---- ---- 1 Order -------- line (谙 Please read the notes on the back of the next page to fill in this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 27 A7 B7 V. Description of the invention (25) Carbon monoxide 5.1 Hydrogen 1.3 In this way, the results of operating the manufacturing equipment under the above-mentioned operating conditions confirm the following facts: the high-definition clean dry air products have been removed from moisture, carbon dioxide, monogasified carbon, and hydrogen to a level of 10 ppbM, which is purified to a type It is likely to be used as a gas for the purpose of protecting the crystal grate. Example 2 For a device constructed in accordance with the second embodiment shown in FIG. 2 and a conventional high-definition clean dry air manufacturing device, press 400 0 Nm3 / h Comparison of power costs when producing low-pressure high-definition clean dry air. The operating parameters and power consumption ratios of both parties are shown in Table 1. Table 1 (Please read the precautions on the back first, write this page) The operating parameters printed by the Employees ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, this type of example, the conventional device, and the raw material air child 5500Nm3 / h 5500Nm3 / h air compressor outlet pressure 0.25 HPa 0. 46HPa 丨 ^ 7 Force recovery device outlet pressure 0.46MPa — Adsorption purifier inlet pressure 0.44HPa 0.44HPa Adsorption, purifier outlet pressure 0.43MPa 0.43HPa Wax turbine inlet pressure 0.42HPa — HD net clean air supply pressure 0. lHPa 0.43 MPa High-definition clean air temperature 25 lor &gt; Clean air supply 4000Hm3 / h 4000Ndi3 / h Power consumption ratio 0, 73 1. 00 Example 3 28 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ） Α7 α 2 3 9d 7 _Β7_ 5. Description of the invention (26) Regarding the circulation supply mechanism 53 shown in FIG. 4, the expansion turbine 51 is supplied with 1 SOONm 3 / h and 0.45 MPa of high-definition clean dry air M for expansion. The measurement of the circulating air volume of route 69 when the high-definition clean dry air to be recirculated was increased from a pressure of 120 mmAq to 160 mmAq to 160 mm Aq. As a result, the circulating air volume obtained was 5300Nm3 / h. That is, when the high-definition clean dry air for replenishment is subtracted, the high-purity dry air discharged from the air-conditioning equipment 9 can be recovered at 3500 N · 3 / h and reused. In addition, the water concentration at the inlet and outlet of the circulating supply mechanism 53 at this time is 3 ppb, which confirms that the processing performed by the circulating supply mechanism 53 has not caused contamination of the high-definition clean dry air. According to this example, it is possible to process about 2 times the amount of high-definition clean dry air used for replenishment, and the recycling utilization rate becomes about 6 6 S :. Embodiment 4 Regarding the circulation supply mechanism 53 shown in the form example of FIG. 5, * 800 ND13 / h, 0.45 MPa supply of high-definition clean dry air is supplied to the expansion turbine 51 to expand it to IGOmmAq, and high-definition cleaning is used for circulation. The measurement of the circulating air volume of route 83 when the dry air pressure was increased from 120roniAq to 160nnnAq was performed. As a result, the circulation air volume obtained is 148000NΠ13 / h. That is, when the high-definition clean dry air for the supply is subtracted, the high-definition clean dry air discharged from the air-conditioning equipment 9 can be recovered by 146,200 NRI3 / h and reused. Furthermore, at this time, the moisture content at the inlet and outlet of the circulation supply mechanism 53 is 3 ppb, that is, it is confirmed that the processing performed by the circulation supply mechanism 53 has not caused contamination of the high-definition clean dry air. According to this example *, it is possible to handle the high-definition ^ paper size for replenishment. The national standard (CNS) A4 specification (210 X 297 mm) is applicable. --------- 1 '------- f Order ------ {Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs -29-4 23 987 'a? __B7 V. Description of Invention (27) Air-drying and drying ΕΓ The amount of circulation used for high-elevation ο ^, a ^ θ ο 9 8 9 The approximate amount is the net profit of dry air drying with air-to-air ratio drying ------------- -Install -------- Order ------- line (please read the precautions on the back before filling this page) Printed on the paper by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs CNS) A4 size (210 X 297 mm) J0

Claims (1)

2 3 9 8 7 1 as C8 D8 六、申請專利範圍 1. 一種製造高清淨乾燥空氣之方法》其為包含：施行原 料空氣之壓縮之壓縮步驟；使該原料空氣中之氫氣及一氧 化碳與氧氣起反應之觸媒純化步驟；以及除去該原料空氣 中之水分、二氧化碳等不純物之吸附純化步驟，以製造高 清淨乾煉空氣之方法*上述觸媒純化步驟之空間速度為 3ΟΟΟΐΓ 1以下，上述吸附純化步驟在利用一沿著原料空氣 之流動方向使乾燥劑床及氣體不純物去除劑床通過之手段 之下被進行，該乾燥劑床之空間速度為llOOOh - 1 Κ下* 而氣體不純物去除劑床之空間速度為6000h_ 1 Μ下者。 2. 如申請專利範圍第1項之製造高清淨乾燥空氣之方法 ，其中在轉換使用至少二個吸附器之下施行該吸附鈍化步 驟，該項轉換之時間為4至1 2小時，再生溫度為1 0 0°C Μ上 ，再生氣體比率為40 S；K下者。 經濟部中央標準局員工消費合作社印策 (請先閲讀背面之注意事項再填寫本頁) 3. 如申請專利範圍第1項之製造高清淨乾燥空氣之方法 *其中經過該吸附純化步驟處理後之高清淨乾燥空氣以產 品被供給於用氣設備，被該用氣設備使用後之高清淨乾燥 空氣經過回收而被提高壓力後•被混入該壓縮步驟之前段 或後段之空氣流者。 4. 如申請專利範圍第1項之製造高清淨乾燥空氣之方法 ，其中經過該吸附純化步驟處理後之高清淨乾燥空氣以產 品被供給於用氣設備，被該用氣設備使用後之高清淨乾燥 空氣經過回收而被提高壓力後，被混入該吸附純化步驟之 前段或後段之空氣流者。 5. 如申謓專利範圍第1項之製造高清淨乾燥空氣之方法 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -1 - 經濟部中央標準局員工消費合作社印製 六、申請專利範圍 1 1 t 其 中 使 經 過 該 吸 附 純 化 步 驟處理後之 高清淨乾燥空氣至 1 1 少 一 部 分 膨 脹 9 Μ 利 用 該 項 之膨脹之能 量使該壓縮步驟後 1 1 之 原 料 空 氣 進 _. 步 升 壓 者 0 請 I ] 先 1 6 . 如 甲 請專利範圍第1項之製造高清淨乾燥空氣之方法 閲 1 背 1 其 中 經 過 該 吸 附 純 化 步 驟 處理後之Ρ 清淨乾燥空氣Μ產 面 之 1 ▼ 注 ί 品 被 供 給 於 用 氣 設 備 S 經 過 該用氣設備 使用後被回收，而 意 華 1 項 利 用 新 近 供 給 於 該 用 氣 設 備 之高清淨乾 燔空氣之壓力再次 再 本. I 被 供 給 於 該 用 氣 設 備 者 〇 i 本 頁 裝 1 7 . 如 申 請專利範圍第6項之製造高清淨乾煉空氣之方法 1 I 9 其 中 該 項 新 近 供 給 之 高 清 淨乾燥空氣 藉風扇驅動用之膨 I 脹 渦 輪 TiTW m 之 作 用 膨 脹 而 該 項使用後被 回收之高清淨乾燥 1 f 訂 空 氣 藉 膨 脹 渦 輪 擁 所 ΙΠ5 η 動 之 風扇之作用 被壓縮者。 8 . 如 申 請專利範圍第7項之製造高清淨乾燥空氣之方法 1 1 ， 其 中 該 項 新 近 供 姶 之 高 清 淨乾燥空氣 有一部分Μ封閉氣 1 | 體 被 供 給 於 該 膨 脹 渦 輪 機 及 風扇之對外 氣封閉之部分者。 線 9 . 如 甲 請 專 利 範 圍 第 1項之製造高清淨乾燥空氣之方法 1 I 9 其 中 在 該 壓 縮 步 驟 與 該 觸 媒纯化步驟 之間施行預純化步 1 1 驟 Μ 除 去 該 原 料 空 氣 中 之 水 分，而將經 過該預純化步驟處 1 理 後 之 空 氣 流 之 一 部 分 隨 時 採取以作為 乾煉空氣產品者。 1 I 10 .如申請專利範圍第9項之製造高清淨乾燥空氣之方法 Γ I 其 中 該 預 純 化 步 m 胁 為 藉 吸 附作用除去 水分之步驟，其空 1 1 間 速 度 為 12000h - 1 以 下 者 〇 1 1 11 f - -種製造高清淨乾対 昏空氣之裝置， 其為包含下述各 1 1 構 件 即 被 用 壓 縮 原料空氣之辱罐.機* 被用Μ使該原料空 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） _ 2 - 經濟部智慧財產局員工消費合作社印製 A8 423 98 7 ; ξι 六、申請專利範圍 氣中之氫氣及一氧化碳與氧氣起反應之觸媒純化器，以及 被用κ除去該原料空氣所含之水分、二氧化碳等不純物之 吸附纯化器之製造高清淨乾燥空氣之裝置，在上逑觸媒純 化器中填充有以 Pd、 Pt、 Au、 Rh、 Ru、 Fe、 Cr、 Ni、 Co、 Mn、Cu、Sn、Zn等金屬單獨或複數種之組合為主成分之金 屬枭觸媒或Μ此等金靨中之組合所製成之合金為主成分之 金屬系觸媒，而在上述吸附純化器從其入口部起依次積層 有：乾燥劑床，其中填充有含活.性氧化鋁及/或二氧化矽 凝膠之乾燥劑；Μ及氣體不純物去除劑層，其中填充有合 成沸石者。 ’ 12. 如申請專利範圍第11項之製造高清淨乾燥空氣之裝 置，其中每單位空氣量之該金屬系觸媒之填充量為0.33升 Κ上，每單位空氣量之該乾燥劑之填充量為0.09升以上， 而每單位空氣量之該合成沸石之填充量為0.1 4升以上者。 13. 如申請專利範圍第11項之製造高清淨乾燥空氣之裝 置，其中設有熱交換器，藉Μ使一從該觸媒純化器導出之 原料空氣與一從該吸附純化器導出之高清淨乾燥空氣之至 少一部分進行熱交換者。 14. 如申請專利範圍第11項之製造高清淨乾燥空氣之裝 置，其中具備有：升壓機驅動用之膨脹渦輪機，藉Μ使一 從該吸附純化器導出之高清淨乾燥空氣之至少一部分膨脹 ;Μ及與該膨脹渦輪機同軸設置之升壓機*藉以使該壓縮 機所壓縮之原料空氣進一步升壓者。 15. 如申請專利範圍第14項之製造高清淨乾燥空氣之裝 本紙張尺度速用中國國家標準（CNS) Α4規格（210Χ297公鼇) -3 - ^ , I裝------Γ-訂-------線 (請先閲讀背面之注意事項再填寫本頁) 3 9 8 A8 B8 CS D8 申請專利範圍 之氣 出空 導料 機原 輪之 渦出 脹導 膨器 該化 從純 一 媒 使觸 Μ 該 藉從 , 一 器與 換氣 交空 熱燥。 有乾者 設淨換 中 清交 其高熱 r 壓行 置低進 裝 之 氣 空 燥 淨 清 高 造 製 之 項 4 11 第 圍 範 利 專 請 甲 如 有 設 間 之 線 路 出 導 與 線 路 人 導。 之者 機路 輪管 渦通 脹旁 膨 之 該閥 在通 中旁 其備 ’ 具 置一 裝 之 氣 空 燥 乾 淨 清 高 造 製 之 項 11 1X 第 圍 範 利 專 請 申 如 從產 一 壓 使低 以作 藉充 ’ 被 機而 輪 隈 渦膨 脹氣 膨 空 之燥 用乾 動淨 驅清 扇高 風 之 : 出 有導 備器 具化 中純 其附 , 吸 置該 扇氣 風空 之燥 置乾 設淨 軸清 司 高 機之 輪收 渦回 脹被 膨後 該用 與使 及備 % 設 ; 氣 備用 設該 氣過 用經 於將 給 Μ 供藉 品 * 者 備 設 氣 用 該 於 給 供 次 再Κ 嫌 壓 Μ 予 裝 之 氣 空 燥 乾 淨 清 高 造 製 之 項 11 第 圍 範 利 專 請 0 如 器 化 純 預 有 備 具 間 之 〇 器者 化分 純水 媒之 觸中 該氣 與 空 機料 縮原 壓該 該去 在除 中Μ 其用 , 被 置| 裝 之 氣 空 燥 乾 淨 清 高 造 製 0a 之 項 8 HI- 第 圍 範 利 專 請 申 如 者 器 離 分 膜 為 器 化 純 預 該 中 其 置 n^i 1 - I I —^ρί I m K^l - l^i n (請先閲讀背面之注意事項再填寫本頁) 線 經濟部智慧財產局員工消費合作社印製 第 圍 範 利 專 請 申 如 少 至 充 填 器 化 純 預及 該膠 在凝 中矽 其化 ， 氧 置二 者 石 沸 或 裝或 之/ 氣 空 燥 乾 淨 清 高 造 製 之 項 及 膠 凝 鋁 化 氧 有 latHi 種 本紙張尺度適用中國國家樣準（CNS ) A4現格（210X297公釐） 42 3 9 8 7 1 as C8 D8 6. Scope of patent application 1. A method for manufacturing high-definition clean dry air, which includes: a compression step of compressing raw material air; causing hydrogen, carbon monoxide and oxygen in the raw material air to start Catalyst purification step of reaction; and adsorption purification step of removing impurities such as moisture and carbon dioxide in the raw material air to produce high-definition clean dry air * The space velocity of the above catalyst purification step is below 3OOOΐΓ, the above adsorption purification The steps are carried out by means of passing a desiccant bed and a gas impurity removing agent bed along the flow direction of the raw material air, and the space velocity of the desiccant bed is 10000h-1 K *. The space velocity is lower than 6000h_ 1M. 2. For example, the method for manufacturing high-definition clean dry air in the scope of patent application, wherein the adsorption passivation step is performed under the conversion using at least two adsorbers, the conversion time is 4 to 12 hours, and the regeneration temperature is At 100 ° C Μ, the regeneration gas ratio is 40 S; K is lower. Printed by the Consumer Standards Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page) 3. If you apply for the method of manufacturing high-definition clean dry air in item 1 of the scope of patent application * The high-definition clean dry air is supplied to the air-consuming equipment as a product. After the high-definition clean-dry air is used by the air-conditioning equipment, the pressure is increased after being recovered and mixed into the air flow before or after the compression step. 4. The method for manufacturing high-definition clean dry air, such as the item 1 in the scope of patent application, wherein the high-definition clean dry air treated by the adsorption and purification step is supplied to the gas-using equipment as a product, and the high-definition clean air after being used by the gas-consuming equipment is used. After the dry air is recovered to increase the pressure, it is mixed into the air flow before or after the adsorption and purification step. 5. The method of manufacturing high-definition clean dry air as described in item 1 of the scope of patent application of this paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -1-Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs The scope of the patent application is 1 1 t. The high-definition clean dry air treated by the adsorption and purification step is reduced to 1 1 and a small portion is expanded by 9 M. The expansion energy of the item is used to make the raw air after 1 1 into the compression step. Press 0 Please I] First 16. As described in A, please refer to item 1 of the patent scope for the method of manufacturing high-definition clean dry air. Please refer to 1. Back 1 Among them, the cleaned dry air M produced by the adsorption and purification step 1 ▼ Note ί The product was supplied to the gas-consuming equipment S and was recovered after the gas-consuming equipment was used, and Yihua 1 was reprinted using the high-pressure clean dry air pressure recently supplied to the gas-consuming equipment. I was supplied to the气 设备 者 〇i The gas equipment Page mounting 1 7. If the method for manufacturing high-definition clean dry air 1 I 9 in the scope of the patent application 1 I 9 wherein the newly supplied high-definition clean dry air is expanded by the expansion of a fan-driven expansion turbine TiTW m The high-definition net-drying 1 f order air that was recovered after use was compressed by an expansion turbine to support the fan. 8. As for the method 1 1 of manufacturing high-definition clean dry air in the scope of application for patent item 7, wherein the newly supplied high-definition clean dry air has a part of M closed air 1 | the body is supplied to the external air of the expansion turbine and fan Closed part. Line 9. The method of manufacturing high-definition clean dry air as described in item 1 of the patent scope 1 I 9 wherein a pre-purification step 1 1 is performed between the compression step and the catalyst purification step 1 to remove the moisture in the raw air As a dry air product, a part of the air flow after the pre-purification step 1 is taken at any time. 1 I 10. The method for manufacturing high-definition clean dry air according to item 9 of the scope of patent application Γ I, wherein the pre-purification step m is a step of removing water by adsorption, and the speed of the space 1 1 is 12000h-1 or less. 1 1 11 f-A device for manufacturing high-definition clean dry air, which is a tank containing compressed air, which is the following 1 1 component. Machine * is used to make the material empty 1 1 paper size Applicable to China National Standard (CNS) A4 specification (210X297mm) _ 2-Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A8 423 98 7; ξι 6. The scope of patent application for hydrogen and carbon monoxide to react with oxygen A medium purifier and a device for producing high-definition clean dry air by an adsorption purifier that removes moisture, carbon dioxide, and other impurities contained in the raw material air with κ. The catalyst purifier on the upper side is filled with Pd, Pt, Au, Metals such as Rh, Ru, Fe, Cr, Ni, Co, Mn, Cu, Sn, Zn, or a combination of metals, as the main component, metal catalysts or combinations of these metals The produced alloy is a metal-based catalyst with the main component, and the adsorption purifier is laminated in this order from the entrance: a desiccant bed filled with active alumina and / or silica gel. Desiccant; M and gas impurity remover layer, filled with synthetic zeolite. '12. As for the device for manufacturing high-definition clean dry air in item 11 of the scope of patent application, wherein the filling amount of the metal-based catalyst per unit of air is 0.33 liters, and the filling amount of the desiccant per unit of air is It is 0.09 liter or more, and the filling amount of the synthetic zeolite per unit of air amount is 0.1 4 liter or more. 13. For example, the device for manufacturing high-definition clean dry air in the scope of the patent application No. 11 is provided with a heat exchanger, by which a raw air derived from the catalyst purifier and a high-definition clean air derived from the adsorption purifier At least a part of the dry air is subjected to a heat exchanger. 14. The device for manufacturing high-definition clean dry air, such as item 11 of the scope of patent application, which includes: an expansion turbine for booster drive, which expands at least a portion of the high-definition clean dry air derived from the adsorption purifier. ; M and a booster provided coaxially with the expansion turbine * to further boost the raw air compressed by the compressor. 15. If the scope of the application for the scope of patent application for the manufacture of high-definition clean dry air, the paper size and speed of China National Standard (CNS) A4 specifications (210 × 297 Gongao) -3-^, I installed ------ Γ- Order ------- line (please read the precautions on the back before filling this page) 3 9 8 A8 B8 CS D8 Patent Application Air Vapor Guider Vortex Expansion Guider From the pure medium, the touch should be borrowed, and the device and air exchange are hot and dry. Some people have set up cleanliness, cleaned their high heat r, set the air into the air, cleaned the air, and made high-quality items. 4 11 Fan Li specially asked A if there is a line guide and line guide. The valve of the machine tube is bulged next to the vortex inflation. The valve is in the middle of the pipeline. It is equipped with a package of air, air, clean, clean, and high-quality items. 11 1X For the purpose of borrowing, the machine is used to drive the fan and vortex to expand the air and dry the air. Use a dry net to drive the fan to clean the high wind: a guide device is used to purify the air, and the air is dried. It is assumed that the wheel of the net shaft Qingsi high machine should be used after the vortex is retracted and expanded, and the equipment should be used; the gas backup equipment should be used for the loan to M *. Then K is too pressured. The air is clean, clean, and high-quality. The 11th item is Fan Li, please. 0 If the device is pure, there is a device in the spare room. The device is divided into pure water. The original material should be used in addition to the medium, and it should be used | the air is clean and clean, and the high-quality production of item 0a is made. 8 HI It should be set n ^ i 1-II — ^ ρί I m K ^ l-l ^ in (Please read the notes on the back before filling in this page) Printed by Fan Li from the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Online Economics, please apply as little as possible for the filler The gel is silicified in the setting, the oxygen is boiled or packed or the air is dry and clean, and the item is made of latHi. The paper size is latHi. The paper size is applicable to China National Standard (CNS) A4. Grid (210X297 mm) 4
TW088111435A 1998-07-07 1999-07-06 A manufacture method and device of highly pure dry air TW423987B (en)

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JP10192086A JP2000024464A (en) 1998-07-07 1998-07-07 Device and method for producing highly cleaned dry air
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TWI638120B (en) * 2013-04-17 2018-10-11 三菱電機股份有限公司 Air conditioner
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KR100367165B1 (en) 2003-01-09
KR20020070523A (en) 2002-09-09
EP1027913A1 (en) 2000-08-16

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