IT1086953B - Dispositivo di aggiustaggio di maschere di esposizione rispetto ad un disco di substrato - Google Patents

Dispositivo di aggiustaggio di maschere di esposizione rispetto ad un disco di substrato

Info

Publication number
IT1086953B
IT1086953B IT27767/77A IT2776777A IT1086953B IT 1086953 B IT1086953 B IT 1086953B IT 27767/77 A IT27767/77 A IT 27767/77A IT 2776777 A IT2776777 A IT 2776777A IT 1086953 B IT1086953 B IT 1086953B
Authority
IT
Italy
Prior art keywords
adjustment device
exposure mask
device compared
substrate disc
mask adjustment
Prior art date
Application number
IT27767/77A
Other languages
English (en)
Italian (it)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of IT1086953B publication Critical patent/IT1086953B/it

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Projection-Type Copiers In General (AREA)
IT27767/77A 1976-09-22 1977-09-21 Dispositivo di aggiustaggio di maschere di esposizione rispetto ad un disco di substrato IT1086953B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762642634 DE2642634A1 (de) 1976-09-22 1976-09-22 Verfahren zum justieren von belichtungsmasken relativ zu einer substratscheibe

Publications (1)

Publication Number Publication Date
IT1086953B true IT1086953B (it) 1985-05-31

Family

ID=5988556

Family Applications (1)

Application Number Title Priority Date Filing Date
IT27767/77A IT1086953B (it) 1976-09-22 1977-09-21 Dispositivo di aggiustaggio di maschere di esposizione rispetto ad un disco di substrato

Country Status (8)

Country Link
US (1) US4118230A (enExample)
JP (1) JPS5341984A (enExample)
BE (1) BE858958A (enExample)
DE (1) DE2642634A1 (enExample)
FR (1) FR2365824A1 (enExample)
GB (1) GB1551631A (enExample)
IT (1) IT1086953B (enExample)
NL (1) NL7710358A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2066487B (en) * 1979-12-18 1983-11-23 Philips Electronic Associated Alignment of exposure masks
JPS5764921A (en) * 1980-10-08 1982-04-20 Toshiba Corp Manufacture of gaas integrated circuit
US4343878A (en) * 1981-01-02 1982-08-10 Amdahl Corporation System for providing photomask alignment keys in semiconductor integrated circuit processing
US4883359A (en) * 1984-02-28 1989-11-28 Canon Kabushiki Kaisha Alignment method and pattern forming method using the same
DE3910048A1 (de) * 1989-03-28 1990-08-30 Heidelberg Instr Gmbh Laser Un Verfahren zur herstellung oder inspektion von mikrostrukturen auf grossflaechigen substraten
JP3163666B2 (ja) * 1991-07-29 2001-05-08 ソニー株式会社 位相シフトマスクを用いたパターン形成方法
US5316984A (en) * 1993-03-25 1994-05-31 Vlsi Technology, Inc. Bright field wafer target
US6576529B1 (en) * 1999-12-07 2003-06-10 Agere Systems Inc. Method of forming an alignment feature in or on a multilayered semiconductor structure

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3477848A (en) * 1964-12-14 1969-11-11 Texas Instruments Inc Method for producing sets of photomask having accurate registration
US3607267A (en) * 1967-10-09 1971-09-21 Motorola Inc Precision alignment of photographic masks
US3506442A (en) * 1968-09-27 1970-04-14 Bell Telephone Labor Inc Photomask modification and registration test methods
US3690881A (en) * 1970-09-28 1972-09-12 Bell Telephone Labor Inc Moire pattern aligning of photolithographic mask
US3963489A (en) * 1975-04-30 1976-06-15 Western Electric Company, Inc. Method of precisely aligning pattern-defining masks
US4060643A (en) * 1976-02-02 1977-11-29 Blanks William L Method and apparatus for identifying color separation film

Also Published As

Publication number Publication date
JPS5341984A (en) 1978-04-15
BE858958A (fr) 1978-01-16
US4118230A (en) 1978-10-03
GB1551631A (en) 1979-08-30
NL7710358A (nl) 1978-03-28
FR2365824B1 (enExample) 1981-05-08
FR2365824A1 (fr) 1978-04-21
DE2642634A1 (de) 1978-03-23

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