IT1074075B - Sistema per il trasporto in modo controllato di pezzi quali wafer semiconduttori - Google Patents

Sistema per il trasporto in modo controllato di pezzi quali wafer semiconduttori

Info

Publication number
IT1074075B
IT1074075B IT26821/76A IT2682176A IT1074075B IT 1074075 B IT1074075 B IT 1074075B IT 26821/76 A IT26821/76 A IT 26821/76A IT 2682176 A IT2682176 A IT 2682176A IT 1074075 B IT1074075 B IT 1074075B
Authority
IT
Italy
Prior art keywords
pieces
semiconductor wafers
controlled transport
transport
controlled
Prior art date
Application number
IT26821/76A
Other languages
English (en)
Italian (it)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT1074075B publication Critical patent/IT1074075B/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H10P72/36—

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Branching, Merging, And Special Transfer Between Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
IT26821/76A 1975-10-01 1976-09-03 Sistema per il trasporto in modo controllato di pezzi quali wafer semiconduttori IT1074075B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US61865575A 1975-10-01 1975-10-01

Publications (1)

Publication Number Publication Date
IT1074075B true IT1074075B (it) 1985-04-17

Family

ID=24478589

Family Applications (1)

Application Number Title Priority Date Filing Date
IT26821/76A IT1074075B (it) 1975-10-01 1976-09-03 Sistema per il trasporto in modo controllato di pezzi quali wafer semiconduttori

Country Status (7)

Country Link
JP (1) JPS5244992A (Direct)
BR (1) BR7606591A (Direct)
CA (1) CA1048958A (Direct)
DE (1) DE2643277A1 (Direct)
FR (1) FR2345372A1 (Direct)
GB (1) GB1555672A (Direct)
IT (1) IT1074075B (Direct)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4186918A (en) * 1977-12-12 1980-02-05 International Business Machines Corporation Method and apparatus for locating and aligning flimsy sheets
JP2014010862A (ja) * 2012-06-29 2014-01-20 Fujitsu Ltd ライブラリ装置

Also Published As

Publication number Publication date
FR2345372A1 (fr) 1977-10-21
BR7606591A (pt) 1977-07-05
DE2643277A1 (de) 1977-04-14
GB1555672A (en) 1979-11-14
FR2345372B1 (Direct) 1980-10-24
CA1048958A (en) 1979-02-20
JPS5244992A (en) 1977-04-08
JPS5430834B2 (Direct) 1979-10-03

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