CA1027465A - Processing of semiconductor wafers - Google Patents
Processing of semiconductor wafersInfo
- Publication number
- CA1027465A CA1027465A CA216,323A CA216323A CA1027465A CA 1027465 A CA1027465 A CA 1027465A CA 216323 A CA216323 A CA 216323A CA 1027465 A CA1027465 A CA 1027465A
- Authority
- CA
- Canada
- Prior art keywords
- processing
- semiconductor wafers
- wafers
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US42638773A | 1973-12-19 | 1973-12-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1027465A true CA1027465A (en) | 1978-03-07 |
Family
ID=23690593
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA216,323A Expired CA1027465A (en) | 1973-12-19 | 1974-12-18 | Processing of semiconductor wafers |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS5093775A (en) |
BE (1) | BE823525A (en) |
CA (1) | CA1027465A (en) |
DE (1) | DE2459892A1 (en) |
GB (1) | GB1483746A (en) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2326479A1 (en) * | 1975-10-03 | 1977-04-29 | Radiotechnique Compelec | PROCESS FOR PICKLING SEMICONDUCTOR PLATES, ESPECIALLY FOR SOLAR CELLS AND APPARATUS FOR IMPLEMENTING THE PROCESS |
JPS5721321Y2 (en) * | 1975-12-26 | 1982-05-08 | ||
JPS5288967U (en) * | 1975-12-26 | 1977-07-02 | ||
JPS5619933Y2 (en) * | 1978-01-10 | 1981-05-12 | ||
JPS5617021A (en) * | 1979-07-20 | 1981-02-18 | Fujitsu Ltd | Surface treatment of substrate |
JPS5729140U (en) * | 1980-07-24 | 1982-02-16 | ||
JPS6327784Y2 (en) * | 1980-09-19 | 1988-07-27 | ||
US4482425A (en) * | 1983-06-27 | 1984-11-13 | Psi Star, Inc. | Liquid etching reactor and method |
US5278104A (en) * | 1989-07-25 | 1994-01-11 | Kabushiki Kaisha Toshiba | Semiconductor wafer carrier having a dust cover |
JPH0770505B2 (en) * | 1989-07-25 | 1995-07-31 | 株式会社東芝 | Semiconductor device support carrier |
US5054519A (en) * | 1990-12-26 | 1991-10-08 | Imtec Products, Inc. | Recirculating chemical bath with inflow and self balancing outflow |
KR100232998B1 (en) * | 1996-06-05 | 1999-12-01 | 윤종용 | Chemical bath unit with controlling means for etch rate |
JP5478604B2 (en) * | 2008-03-31 | 2014-04-23 | エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド | Method for etching an edge of a silicon wafer |
KR20110099108A (en) * | 2008-11-19 | 2011-09-06 | 엠이엠씨 일렉트로닉 머티리얼즈, 인크. | Method and system for stripping the edge of a semiconductor wafer |
CN113793819A (en) * | 2021-09-16 | 2021-12-14 | 长江存储科技有限责任公司 | Chemical tank and temperature control method thereof |
CN115241330B (en) * | 2022-09-19 | 2022-12-27 | 英利能源发展(天津)有限公司 | Semiconductor silicon wafer device for etching solar cell by hydrofluoric acid |
-
1974
- 1974-12-18 BE BE151653A patent/BE823525A/en unknown
- 1974-12-18 DE DE19742459892 patent/DE2459892A1/en not_active Withdrawn
- 1974-12-18 JP JP14552574A patent/JPS5093775A/ja active Pending
- 1974-12-18 CA CA216,323A patent/CA1027465A/en not_active Expired
- 1974-12-18 GB GB5470774A patent/GB1483746A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
BE823525A (en) | 1975-06-18 |
GB1483746A (en) | 1977-08-24 |
JPS5093775A (en) | 1975-07-26 |
DE2459892A1 (en) | 1975-09-04 |
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