CA1048958A - Fluidic transport intersection - Google Patents
Fluidic transport intersectionInfo
- Publication number
- CA1048958A CA1048958A CA76262578A CA262578A CA1048958A CA 1048958 A CA1048958 A CA 1048958A CA 76262578 A CA76262578 A CA 76262578A CA 262578 A CA262578 A CA 262578A CA 1048958 A CA1048958 A CA 1048958A
- Authority
- CA
- Canada
- Prior art keywords
- fluidic
- vacuum
- section
- wafer
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
Abstract
FLUIDIC TRANSPORT INTERSECTION
ABSTRACT
The invention taught is an apparatus and method for providing automatic or semiautomatic interconnections and intersections in a fluidic transportation system. In particular the teaching relates to the transportation of semiconductor wafers or slices between proces-sing stations on a dual highway type system utilizing a fluidic cushion means whereby said wafers can be processed in a random manner and transported under a controlled environment dissimilar to the pro-cessing environment. However, the track and system may be constructed into a multiplicity of configurations and is not limited to a dual or single track system.
ABSTRACT
The invention taught is an apparatus and method for providing automatic or semiautomatic interconnections and intersections in a fluidic transportation system. In particular the teaching relates to the transportation of semiconductor wafers or slices between proces-sing stations on a dual highway type system utilizing a fluidic cushion means whereby said wafers can be processed in a random manner and transported under a controlled environment dissimilar to the pro-cessing environment. However, the track and system may be constructed into a multiplicity of configurations and is not limited to a dual or single track system.
Description
~ACKGROUND OF THE INVENTION
1. Field of the Invention This invention pertains to a semiconductor wafer minimum volume fluidic cushion transport system intersection and traffic control means wherein modular units are assembled to form a system taught in Canadian Patent Application No. 262,458 filed October 1, 1976 by this assignee entitled "Transport System For Semiconductor Wafer Multiprocessing Station System" whereby semiconductor substrates are transported in any desirable configuration to and from processing stations under a con-trolled environment dissimilar to the various processing environments.
Said environment including atmosphere temperature, wave lengths, light and electronics. In a more specific sense the invention relates to management of directional traffic flow by providing a means for inter-sectional direction .~ ~
., 1~4~39S8 1 means and control as well as providing a means for interconnecting with other systems or adjacent buffer or holding stations as the case may be.
1. Field of the Invention This invention pertains to a semiconductor wafer minimum volume fluidic cushion transport system intersection and traffic control means wherein modular units are assembled to form a system taught in Canadian Patent Application No. 262,458 filed October 1, 1976 by this assignee entitled "Transport System For Semiconductor Wafer Multiprocessing Station System" whereby semiconductor substrates are transported in any desirable configuration to and from processing stations under a con-trolled environment dissimilar to the various processing environments.
Said environment including atmosphere temperature, wave lengths, light and electronics. In a more specific sense the invention relates to management of directional traffic flow by providing a means for inter-sectional direction .~ ~
., 1~4~39S8 1 means and control as well as providing a means for interconnecting with other systems or adjacent buffer or holding stations as the case may be.
2. Description of the Prior Art It is known to fabricate and assemble a manufacturing system utilizing a plurality of satellite functional processing stations or sectors each capable of stand along operator as well as with stations interconnected, e.g. U.S. patent No. 3,889,355. It is also known to transport a work piece on a cushion of air and if a new direction is desired the work piece is stopped and the air of gaseous medium changed is U.S. Patent No. 2,678,237 to Allander, et al.
Hagler 3,717,381 discloses a gaseous cushion transport system and positioning system utilizing compressed air and vacuum ports for transporting and positioning. The teaching illustrated in the afore-said disclosure are utilizing open systems without environmental control and are not disclosing a self-centering arrangement or re-directional control as taught by the instant specification.
SUMMARY OF THE INVENTION
It is the object of this invention to provide in an environmen-tally controlled and enclosed minimum volume fluidic transport systemcapable of transporting semiconductor wafers in a random configuration a means for automatically or manually directing work pieces such as semiconductor wafers .:~ -~48958 1 ln any do~ir~d 90- turn. Other ~ngles ar~ al80 posslble, 2 but not normal.
Hagler 3,717,381 discloses a gaseous cushion transport system and positioning system utilizing compressed air and vacuum ports for transporting and positioning. The teaching illustrated in the afore-said disclosure are utilizing open systems without environmental control and are not disclosing a self-centering arrangement or re-directional control as taught by the instant specification.
SUMMARY OF THE INVENTION
It is the object of this invention to provide in an environmen-tally controlled and enclosed minimum volume fluidic transport systemcapable of transporting semiconductor wafers in a random configuration a means for automatically or manually directing work pieces such as semiconductor wafers .:~ -~48958 1 ln any do~ir~d 90- turn. Other ~ngles ar~ al80 posslble, 2 but not normal.
3 It ~ ~tlll another ob~ct of ~hi~ lnv~ntlon
4 to pro~ide a mQ1~8 for AtOpping~ c~nterlng, ~nd redlrecting S a ~or~ pi~ce ln any pxeprogrummed de~ired dirsction within 6 a controlled en~ironm~ntal enclo~d system minlmum volume 7 fluidlc tran~port ~y~tem.
8 A t~ll further ob~ct of thi8 invontio~ i~ to 9 provlde an intersection in a dual hlghw~y fluidic trans-port 8y8tem whereby ~emiconductox waf~r~ are traDsported 11 to and from proces~ing ~t~tions 1D ~ random or any other 12 de~rQd configuration.
13 The~e and oth~r objects are acco~pli~hed by 1~ provid~ng a s~lf-contering vector$zed modular fluidic tran~port aactlon capable of ~topplng the work piece and 16 centering the 8am~ and rad~r~ctlng same in any 90 17 direction by pro~idlng any comb~n~tion of ~ections to 18 form ~uch conflgurations ~s a dual bldirect~onal travel 19 pattarn embodylng turn around s~ctlons, directional interaectlons, holding buffer saction~ and the lika. The 21 said ~ystem being ~nclosQd in a po~itive pre~urized 22 atmv~phere or environment. The invcntion will be more 23 ~ully understood and appreciated by the eYpl~nation of 24 th~ en~uing description of the preferred znd specific embodiment thereof in connect~on ~-th the drawing~.
11~48958 Figure 1 is a top plan view of a single section illustrating the vectorized fluidic jet means, the vacuum stop and centering configura-tion as well as the optical sensing means, Figure 2 is a section of Figure 1 through 2-2 showing the lower plenum and a manifold section between said lower plenum and the trans-port membrane forming the floor of the upper plenum, and illustrating a means for terminating air flow and vacuum action as preprogrammed or directed and controlled by illustrated compressed air solenoid valves.
Figure 3 is a similar section as Figure 2 illustrating the opera-tion of a bellows to terminate the vacuum and fluidic forces.
Figure 4 is a section through 4-4 of Figure 1 illustrative of the optical detection system and the associated electronics for control of the vacuum and fluidic medium, e.g. air.
Figure 5 is a schematic illustration of the electronic control system in conjunction with an optical sensing means.
Figure 6 is a schematic illustration of dual highway intersection utilizing four separate modular sections commonly referred to as a 2 x 2 arrangement.
Figure 7 is a similar schematic illustration of a 1 x 2 configura-tion utilizing as a turn around means in conjunction with a storage or holding buffer.
1~48958 Referring now to the drawings Figure 1 illustrates a single modular fluidic section showing a vectorized fluid, for example, air means 1 as part of an enclosed vectorized fluidic transport system having an upper and lower major plenum, indicated in Figure 2 of the drawing, wherein work pieces are transported to and from pro-cessing stations in a random preprogrammed manner. In a system of this nature there must be provided means for directing the work piece and in this particular embodiment semiconductor silicon wafers are transported for processing at processing stations wherein various treatments and reactions are undertaken. Such means as intersections, turn around means in a dual lane system, as well as means for divert-ins and holding wafers prior to and subsequent to processing and various other combinations of a directional section shown in Figure 1 is necessary and an integral part of a fluidic transport system.
Figure 1 also illustrates vacuum stop means 2 and 2a and an optical sensing means 3. As a wafer enters said section from the direction of the inlet arrow it is decelerated by vacuum stop 2a and rotated counter-clockwise and is finally stopped in a substantially centered position in the section as well as its presence being detected by the sensor 3 where upon the vacuum is terminated by activating the solenoid valve 11 as shown in Figure 2 and 3 which by the use of compressed air extends the bellows 12 to terminate vacuum pull from conduit 2' on all vacuum stops in the section and the work piece 1~48~58 1 is centered by the gaseous fluid flowing from the ports 1 from each side. These ports or jets of semicircular openings form through the floor membrane an underlying groove formed in a mani-fold 4 between the upper plenum 5 and the lower plenum 6 both of which are illustrated in Figure 2. The wafer can travel in one of two directions in this section configuration as indicated by the outlet arrows. If the entrance is from the direction of arrow 8, the wafer can travel straight through following arrow 7 or in the direction of arrow 6. It can be seen that the direction of travel options is dependent upon the point entrance.
The direction of travel is made possible by stopping the flow of air at the desired exit direction. This is accomplished in a preprogrammed manner by activating a solenoid valve 9 using compres-sed air or other means which expands bellows 10 or any other suitable means to terminate fluid flow at the exit portion of the section.
This is accomplished in a preprogrammed manner by activating the sole-noid controlling the exit bank of jets as illustrated in Figure 3 where vacuum bellows 12 is shown in a closed position terminating vacuum from conduit 2' and fluidic air flow stopped by bellows 10 being closed while the fluidic medium 14, continues to flow through the opening which is controlled by the solenoid air valve 13, and bellows 15.
1()48~158 1 The solenoid valves in this case or other suitable means are operated by a compressed air source 16.
Each valve is connected to a light sensitive diode 18, as shown in Figure 4, by means of cables Pl, P2, and P3 which forms the logic cable 17 which in turn activates a sensor-amplifier 19 system to a logic system 20 enabling preprogrammed action. This arrangement is illustrated in both Figures 4 and 5 wherein a light source 21 flows through the light pipe 22 and optical sensing means 3 which activates the light sensitive diode 18 when a work piece breaks the light flow and terminates vacuum in the section when the work piece comes to rest on all vacuum stops which in turn allows centering to take place by the air jets from all sides. Vacuum supply is maintained at all times and terminated only after a work piece is detected and substantially centered within the section.
In Figure 5, one can see the light source being interrupted by a semiconductor wafer 23 and the sensing circuit and amplifier shown at 19 which is connected to a schmidt trigger 25 which in turn activates the logic system 20.
Figure 6 shows the aforesaid section in a dual highway type sys-tem whereby directional options are illustrated by the various arrows.This arrangement is referred to as a 2 x 2 intersection. In Figure 7, another variation 27 or a 1 x 2 is shown at the entrance to a storage buffer 26 holding 1G3 48~58 1 sectlon and aan be utllised a~ a turn ~round ~ean~
2 . in accoraance ~ith preprogr~mmed directlon.
3 Although the aforesaid ~luidic tran~port ~ection i~ de-crlb~d ~lth reference to a semlconductox ~afer transpor~ ~yst~ th~ conc~pt iJ adap~ble to 6 other ~ork pi~ce~ and although lt i8 com~on to use alr 7 as a fluldic m-dlum to ~orm ~n air cu~h~on trav~l and 8 ~upport ~ans ~uch medlu~ a- lA~rt ga~ and reaction qaQes 9 are capable of b~ing ut~ ed. The y~te~ in whlch th$s ~nvention i8 an int~gral pArt i~ an enclosed controlled 11 environmsnt structure. Which en~ironm~nt includes such 12 conditlon~ as temp~rature, hu~dlty, el~ctrical charges, 1~ particl~s and the like.
14 Similarly although only ~everal sectlon combin~tlons are illu-tratad it 1~ po~ible to ndapt a mult~pllcity 16 of combin~tions or arrnng~nt o sections dependent upon 17 the overall ~y-tem ¢oncept b~lng u-sd in the transporting 18 of work pieces.
19 The invention herein di~closed provide~ a minimum space utilization a~ such, a~ well as in a sy~tem.
21 Li~ewis~ the concept allows d~str~butlon of pressurized 22 and filter d controll~d enviro~mental fluid. In a total 23 tran6port syste~ it prov~d~s the nQc~s~ry control points 24 for work piQce ~ovement.
Although a pr~fQrrQd embcd$ment has been describea 26 herein ~ should be obvious to those skilled in the art 1~489S8 that the in~sntion ~ay b- carrled out ln ~srious 2 w~ys md ~y t~k~ ~sriou~ for~ of ~bod~nts over 3 thos~ de~cribed al~ov~. Ac~:srd$ngly, ~t il~ understood 4 that the pr~nt ln~rent:lon $8 not limlt~d by the detalls S of the for~golng d~-~criptlon but i8 d~fined by ~e 6 follo~g cl~.
7 ~hat ~ ~ claimed i8:
_g_
8 A t~ll further ob~ct of thi8 invontio~ i~ to 9 provlde an intersection in a dual hlghw~y fluidic trans-port 8y8tem whereby ~emiconductox waf~r~ are traDsported 11 to and from proces~ing ~t~tions 1D ~ random or any other 12 de~rQd configuration.
13 The~e and oth~r objects are acco~pli~hed by 1~ provid~ng a s~lf-contering vector$zed modular fluidic tran~port aactlon capable of ~topplng the work piece and 16 centering the 8am~ and rad~r~ctlng same in any 90 17 direction by pro~idlng any comb~n~tion of ~ections to 18 form ~uch conflgurations ~s a dual bldirect~onal travel 19 pattarn embodylng turn around s~ctlons, directional interaectlons, holding buffer saction~ and the lika. The 21 said ~ystem being ~nclosQd in a po~itive pre~urized 22 atmv~phere or environment. The invcntion will be more 23 ~ully understood and appreciated by the eYpl~nation of 24 th~ en~uing description of the preferred znd specific embodiment thereof in connect~on ~-th the drawing~.
11~48958 Figure 1 is a top plan view of a single section illustrating the vectorized fluidic jet means, the vacuum stop and centering configura-tion as well as the optical sensing means, Figure 2 is a section of Figure 1 through 2-2 showing the lower plenum and a manifold section between said lower plenum and the trans-port membrane forming the floor of the upper plenum, and illustrating a means for terminating air flow and vacuum action as preprogrammed or directed and controlled by illustrated compressed air solenoid valves.
Figure 3 is a similar section as Figure 2 illustrating the opera-tion of a bellows to terminate the vacuum and fluidic forces.
Figure 4 is a section through 4-4 of Figure 1 illustrative of the optical detection system and the associated electronics for control of the vacuum and fluidic medium, e.g. air.
Figure 5 is a schematic illustration of the electronic control system in conjunction with an optical sensing means.
Figure 6 is a schematic illustration of dual highway intersection utilizing four separate modular sections commonly referred to as a 2 x 2 arrangement.
Figure 7 is a similar schematic illustration of a 1 x 2 configura-tion utilizing as a turn around means in conjunction with a storage or holding buffer.
1~48958 Referring now to the drawings Figure 1 illustrates a single modular fluidic section showing a vectorized fluid, for example, air means 1 as part of an enclosed vectorized fluidic transport system having an upper and lower major plenum, indicated in Figure 2 of the drawing, wherein work pieces are transported to and from pro-cessing stations in a random preprogrammed manner. In a system of this nature there must be provided means for directing the work piece and in this particular embodiment semiconductor silicon wafers are transported for processing at processing stations wherein various treatments and reactions are undertaken. Such means as intersections, turn around means in a dual lane system, as well as means for divert-ins and holding wafers prior to and subsequent to processing and various other combinations of a directional section shown in Figure 1 is necessary and an integral part of a fluidic transport system.
Figure 1 also illustrates vacuum stop means 2 and 2a and an optical sensing means 3. As a wafer enters said section from the direction of the inlet arrow it is decelerated by vacuum stop 2a and rotated counter-clockwise and is finally stopped in a substantially centered position in the section as well as its presence being detected by the sensor 3 where upon the vacuum is terminated by activating the solenoid valve 11 as shown in Figure 2 and 3 which by the use of compressed air extends the bellows 12 to terminate vacuum pull from conduit 2' on all vacuum stops in the section and the work piece 1~48~58 1 is centered by the gaseous fluid flowing from the ports 1 from each side. These ports or jets of semicircular openings form through the floor membrane an underlying groove formed in a mani-fold 4 between the upper plenum 5 and the lower plenum 6 both of which are illustrated in Figure 2. The wafer can travel in one of two directions in this section configuration as indicated by the outlet arrows. If the entrance is from the direction of arrow 8, the wafer can travel straight through following arrow 7 or in the direction of arrow 6. It can be seen that the direction of travel options is dependent upon the point entrance.
The direction of travel is made possible by stopping the flow of air at the desired exit direction. This is accomplished in a preprogrammed manner by activating a solenoid valve 9 using compres-sed air or other means which expands bellows 10 or any other suitable means to terminate fluid flow at the exit portion of the section.
This is accomplished in a preprogrammed manner by activating the sole-noid controlling the exit bank of jets as illustrated in Figure 3 where vacuum bellows 12 is shown in a closed position terminating vacuum from conduit 2' and fluidic air flow stopped by bellows 10 being closed while the fluidic medium 14, continues to flow through the opening which is controlled by the solenoid air valve 13, and bellows 15.
1()48~158 1 The solenoid valves in this case or other suitable means are operated by a compressed air source 16.
Each valve is connected to a light sensitive diode 18, as shown in Figure 4, by means of cables Pl, P2, and P3 which forms the logic cable 17 which in turn activates a sensor-amplifier 19 system to a logic system 20 enabling preprogrammed action. This arrangement is illustrated in both Figures 4 and 5 wherein a light source 21 flows through the light pipe 22 and optical sensing means 3 which activates the light sensitive diode 18 when a work piece breaks the light flow and terminates vacuum in the section when the work piece comes to rest on all vacuum stops which in turn allows centering to take place by the air jets from all sides. Vacuum supply is maintained at all times and terminated only after a work piece is detected and substantially centered within the section.
In Figure 5, one can see the light source being interrupted by a semiconductor wafer 23 and the sensing circuit and amplifier shown at 19 which is connected to a schmidt trigger 25 which in turn activates the logic system 20.
Figure 6 shows the aforesaid section in a dual highway type sys-tem whereby directional options are illustrated by the various arrows.This arrangement is referred to as a 2 x 2 intersection. In Figure 7, another variation 27 or a 1 x 2 is shown at the entrance to a storage buffer 26 holding 1G3 48~58 1 sectlon and aan be utllised a~ a turn ~round ~ean~
2 . in accoraance ~ith preprogr~mmed directlon.
3 Although the aforesaid ~luidic tran~port ~ection i~ de-crlb~d ~lth reference to a semlconductox ~afer transpor~ ~yst~ th~ conc~pt iJ adap~ble to 6 other ~ork pi~ce~ and although lt i8 com~on to use alr 7 as a fluldic m-dlum to ~orm ~n air cu~h~on trav~l and 8 ~upport ~ans ~uch medlu~ a- lA~rt ga~ and reaction qaQes 9 are capable of b~ing ut~ ed. The y~te~ in whlch th$s ~nvention i8 an int~gral pArt i~ an enclosed controlled 11 environmsnt structure. Which en~ironm~nt includes such 12 conditlon~ as temp~rature, hu~dlty, el~ctrical charges, 1~ particl~s and the like.
14 Similarly although only ~everal sectlon combin~tlons are illu-tratad it 1~ po~ible to ndapt a mult~pllcity 16 of combin~tions or arrnng~nt o sections dependent upon 17 the overall ~y-tem ¢oncept b~lng u-sd in the transporting 18 of work pieces.
19 The invention herein di~closed provide~ a minimum space utilization a~ such, a~ well as in a sy~tem.
21 Li~ewis~ the concept allows d~str~butlon of pressurized 22 and filter d controll~d enviro~mental fluid. In a total 23 tran6port syste~ it prov~d~s the nQc~s~ry control points 24 for work piQce ~ovement.
Although a pr~fQrrQd embcd$ment has been describea 26 herein ~ should be obvious to those skilled in the art 1~489S8 that the in~sntion ~ay b- carrled out ln ~srious 2 w~ys md ~y t~k~ ~sriou~ for~ of ~bod~nts over 3 thos~ de~cribed al~ov~. Ac~:srd$ngly, ~t il~ understood 4 that the pr~nt ln~rent:lon $8 not limlt~d by the detalls S of the for~golng d~-~criptlon but i8 d~fined by ~e 6 follo~g cl~.
7 ~hat ~ ~ claimed i8:
_g_
Claims (14)
1. An environmentally controlled enclosed modular fluidic multi-directional transport section comprising, vacuum means for stopping and substantially centering a work piece at a given position within the section, means including a plurality of manifolds arranged for directing the flow of vectorized fluid for maintaining said work piece at said given position, means for detecting the presence of said work piece upon entering into said section in a given direction, and means responsive to said detecting means for controlling said vacuum means and said fluid flow through one of said plurality of mani-folds of said directing means to move said work piece from said given position of said section in a direction different from said given direction.
2. A fluidic multidirectional transport section in accordance with claim 1 coupled with one or more like sections associated and inter-acting with each other in any configuration within a system for trans-porting work pieces to and from a single or multiplicity of processing stations.
3. A fluidic multidirectional transport section in accordance with claim 1 wherein said fluid is air.
4. A fluidic multidirectional transport section in accordance with claim 1 wherein said fluid is an inert gas.
5. A fluidic multidirectional transport section in accordance with claim 1 wherein said stopping and centering means includes at least one vacuum port.
6. A fluidic multidirectional transport section in accordance with claim 5 wherein said vacuum ports are arranged in a configuration where-by a first of said ports is situated in a manner within the section to force the work piece to rotate about said first port and come to rest upon said first port and at least one additional port.
7. A fluidic multidirectional transport section in accordance with claim 1 wherein the presence of the work piece is detected by an optical sensor connected to a logic system whereby vacuum and fluid utilized in the section are preprogram controlled in an off and on mode.
8. A fluidic multidirectional transport section in accordance with claim 5 wherein said vacuum stopping and centering ports are situated substantially in three corner quadrants of a square or rectangular shaped section configuration.
9. Transport apparatus for guiding a moving wafer comprising:
a track, vacuum means disposed in said track for stopping said wafer at a given location in said track when said wafer is moving in a first direction, means disposed in said track for applying vectorized fluid toward said given location to maintain said wafer in substantially said given location, means for detecting the presence of said wafer at said given lo-cation, and means responsive to said detecting means for moving said wafer in a second direction from said given location.
a track, vacuum means disposed in said track for stopping said wafer at a given location in said track when said wafer is moving in a first direction, means disposed in said track for applying vectorized fluid toward said given location to maintain said wafer in substantially said given location, means for detecting the presence of said wafer at said given lo-cation, and means responsive to said detecting means for moving said wafer in a second direction from said given location.
10. Transport apparatus as set forth in Claim 9 wherein said respon-sive means includes means for applying a net fluid force to said wafer in said second direction.
11. Transport apparatus as set forth in Claim 10 wherein said re-sponsive means includes means for terminating vacuum in said vacuum means.
12. Transport apparatus as set forth in Claim 10 wherein said means for applying a net fluid force includes means for terminating the flow of a portion of the fluid produced by said vectorized fluid applying means.
13. Transport apparatus as set forth in Claim 9 wherein said vacuum means includes first, second and third ports, said first port being positioned to slow down the movement of said wafer and said second and third ports being positioned with respect to said first port so that at least one of said second and third ports holds said wafer along with said first port in said given location.
14. A transport apparatus as set forth in Claim 9 wherein said de-tecting means includes means for producing signals in response to variations in the intensity of a light beam.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US61865575A | 1975-10-01 | 1975-10-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1048958A true CA1048958A (en) | 1979-02-20 |
Family
ID=24478589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA76262578A Expired CA1048958A (en) | 1975-10-01 | 1976-10-01 | Fluidic transport intersection |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5244992A (en) |
| BR (1) | BR7606591A (en) |
| CA (1) | CA1048958A (en) |
| DE (1) | DE2643277A1 (en) |
| FR (1) | FR2345372A1 (en) |
| GB (1) | GB1555672A (en) |
| IT (1) | IT1074075B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4186918A (en) * | 1977-12-12 | 1980-02-05 | International Business Machines Corporation | Method and apparatus for locating and aligning flimsy sheets |
| JP2014010862A (en) * | 2012-06-29 | 2014-01-20 | Fujitsu Ltd | Library device |
-
1976
- 1976-07-28 FR FR7623753A patent/FR2345372A1/en active Granted
- 1976-08-31 GB GB3604676A patent/GB1555672A/en not_active Expired
- 1976-09-03 IT IT2682176A patent/IT1074075B/en active
- 1976-09-13 JP JP10893176A patent/JPS5244992A/en active Granted
- 1976-09-25 DE DE19762643277 patent/DE2643277A1/en not_active Withdrawn
- 1976-10-01 BR BR7606591A patent/BR7606591A/en unknown
- 1976-10-01 CA CA76262578A patent/CA1048958A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1555672A (en) | 1979-11-14 |
| BR7606591A (en) | 1977-07-05 |
| DE2643277A1 (en) | 1977-04-14 |
| JPS5430834B2 (en) | 1979-10-03 |
| FR2345372A1 (en) | 1977-10-21 |
| FR2345372B1 (en) | 1980-10-24 |
| JPS5244992A (en) | 1977-04-08 |
| IT1074075B (en) | 1985-04-17 |
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