CA1048958A - Fluidic transport intersection - Google Patents

Fluidic transport intersection

Info

Publication number
CA1048958A
CA1048958A CA76262578A CA262578A CA1048958A CA 1048958 A CA1048958 A CA 1048958A CA 76262578 A CA76262578 A CA 76262578A CA 262578 A CA262578 A CA 262578A CA 1048958 A CA1048958 A CA 1048958A
Authority
CA
Canada
Prior art keywords
fluidic
vacuum
section
wafer
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA76262578A
Other languages
English (en)
French (fr)
Inventor
John P. Babinski
Bruce I. Bertelsen
Karl H. Raacke
Valdeko H. Sirgo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA1048958A publication Critical patent/CA1048958A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H10P72/36—

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Branching, Merging, And Special Transfer Between Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CA76262578A 1975-10-01 1976-10-01 Fluidic transport intersection Expired CA1048958A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US61865575A 1975-10-01 1975-10-01

Publications (1)

Publication Number Publication Date
CA1048958A true CA1048958A (en) 1979-02-20

Family

ID=24478589

Family Applications (1)

Application Number Title Priority Date Filing Date
CA76262578A Expired CA1048958A (en) 1975-10-01 1976-10-01 Fluidic transport intersection

Country Status (7)

Country Link
JP (1) JPS5244992A (Direct)
BR (1) BR7606591A (Direct)
CA (1) CA1048958A (Direct)
DE (1) DE2643277A1 (Direct)
FR (1) FR2345372A1 (Direct)
GB (1) GB1555672A (Direct)
IT (1) IT1074075B (Direct)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4186918A (en) * 1977-12-12 1980-02-05 International Business Machines Corporation Method and apparatus for locating and aligning flimsy sheets
JP2014010862A (ja) * 2012-06-29 2014-01-20 Fujitsu Ltd ライブラリ装置

Also Published As

Publication number Publication date
FR2345372A1 (fr) 1977-10-21
BR7606591A (pt) 1977-07-05
DE2643277A1 (de) 1977-04-14
GB1555672A (en) 1979-11-14
FR2345372B1 (Direct) 1980-10-24
JPS5244992A (en) 1977-04-08
JPS5430834B2 (Direct) 1979-10-03
IT1074075B (it) 1985-04-17

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