IT1066543B - Apparato di spruzzamento - Google Patents
Apparato di spruzzamentoInfo
- Publication number
- IT1066543B IT1066543B IT51804/76A IT5180476A IT1066543B IT 1066543 B IT1066543 B IT 1066543B IT 51804/76 A IT51804/76 A IT 51804/76A IT 5180476 A IT5180476 A IT 5180476A IT 1066543 B IT1066543 B IT 1066543B
- Authority
- IT
- Italy
- Prior art keywords
- spraying apparatus
- spraying
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/3277—Continuous moving of continuous material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3438—Electrodes other than cathode
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Electrostatic Spraying Apparatus (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/641,481 US4014779A (en) | 1974-11-01 | 1975-12-17 | Sputtering apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
IT1066543B true IT1066543B (it) | 1985-03-12 |
Family
ID=24572585
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT51804/76A IT1066543B (it) | 1975-12-17 | 1976-10-19 | Apparato di spruzzamento |
Country Status (17)
Country | Link |
---|---|
JP (1) | JPS6035429B2 (sv) |
AT (1) | AT344501B (sv) |
AU (1) | AU511961B2 (sv) |
BE (1) | BE847413A (sv) |
CA (1) | CA1077437A (sv) |
CH (1) | CH617965A5 (sv) |
DD (1) | DD127637A5 (sv) |
DE (1) | DE2647149C2 (sv) |
DK (1) | DK149926C (sv) |
FR (1) | FR2335615A1 (sv) |
GB (1) | GB1503301A (sv) |
IL (1) | IL50722A (sv) |
IT (1) | IT1066543B (sv) |
LU (1) | LU76026A1 (sv) |
MX (1) | MX145314A (sv) |
NL (1) | NL7611563A (sv) |
SE (1) | SE429108B (sv) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4151059A (en) * | 1977-12-27 | 1979-04-24 | Coulter Stork U.S.A., Inc. | Method and apparatus for sputtering multiple cylinders simultaneously |
FR2527233A1 (fr) * | 1982-05-24 | 1983-11-25 | Asu Composants Sa | Installation pour le depot d'un revetement sur des substrats |
US4417968A (en) * | 1983-03-21 | 1983-11-29 | Shatterproof Glass Corporation | Magnetron cathode sputtering apparatus |
FR2548589B1 (fr) * | 1983-07-07 | 1987-02-20 | Aerospatiale | Procede et dispositif d'impregnation metallique d'un substrat se presentant sous la forme d'une nappe de fibres conductrices du courant electrique |
US4443318A (en) * | 1983-08-17 | 1984-04-17 | Shatterproof Glass Corporation | Cathodic sputtering apparatus |
EP0157991A1 (fr) * | 1984-04-10 | 1985-10-16 | INTERPATENT ANSTALT (INDELEC Abteilung) | Dispositif pour effectuer en continu la métallisation sélective de pièces industrielles, notamment en électronique |
JPS6162117A (ja) * | 1984-09-03 | 1986-03-31 | Brother Ind Ltd | キーボードの製造方法 |
FR2940321B1 (fr) * | 2008-12-19 | 2011-12-23 | Carewave Shielding Technologies | Machine de depot sous vide,sur un substrat,de materiaux en couches minces,par pulverisation cathodique. |
JP5969953B2 (ja) * | 2013-05-31 | 2016-08-17 | 株式会社神戸製鋼所 | 成膜装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL136984C (sv) * | 1964-06-04 | |||
DE2115590A1 (en) * | 1971-03-31 | 1972-10-05 | Leybold Heraeus Gmbh & Co Kg | Cathode sputtering device - has cathode with projecting rim |
US3829373A (en) * | 1973-01-12 | 1974-08-13 | Coulter Information Systems | Thin film deposition apparatus using segmented target means |
US3905887A (en) * | 1973-01-12 | 1975-09-16 | Coulter Information Systems | Thin film deposition method using segmented plasma |
-
1976
- 1976-10-18 MX MX166694A patent/MX145314A/es unknown
- 1976-10-19 DK DK469976A patent/DK149926C/da not_active IP Right Cessation
- 1976-10-19 IL IL50722A patent/IL50722A/xx unknown
- 1976-10-19 AT AT776076A patent/AT344501B/de not_active IP Right Cessation
- 1976-10-19 IT IT51804/76A patent/IT1066543B/it active
- 1976-10-19 FR FR7631399A patent/FR2335615A1/fr active Granted
- 1976-10-19 BE BE171612A patent/BE847413A/xx not_active IP Right Cessation
- 1976-10-19 DE DE2647149A patent/DE2647149C2/de not_active Expired
- 1976-10-19 GB GB43369/76A patent/GB1503301A/en not_active Expired
- 1976-10-19 CA CA263,664A patent/CA1077437A/en not_active Expired
- 1976-10-19 CH CH1321176A patent/CH617965A5/fr not_active IP Right Cessation
- 1976-10-19 LU LU76026A patent/LU76026A1/xx unknown
- 1976-10-19 NL NL7611563A patent/NL7611563A/xx not_active Application Discontinuation
- 1976-10-19 SE SE7611581A patent/SE429108B/sv unknown
- 1976-10-19 JP JP51125438A patent/JPS6035429B2/ja not_active Expired
- 1976-10-22 DD DD195409A patent/DD127637A5/xx unknown
- 1976-12-16 AU AU20598/76A patent/AU511961B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL7611563A (nl) | 1977-06-21 |
IL50722A0 (en) | 1976-12-31 |
MX145314A (es) | 1982-01-27 |
DK149926B (da) | 1986-10-27 |
DK469976A (da) | 1977-06-18 |
FR2335615B1 (sv) | 1981-12-04 |
AU511961B2 (en) | 1980-09-18 |
IL50722A (en) | 1979-05-31 |
DE2647149C2 (de) | 1983-08-25 |
SE7611581L (sv) | 1977-06-18 |
ATA776076A (de) | 1977-11-15 |
JPS5275669A (en) | 1977-06-24 |
DK149926C (da) | 1987-09-28 |
LU76026A1 (sv) | 1978-05-16 |
JPS6035429B2 (ja) | 1985-08-14 |
CA1077437A (en) | 1980-05-13 |
DE2647149A1 (de) | 1977-06-30 |
SE429108B (sv) | 1983-08-15 |
BE847413A (nl) | 1977-04-19 |
AU2059876A (en) | 1978-06-22 |
DD127637A5 (sv) | 1977-10-05 |
GB1503301A (en) | 1978-03-08 |
AT344501B (de) | 1978-07-25 |
CH617965A5 (en) | 1980-06-30 |
FR2335615A1 (fr) | 1977-07-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SE7605208L (sv) | Sprayanordning | |
IT1063489B (it) | Apparato di allarme | |
SE7606785L (sv) | Pipetteringsapparat | |
SE7609135L (sv) | Finfordelningsapparat | |
FR2302617A1 (fr) | Di | |
BR7608511A (pt) | Dispositivo pulverizador | |
BR7606423A (pt) | Moinho de pulverizacao | |
IT1056752B (it) | Apparecchio grammofonico | |
FR2300480A1 (fr) | Di | |
BE844720A (fr) | Pulverisateur | |
IT1067169B (it) | Equipaggiamento radiogoniometrico | |
FR2300604A1 (fr) | Di | |
DK146199C (da) | Vaeskeudleveringsapparat | |
AT376149B (de) | Spritzaggregat | |
IT1066543B (it) | Apparato di spruzzamento | |
IT1058970B (it) | Boccetta spargitalco | |
BE844297A (fr) | Opklapbare huishoudstoel met traptreden | |
IT1058871B (it) | Apparecchio di commutazione | |
FR2300345A1 (fr) | Appa | |
IT1066655B (it) | Procedimento per depurare caprolattame | |
TR19024A (tr) | Boyama usulue | |
SE7603118L (sv) | Beleggningsanordning | |
IT1061925B (it) | Apparecchio elettroradiografico | |
FR2329361A1 (fr) | Atomiseur | |
FR2300972A1 (fr) | Di |