IT1066271B - Procedimento e dispositivo per la fusione a zona senza crogiolo di aste di semiconduttore - Google Patents

Procedimento e dispositivo per la fusione a zona senza crogiolo di aste di semiconduttore

Info

Publication number
IT1066271B
IT1066271B IT5018776A IT5018776A IT1066271B IT 1066271 B IT1066271 B IT 1066271B IT 5018776 A IT5018776 A IT 5018776A IT 5018776 A IT5018776 A IT 5018776A IT 1066271 B IT1066271 B IT 1066271B
Authority
IT
Italy
Prior art keywords
auctions
crucible
semiconductor
procedure
zone melting
Prior art date
Application number
IT5018776A
Other languages
English (en)
Italian (it)
Original Assignee
Wacker Chemitronic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemitronic filed Critical Wacker Chemitronic
Application granted granted Critical
Publication of IT1066271B publication Critical patent/IT1066271B/it

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28Controlling or regulating
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28Controlling or regulating
    • C30B13/30Stabilisation or shape controlling of the molten zone, e.g. by concentrators, by electromagnetic fields; Controlling the section of the crystal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
IT5018776A 1975-07-01 1976-06-28 Procedimento e dispositivo per la fusione a zona senza crogiolo di aste di semiconduttore IT1066271B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752529329 DE2529329C3 (de) 1975-07-01 1975-07-01 Verfahren zum tiegellosen Zonenschmelzen

Publications (1)

Publication Number Publication Date
IT1066271B true IT1066271B (it) 1985-03-04

Family

ID=5950392

Family Applications (1)

Application Number Title Priority Date Filing Date
IT5018776A IT1066271B (it) 1975-07-01 1976-06-28 Procedimento e dispositivo per la fusione a zona senza crogiolo di aste di semiconduttore

Country Status (8)

Country Link
JP (1) JPS526309A (da)
BE (1) BE843542A (da)
DE (1) DE2529329C3 (da)
DK (1) DK147438C (da)
FR (1) FR2315993A1 (da)
GB (1) GB1561112A (da)
IT (1) IT1066271B (da)
NL (1) NL7606167A (da)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4866230A (en) * 1987-04-27 1989-09-12 Shin-Etu Handotai Company, Limited Method of and apparatus for controlling floating zone of semiconductor rod
JPS63307186A (ja) * 1987-06-05 1988-12-14 Shin Etsu Handotai Co Ltd 晶出結晶径制御装置
JP3841866B2 (ja) * 1996-03-04 2006-11-08 三菱電機株式会社 再結晶化材料の製法、その製造装置および加熱方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE631568A (da) * 1962-04-27
FR2238306A2 (en) * 1972-07-28 1975-02-14 Koudriavtzeff Basile Oscillating mirror system for TV cameras etc. - has inclined objective mirror driven by rotating disc via linkage rod and slider
BE795488A (fr) * 1972-09-28 1973-05-29 Siemens Ag Procede de fusion par zones sans creuset d'un barreau semi-conducteur
DE2332968C3 (de) * 1973-06-28 1981-12-10 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur Steuerung des durchmessers eines Halbleiterstabes

Also Published As

Publication number Publication date
GB1561112A (en) 1980-02-13
DK147438C (da) 1985-02-11
DE2529329A1 (de) 1977-01-13
DK294076A (da) 1977-01-02
JPS5617313B2 (da) 1981-04-21
DK147438B (da) 1984-08-06
DE2529329C3 (de) 1982-06-16
FR2315993A1 (fr) 1977-01-28
NL7606167A (nl) 1977-01-04
BE843542A (fr) 1976-12-29
DE2529329B2 (de) 1978-03-02
JPS526309A (en) 1977-01-18
FR2315993B1 (da) 1979-06-22

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