IT1062680B - Procedimento e dispositivo per trafilare semiconduttori mediante fusione a zona - Google Patents

Procedimento e dispositivo per trafilare semiconduttori mediante fusione a zona

Info

Publication number
IT1062680B
IT1062680B IT51074/76A IT5107476A IT1062680B IT 1062680 B IT1062680 B IT 1062680B IT 51074/76 A IT51074/76 A IT 51074/76A IT 5107476 A IT5107476 A IT 5107476A IT 1062680 B IT1062680 B IT 1062680B
Authority
IT
Italy
Prior art keywords
semiconductors
procedure
zone melting
melting
zone
Prior art date
Application number
IT51074/76A
Other languages
English (en)
Original Assignee
Wacker Chemitronic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemitronic filed Critical Wacker Chemitronic
Application granted granted Critical
Publication of IT1062680B publication Critical patent/IT1062680B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • General Induction Heating (AREA)
IT51074/76A 1975-09-01 1976-08-30 Procedimento e dispositivo per trafilare semiconduttori mediante fusione a zona IT1062680B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2538854A DE2538854B2 (de) 1975-09-01 1975-09-01 Einwindige Induktionsheizspule zum tiegelfreien Zonenschmelzen

Publications (1)

Publication Number Publication Date
IT1062680B true IT1062680B (it) 1984-10-20

Family

ID=5955333

Family Applications (1)

Application Number Title Priority Date Filing Date
IT51074/76A IT1062680B (it) 1975-09-01 1976-08-30 Procedimento e dispositivo per trafilare semiconduttori mediante fusione a zona

Country Status (10)

Country Link
US (1) US4109128A (it)
JP (1) JPS5230705A (it)
BE (1) BE845697A (it)
CA (1) CA1045211A (it)
DE (1) DE2538854B2 (it)
DK (1) DK153413C (it)
FR (1) FR2321936A1 (it)
GB (1) GB1563506A (it)
IT (1) IT1062680B (it)
NL (1) NL7608632A (it)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4220839A (en) * 1978-01-05 1980-09-02 Topsil A/S Induction heating coil for float zone melting of semiconductor rods
US4386255A (en) * 1979-12-17 1983-05-31 Rca Corporation Susceptor for rotary disc reactor
JPS59193318U (ja) * 1983-06-09 1984-12-22 長田　建明 携帯用歯ブラシ
DE3625669A1 (de) * 1986-07-29 1988-02-04 Siemens Ag Induktionsheizer zum tiegelfreien zonenschmelzen
JPS6448391A (en) * 1987-04-27 1989-02-22 Shinetsu Handotai Kk Single winding induction heating coil used in floating zone melting method
US5114528A (en) * 1990-08-07 1992-05-19 Wisconsin Alumni Research Foundation Edge-defined contact heater apparatus and method for floating zone crystal growth
US5315085A (en) * 1991-01-18 1994-05-24 Dynamic Systems Inc. Oven that exhibits both self-resistive and self-inductive heating
JP2623390B2 (ja) * 1991-03-22 1997-06-25 信越半導体株式会社 シリコン単結晶棒の成長方法
JP2567539B2 (ja) * 1992-01-30 1996-12-25 信越半導体株式会社 Ｆｚ法シリコン単結晶棒の成長方法及び装置
JP2759604B2 (ja) * 1993-10-21 1998-05-28 信越半導体株式会社 誘導加熱コイル
US7106016B2 (en) * 2003-07-31 2006-09-12 Siemens Energy & Automation, Inc. Inductive heating system and method for controlling discharge of electric energy from machines
DE102005016776B4 (de) * 2005-04-06 2009-06-18 Pv Silicon Forschungs Und Produktions Gmbh Verfahren zur Herstellung einer einkristallinen Si-Scheibe mit annähernd polygonalem Querschnitt
CN110541201A (zh) * 2019-09-09 2019-12-06 西安奕斯伟硅片技术有限公司 一种导向件及坩埚安装导向装置
JP7447784B2 (ja) * 2020-12-25 2024-03-12 株式会社Sumco 誘導加熱コイル及びこれを用いた単結晶製造装置
US20220241887A1 (en) * 2021-01-29 2022-08-04 Rohr, Inc. Induction welder and induction welding method

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH74830A (de) * 1917-02-06 1917-04-16 Ritter & Uhlmann Elektrischer Ofen für Koch-, Brat- und Backzwecke
US1981632A (en) * 1932-04-30 1934-11-20 Ajax Electrothermic Corp Heating apparatus
DE862931C (de) * 1940-06-04 1953-01-15 Deutsche Edelstahlwerke Ag Verfahren und Vorrichtung zum elektro-induktiven Erhitzen metallischer Werkstuecke
US2408229A (en) * 1943-04-30 1946-09-24 Rca Corp Electrical heating apparatus
FR948723A (fr) * 1947-03-31 1949-08-09 Philips Nv Dispositif de chauffage inductif
DE819305C (de) * 1949-07-19 1951-10-31 Deutsche Edelstahlwerke Ag Induktor fuer das elektrische Erhitzen von metallischen Werkstuecken
DE969445C (de) * 1953-12-17 1958-06-04 Bbc Brown Boveri & Cie Verfahren zur Herstellung eines durch Fluessigkeit gekuehlten Induktors
NL274893A (it) * 1961-04-11
US3258513A (en) * 1962-09-05 1966-06-28 Rogers Corp Method of making porous and permeable sheet material
FR1358425A (fr) * 1963-01-22 1964-04-17 Traitements Electrolytiques & Perfectionnement au chalumeau à plasma haute fréquence
DE1208292B (de) * 1963-03-29 1966-01-05 Siemens Ag Vorrichtung zum tiegelfreien Zonenschmelzen von Halbleitermaterial
US3258314A (en) * 1963-04-12 1966-06-28 Westinghouse Electric Corp Method for interior zone melting of a crystalline rod
DE1249836B (de) * 1963-12-03 1967-09-14 Wacker-Chemie G.m.b.H., München Verfahren zum induktiven Zonenschmelzen von Halbleiterstäben
DE1260439B (de) * 1964-02-08 1968-02-08 Siemens Ag Vorrichtung zum tiegelfreien Zonenschmelzen
DE1644004A1 (de) * 1967-04-21 1970-04-02 Siemens Ag Verfahren und Vorrichtung zum tiegelfreien Zonenschmelzen eines kristallinen Stabes,insbesondere Halbleiterstabes
BE789504A (fr) * 1971-12-07 1973-01-15 Siemens Ag Bobine de chauffage par induction pour la fusion par zones sanscreuset de barreaux semiconducteurs

Also Published As

Publication number Publication date
FR2321936B1 (it) 1979-06-08
DK153413C (da) 1988-12-05
DE2538854B2 (de) 1979-02-15
JPS5230705A (en) 1977-03-08
CA1045211A (en) 1978-12-26
FR2321936A1 (fr) 1977-03-25
GB1563506A (en) 1980-03-26
DK153413B (da) 1988-07-11
JPS564516B2 (it) 1981-01-30
DE2538854C3 (it) 1983-12-08
NL7608632A (nl) 1977-03-03
DE2538854A1 (de) 1977-03-03
BE845697A (fr) 1977-02-28
DK366076A (da) 1977-03-02
US4109128A (en) 1978-08-22

Similar Documents

Publication Publication Date Title
BR7602377A (pt) Dispositivo retificador por semicondutores
SE7600506L (sv) Stoppningsanordning
SE7607216L (sv) Halvledaranordning
SE427813B (sv) Pneumatisk slaganordning
DD132449A5 (de) Einrichtung zum feinen von metallschmelze
IT1062680B (it) Procedimento e dispositivo per trafilare semiconduttori mediante fusione a zona
SE425061B (sv) Anordning for verktygsvexling
AT345062B (de) Werkzeug-spannvorrichtung
BR7600863A (pt) Dispositivo de soldadura a topo
AT343972B (de) Werkzeugwechselvorrichtung
SE7600495L (sv) Kontinuerligt programmerbar manipulatoranordning
SE7600724L (sv) Kontrollanordning for tyristorer
SE418812B (sv) Anordning vid en malapparat for fibrost lignocellulosahaltigt material
AT348900B (de) Ueberwachungseinrichtung
IT1088746B (it) Dispositivo tiristore a semiconduttore
SE7501544L (sv) Lasbar mutteranordning
SE7802656L (sv) Tyristoranordning
SE7606293L (sv) Halvledaranordning
DD127959A1 (de) Sicherheitseinrichtung fuer die tueren von massenbefoerderungsmitteln
JPS5230727A (en) Device for breaking gate
GB1552144A (en) Semi-conductor device
IT1068076B (it) Dispositivo invergatore per orditoi
TR18670A (tr) Eritme suretiyle buekuem icin usul ve cihaz
SE7712252L (sv) Tyristoranordning
SE398479B (sv) Oppningsanordning for forpackning