IT1038694B - Apparecchiatura per la prova di circuiti elettronici - Google Patents
Apparecchiatura per la prova di circuiti elettroniciInfo
- Publication number
- IT1038694B IT1038694B IT24022/75A IT2402275A IT1038694B IT 1038694 B IT1038694 B IT 1038694B IT 24022/75 A IT24022/75 A IT 24022/75A IT 2402275 A IT2402275 A IT 2402275A IT 1038694 B IT1038694 B IT 1038694B
- Authority
- IT
- Italy
- Prior art keywords
- equipment
- electronic circuits
- testing electronic
- testing
- circuits
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US484052A US3911361A (en) | 1974-06-28 | 1974-06-28 | Coaxial array space transformer |
Publications (1)
Publication Number | Publication Date |
---|---|
IT1038694B true IT1038694B (it) | 1979-11-30 |
Family
ID=23922539
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT24022/75A IT1038694B (it) | 1974-06-28 | 1975-06-05 | Apparecchiatura per la prova di circuiti elettronici |
Country Status (5)
Country | Link |
---|---|
US (1) | US3911361A (it) |
JP (1) | JPS5932740B2 (it) |
DE (1) | DE2525166C2 (it) |
FR (1) | FR2275781A1 (it) |
IT (1) | IT1038694B (it) |
Families Citing this family (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5295182A (en) * | 1976-02-06 | 1977-08-10 | Nippon Telegr & Teleph Corp <Ntt> | Measurement for high frequency characteristics of transistor wafer |
US4045735A (en) * | 1976-02-17 | 1977-08-30 | E-H Research Laboratories, Inc. | Apparatus for testing electronic devices having a high density array of pin leads |
JPS5729314Y2 (it) * | 1976-12-30 | 1982-06-26 | ||
JPS5711414Y2 (it) * | 1978-11-13 | 1982-03-05 | ||
US4523144A (en) * | 1980-05-27 | 1985-06-11 | Japan Electronic Materials Corp. | Complex probe card for testing a semiconductor wafer |
US4574235A (en) * | 1981-06-05 | 1986-03-04 | Micro Component Technology, Inc. | Transmission line connector and contact set assembly for test site |
US4554506A (en) * | 1981-06-30 | 1985-11-19 | International Business Machines Corporation | Modular test probe |
US4566184A (en) * | 1981-08-24 | 1986-01-28 | Rockwell International Corporation | Process for making a probe for high speed integrated circuits |
JPS58120652U (ja) * | 1982-02-08 | 1983-08-17 | 日本電子材料株式会社 | プロ−ブカ−ド |
JPS5911444U (ja) * | 1982-07-13 | 1984-01-24 | 日本電子材料株式会社 | プロ−ブカ−ド |
EP0107323A1 (en) * | 1982-09-14 | 1984-05-02 | Accutest Corporation | Connector apparatus |
US4719417A (en) * | 1983-05-03 | 1988-01-12 | Wentworth Laboratories, Inc. | Multi-level test probe assembly for IC chips |
US4554505A (en) * | 1983-06-10 | 1985-11-19 | Rockwell International Corporation | Test socket for a leadless chip carrier |
DE3340179C1 (de) * | 1983-11-07 | 1985-05-09 | MANIA Elektronik Automatisation Entwicklung und Gerätebau GmbH | Anordnung an einem Leiterplattenpruefgeraet zur Anpassung der Abstaende von Kontakten |
JPS60116244U (ja) * | 1984-01-13 | 1985-08-06 | 日本電子材料株式会社 | プロ−ブカ−ド |
JPS6156981A (ja) * | 1984-08-27 | 1986-03-22 | Nec Corp | 半導体検査装置 |
US4734046A (en) * | 1984-09-21 | 1988-03-29 | International Business Machines Corporation | Coaxial converter with resilient terminal |
JPS6180067A (ja) * | 1984-09-21 | 1986-04-23 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | テスト・プロ−ブ装置 |
US4757256A (en) * | 1985-05-10 | 1988-07-12 | Micro-Probe, Inc. | High density probe card |
EP0265767B1 (de) * | 1986-10-14 | 1994-10-26 | Feinmetall Gesellschaft mit beschrÀ¤nkter Haftung | Nadelkarte |
US4918383A (en) * | 1987-01-20 | 1990-04-17 | Huff Richard E | Membrane probe with automatic contact scrub action |
US4812745A (en) * | 1987-05-29 | 1989-03-14 | Teradyne, Inc. | Probe for testing electronic components |
JPH0429561Y2 (it) * | 1987-08-18 | 1992-07-17 | ||
US5068602A (en) * | 1990-09-07 | 1991-11-26 | Tektronix, Inc. | DUT board for a semiconductor device tester having a reconfigurable coaxial interconnect grid and method of using same |
US5304921A (en) * | 1991-08-07 | 1994-04-19 | Hewlett-Packard Company | Enhanced grounding system for short-wire lengthed fixture |
US20050062492A1 (en) * | 2001-08-03 | 2005-03-24 | Beaman Brian Samuel | High density integrated circuit apparatus, test probe and methods of use thereof |
US5371654A (en) * | 1992-10-19 | 1994-12-06 | International Business Machines Corporation | Three dimensional high performance interconnection package |
US20020053734A1 (en) | 1993-11-16 | 2002-05-09 | Formfactor, Inc. | Probe card assembly and kit, and methods of making same |
US7073254B2 (en) | 1993-11-16 | 2006-07-11 | Formfactor, Inc. | Method for mounting a plurality of spring contact elements |
US6246247B1 (en) * | 1994-11-15 | 2001-06-12 | Formfactor, Inc. | Probe card assembly and kit, and methods of using same |
US5597317A (en) * | 1995-08-11 | 1997-01-28 | W. L. Gore & Associates, Inc. | Surface mating electrical connector |
KR0150334B1 (ko) * | 1995-08-17 | 1998-12-01 | 남재우 | 수직형니들을 가지는 프로브카드 및 그 제조방법 |
US5949244A (en) * | 1996-01-03 | 1999-09-07 | Miley; David M. | Low tolerance probe card and probe ring systems |
US5917330A (en) * | 1996-01-17 | 1999-06-29 | Miley; David M. | Probe ring having electrical components affixed thereto and related apparatus and processes |
US8033838B2 (en) | 1996-02-21 | 2011-10-11 | Formfactor, Inc. | Microelectronic contact structure |
JPH11125646A (ja) * | 1997-10-21 | 1999-05-11 | Mitsubishi Electric Corp | 垂直針型プローブカード、その製造方法およびその不良プローブ針の交換方法 |
US6160412A (en) * | 1998-11-05 | 2000-12-12 | Wentworth Laboratories, Inc. | Impedance-matched interconnection device for connecting a vertical-pin integrated circuit probing device to integrated circuit test equipment |
US6177805B1 (en) * | 1998-11-24 | 2001-01-23 | International Business Machines Corporation | High density test connector for disk drives in a high volume manufacturing environment |
US6255602B1 (en) | 1999-03-15 | 2001-07-03 | Wentworth Laboratories, Inc. | Multiple layer electrical interface |
US6351133B1 (en) * | 1999-03-31 | 2002-02-26 | Adoamtest Corp. | Packaging and interconnection of contact structure |
US6812720B1 (en) * | 2003-04-17 | 2004-11-02 | Chipmos Technologies (Bermuda) Ltd. | Modularized probe card with coaxial transmitters |
US6967556B2 (en) * | 2003-06-30 | 2005-11-22 | International Business Machines Corporation | High power space transformer |
US6967557B2 (en) * | 2003-08-26 | 2005-11-22 | International Business Machines Corporation | Wafer test space transformer |
DE102004023987B4 (de) * | 2004-05-14 | 2008-06-19 | Feinmetall Gmbh | Elektrische Prüfeinrichtung |
DE102004027886A1 (de) * | 2004-05-28 | 2005-12-22 | Feinmetall Gmbh | Prüfeinrichtung zur elektrischen Prüfung eines Prüflings sowie Verfahren zur Herstellung einer Prüfeinrichtung |
US7252514B2 (en) * | 2004-09-02 | 2007-08-07 | International Business Machines Corporation | High density space transformer and method of fabricating same |
DE102006054735A1 (de) * | 2005-12-05 | 2007-06-06 | Feinmetall Gmbh | Elektrische Kontakteinrichtung und elektrische Prüfvorrichtung für die Prüfung eines elektrischen Prüflings |
US7425837B2 (en) * | 2006-05-18 | 2008-09-16 | Keithley Instruments, Inc. | Spatial transformer for RF and low current interconnect |
KR100795909B1 (ko) * | 2006-12-12 | 2008-01-21 | 삼성전자주식회사 | 반도체 검사 장치의 프로브 카드 |
US8970238B2 (en) * | 2011-06-17 | 2015-03-03 | Electro Scientific Industries, Inc. | Probe module with interleaved serpentine test contacts for electronic device testing |
JP6199010B2 (ja) * | 2012-05-31 | 2017-09-20 | エス・ブイ・プローブ・プライベート・リミテッドSv Probe Pte Ltd. | プローブカード |
JP6246507B2 (ja) * | 2012-11-05 | 2017-12-13 | 新光電気工業株式会社 | プローブカード及びその製造方法 |
JP6208486B2 (ja) * | 2013-07-19 | 2017-10-04 | 新光電気工業株式会社 | プローブカード及びその製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3493858A (en) * | 1966-01-14 | 1970-02-03 | Ibm | Inflatable probe apparatus for uniformly contacting and testing microcircuits |
US3731191A (en) * | 1969-12-22 | 1973-05-01 | Ibm | Micro-miniature probe assembly |
DE2140060A1 (de) * | 1971-08-10 | 1973-02-22 | Bosch Photokino Gmbh | Anordnung zur drehzahlregelung eines gleichstrommotors |
US3806801A (en) * | 1972-12-26 | 1974-04-23 | Ibm | Probe contactor having buckling beam probes |
-
1974
- 1974-06-28 US US484052A patent/US3911361A/en not_active Expired - Lifetime
-
1975
- 1975-03-21 FR FR7509383A patent/FR2275781A1/fr active Granted
- 1975-06-04 JP JP50066658A patent/JPS5932740B2/ja not_active Expired
- 1975-06-05 IT IT24022/75A patent/IT1038694B/it active
- 1975-06-06 DE DE2525166A patent/DE2525166C2/de not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2275781A1 (fr) | 1976-01-16 |
DE2525166C2 (de) | 1985-01-17 |
DE2525166A1 (de) | 1976-01-15 |
JPS5932740B2 (ja) | 1984-08-10 |
JPS516678A (it) | 1976-01-20 |
US3911361A (en) | 1975-10-07 |
FR2275781B1 (it) | 1977-04-15 |
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