IT1006475B - Metodo perfezionato per la rimo zione di strati di materiale orga nico dalla superficie di compo nenti semiconduttori - Google Patents

Metodo perfezionato per la rimo zione di strati di materiale orga nico dalla superficie di compo nenti semiconduttori

Info

Publication number
IT1006475B
IT1006475B IT21505/74A IT2150574A IT1006475B IT 1006475 B IT1006475 B IT 1006475B IT 21505/74 A IT21505/74 A IT 21505/74A IT 2150574 A IT2150574 A IT 2150574A IT 1006475 B IT1006475 B IT 1006475B
Authority
IT
Italy
Prior art keywords
semiconductive
organic material
compo nents
removing layers
perfected method
Prior art date
Application number
IT21505/74A
Other languages
English (en)
Italian (it)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT1006475B publication Critical patent/IT1006475B/it

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00Etching of wafers, substrates or parts of devices
    • H10P50/20Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/286Dry etching; Plasma etching; Reactive-ion etching of insulating materials of organic materials
    • H10P50/287Dry etching; Plasma etching; Reactive-ion etching of insulating materials of organic materials by chemical means
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/42Stripping or agents therefor
    • G03F7/422Stripping or agents therefor using liquids only
    • G03F7/423Stripping or agents therefor using liquids only containing mineral acids or salts thereof, containing mineral oxidizing substances, e.g. peroxy compounds

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
IT21505/74A 1973-05-24 1974-04-17 Metodo perfezionato per la rimo zione di strati di materiale orga nico dalla superficie di compo nenti semiconduttori IT1006475B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2326447A DE2326447C2 (de) 1973-05-24 1973-05-24 Verfahren zum Entfernen von Schichten aus organischem Material und seine Verwendung

Publications (1)

Publication Number Publication Date
IT1006475B true IT1006475B (it) 1976-09-30

Family

ID=5881998

Family Applications (1)

Application Number Title Priority Date Filing Date
IT21505/74A IT1006475B (it) 1973-05-24 1974-04-17 Metodo perfezionato per la rimo zione di strati di materiale orga nico dalla superficie di compo nenti semiconduttori

Country Status (6)

Country Link
JP (1) JPS5231712B2 (https=)
CA (1) CA1026220A (https=)
DE (1) DE2326447C2 (https=)
FR (1) FR2231110B1 (https=)
GB (1) GB1427482A (https=)
IT (1) IT1006475B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57186330A (en) * 1981-05-12 1982-11-16 Matsushita Electronics Corp Removing method for photoresist
JPS6053954A (ja) * 1983-09-05 1985-03-28 Oki Electric Ind Co Ltd フォトマスク洗浄方法
EP0256284B1 (en) * 1986-08-09 1991-03-27 Micro-Image Technology Limited Composition for use in the production of integrated circuits and method for its preparation and use
US4872919A (en) * 1988-01-28 1989-10-10 The Procter & Gamble Company Method for removing precipitated calcium citrate from juice pasteurization or sterilization equipment
JPH0294911A (ja) * 1988-09-30 1990-04-05 Toshiba Corp 弾性表面波素子の製造方法
JP3152430B2 (ja) * 1990-10-09 2001-04-03 クロリンエンジニアズ株式会社 有機物被膜の除去方法

Also Published As

Publication number Publication date
CA1026220A (en) 1978-02-14
FR2231110B1 (https=) 1979-02-16
DE2326447A1 (de) 1974-12-12
JPS5021681A (https=) 1975-03-07
DE2326447C2 (de) 1986-02-06
GB1427482A (en) 1976-03-10
FR2231110A1 (https=) 1974-12-20
JPS5231712B2 (https=) 1977-08-16

Similar Documents

Publication Publication Date Title
IT1121673B (it) Procedimento per la produzione di composti silicio organici solforati
IT1011417B (it) Articoli assorbenti ed apparecchio per la manifattura di essi
BG21385A3 (bg) Метод за получаване на циклохексанови съединения
FI52251C (fi) Menetelmä ja laite optimaalisen ottopinnan määrittämiseksi oleellisest i tasaisesta pinnasta.
BR7400653D0 (pt) Composicoes para tratamento de superficies
ATA307673A (de) Keramikkondensator fur schichtschaltungen
IT1007641B (it) Apparecchiatura per la manipo lazione di lastre
BE810213A (nl) Registreerwerkwijze en daarbij gebruikte materialen
IT1006475B (it) Metodo perfezionato per la rimo zione di strati di materiale orga nico dalla superficie di compo nenti semiconduttori
IT1046286B (it) Apparecchio per la combustione di materiali di rifiuto
PL205294A1 (pl) Forma robocza do wyrobow ceramicznych
MX4901E (es) Conjunto mejorado de anillo para piston y metodo para formar el mismo
IT1017229B (it) Metodo per la pulitura di diafram mi porosi
AR200523A1 (es) Dispositivo para separar el material de desperdicio
AT355050B (de) Verfahren zum elektrochemischen aufrauhen der oberflaeche von flachdruckplattentraegern aus aluminium
AR200589A1 (es) Aparato para el maquinado electroerosivo
SU473699A1 (ru) Способ получени поликристаллических материалов
IT1205932B (it) Procedimento e apparecchio per lo stampaggio di decorazioni sulle superfici di paistrelle che vengono prodotte per stampaggio da una striscia di argilla
SU483902A1 (ru) Способ удалени нефти с поверхности воды
SE419595B (sv) Maskin for spridning av kornigt eller pulverformigt material
SU486025A1 (ru) Способ нанесени покрытий
IT1004480B (it) Procedimento ed apparecchiatura per ritoccare matrici litografiche
ATA1029873A (de) Verfahren zur herstellung von keramikmaterial aus abraummaterial
IT8124670A0 (it) Procedimento per eliminare strati di vernice.
IT1030692B (it) Materiale idraulico per freni