IL151528A0 - System for simultaneous projections of multiple phase-shifted patterns for the three-dimensional inspection of an object - Google Patents
System for simultaneous projections of multiple phase-shifted patterns for the three-dimensional inspection of an objectInfo
- Publication number
- IL151528A0 IL151528A0 IL15152801A IL15152801A IL151528A0 IL 151528 A0 IL151528 A0 IL 151528A0 IL 15152801 A IL15152801 A IL 15152801A IL 15152801 A IL15152801 A IL 15152801A IL 151528 A0 IL151528 A0 IL 151528A0
- Authority
- IL
- Israel
- Prior art keywords
- shifted patterns
- phase
- simultaneous
- patterns
- multiple phase
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2509—Color coding
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
- G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/10—Image acquisition
- G06V10/12—Details of acquisition arrangements; Constructional details thereof
- G06V10/14—Optical characteristics of the device performing the acquisition or on the illumination arrangements
- G06V10/145—Illumination specially adapted for pattern recognition, e.g. using gratings
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V2201/00—Indexing scheme relating to image or video recognition or understanding
- G06V2201/06—Recognition of objects for industrial automation
Landscapes
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Artificial Intelligence (AREA)
- Multimedia (AREA)
- Theoretical Computer Science (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA002301822A CA2301822A1 (fr) | 2000-03-24 | 2000-03-24 | Projection simultanee de plusieurs patrons avec acquisition simultanee pour l'inspection d'objets en trois dimensions |
PCT/CA2001/000376 WO2001071279A1 (en) | 2000-03-24 | 2001-03-20 | System for simultaneous projections of multiple phase-shifted patterns for the three-dimensional inspection of an object |
Publications (1)
Publication Number | Publication Date |
---|---|
IL151528A0 true IL151528A0 (en) | 2003-04-10 |
Family
ID=4165604
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL15152801A IL151528A0 (en) | 2000-03-24 | 2001-03-20 | System for simultaneous projections of multiple phase-shifted patterns for the three-dimensional inspection of an object |
Country Status (12)
Country | Link |
---|---|
US (2) | US7079666B2 (xx) |
EP (1) | EP1266187B1 (xx) |
JP (1) | JP2003528303A (xx) |
KR (1) | KR100815283B1 (xx) |
CN (1) | CN1185464C (xx) |
AT (1) | ATE347682T1 (xx) |
AU (1) | AU2001242179A1 (xx) |
CA (1) | CA2301822A1 (xx) |
DE (1) | DE60125025T2 (xx) |
IL (1) | IL151528A0 (xx) |
TW (1) | TW571072B (xx) |
WO (1) | WO2001071279A1 (xx) |
Families Citing this family (44)
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---|---|---|---|---|
US6917421B1 (en) | 2001-10-12 | 2005-07-12 | Kla-Tencor Technologies Corp. | Systems and methods for multi-dimensional inspection and/or metrology of a specimen |
US7126699B1 (en) | 2002-10-18 | 2006-10-24 | Kla-Tencor Technologies Corp. | Systems and methods for multi-dimensional metrology and/or inspection of a specimen |
DE10254139A1 (de) * | 2002-11-15 | 2004-05-27 | Carl Zeiss Jena Gmbh | Verfahren und Anordnung zur tiefenaufgelösten optischen Erfassung einer Probe |
KR101159380B1 (ko) * | 2004-03-11 | 2012-06-27 | 이코스비젼 시스팀스 엔.브이. | 파면 조정 및 향상된 3?d 측정을 위한 방법 및 장치 |
US7161799B2 (en) * | 2004-06-11 | 2007-01-09 | Michael Z. Lim | Thermal insulating board for laptop computers |
US7111783B2 (en) * | 2004-06-25 | 2006-09-26 | Board Of Trustees Operating Michigan State University | Automated dimensional inspection |
US7433058B2 (en) * | 2004-07-12 | 2008-10-07 | Solvision Inc. | System and method for simultaneous 3D height measurements on multiple sides of an object |
US20060017936A1 (en) * | 2004-07-22 | 2006-01-26 | Michel Cantin | Transparent object height measurement |
US20060153427A1 (en) * | 2005-01-12 | 2006-07-13 | Zanzucchi Peter J | Image methods for determining contour of terrain |
JP4613626B2 (ja) * | 2005-02-04 | 2011-01-19 | 旭硝子株式会社 | 鏡面形状測定方法および装置並びに検査方法および装置 |
DE102005046754A1 (de) | 2005-09-29 | 2007-04-05 | Carl Zeiss Jena Gmbh | Vorrichtung und Verfahren zur tiefenaufgelösten optischen Erfassung einer Probe |
CN101466998B (zh) * | 2005-11-09 | 2015-09-16 | 几何信息学股份有限公司 | 三维绝对坐标表面成像的方法和装置 |
US7545512B2 (en) * | 2006-01-26 | 2009-06-09 | Koh Young Technology Inc. | Method for automated measurement of three-dimensional shape of circuit boards |
WO2008033329A2 (en) * | 2006-09-15 | 2008-03-20 | Sciammarella Cesar A | System and method for analyzing displacements and contouring of surfaces |
US20080117438A1 (en) * | 2006-11-16 | 2008-05-22 | Solvision Inc. | System and method for object inspection using relief determination |
KR101078877B1 (ko) | 2009-02-18 | 2011-11-01 | 연세대학교 산학협력단 | 3차원 형상 측정 장치 |
KR101078876B1 (ko) | 2009-02-18 | 2011-11-01 | 연세대학교 산학협력단 | 3차원 형상 측정 장치 |
WO2010132794A2 (en) * | 2009-05-15 | 2010-11-18 | University Of Delaware | Method and apparatus for measuring microrelief of an object |
DE102010064593A1 (de) * | 2009-05-21 | 2015-07-30 | Koh Young Technology Inc. | Formmessgerät und -verfahren |
EP2270424B1 (de) * | 2009-07-02 | 2011-05-25 | Sick Ag | Optoelektronischer Sensor und Verfahren zur Überwachung |
JP4685971B2 (ja) * | 2009-09-24 | 2011-05-18 | 株式会社ケー・デー・イー | 検査システム及び検査方法 |
US8690063B2 (en) * | 2012-05-01 | 2014-04-08 | Symbol Technologies, Inc. | Apparatus for and method of electro-optically reading direct part marking indicia by image capture |
KR101308433B1 (ko) * | 2012-07-04 | 2013-09-12 | 한국광기술원 | 위상광측정시스템의 광축방향 측정범위를 향상시키기 위한 광원의 스펙트럼분할 방법과 이를 이용한 위상신호 처리방법 |
CN102980511B (zh) * | 2012-08-23 | 2016-05-25 | 杭州先临三维科技股份有限公司 | 一种扫描动态物体的三维扫描系统及其扫描方法 |
DE102013002399B4 (de) * | 2013-02-13 | 2016-12-22 | Chromasens Gmbh | Vorrichtung zur Generierung von Lichtmustern mit einer eindimensional fokussierten Beleuchtungseinrichtung |
EP2799810A1 (de) * | 2013-04-30 | 2014-11-05 | Aimess Services GmbH | Vorrichtung und Verfahren zum simultanen dreidimensionalen Vermessen von Oberflächen mit mehreren Wellenlängen |
JP2015114309A (ja) * | 2013-12-16 | 2015-06-22 | 株式会社オプトン | 計測装置 |
WO2015175702A1 (en) | 2014-05-14 | 2015-11-19 | Kla-Tencor Corporation | Image acquisition system, image acquisition method, and inspection system |
KR101610148B1 (ko) * | 2014-11-17 | 2016-04-08 | 현대자동차 주식회사 | 차체 검사 시스템 및 방법 |
US10368720B2 (en) * | 2014-11-20 | 2019-08-06 | The Johns Hopkins University | System for stereo reconstruction from monoscopic endoscope images |
CN105043300A (zh) * | 2015-05-27 | 2015-11-11 | 东莞市盟拓光电科技有限公司 | 可从多方位对被测物同时投影的三维测量系统 |
US9597839B2 (en) | 2015-06-16 | 2017-03-21 | Xerox Corporation | System for adjusting operation of a printer during three-dimensional object printing to compensate for errors in object formation |
JP6578436B2 (ja) * | 2015-10-08 | 2019-09-18 | エーエスエムエル ネザーランズ ビー.ブイ. | トポグラフィ測定システム |
CN105806253B (zh) * | 2016-04-18 | 2018-10-09 | 国家电网公司 | 一种定日镜面形的检测方法 |
US10277842B1 (en) | 2016-11-29 | 2019-04-30 | X Development Llc | Dynamic range for depth sensing |
CN110192079A (zh) * | 2017-01-20 | 2019-08-30 | 英泰克普拉斯有限公司 | 三维形状测量装置和测量方法 |
US10036630B1 (en) | 2017-05-22 | 2018-07-31 | Asm Technology Singapore Pte Ltd | Three-dimensional imaging using a multi-phase projector |
TWI639829B (zh) * | 2017-06-21 | 2018-11-01 | 致茂電子股份有限公司 | 太陽能電池的檢測方法與檢測系統 |
CN112930468B (zh) * | 2018-11-08 | 2022-11-18 | 成都频泰鼎丰企业管理中心(有限合伙) | 三维测量设备 |
US11450083B2 (en) * | 2019-09-27 | 2022-09-20 | Honeywell International Inc. | Dual-pattern optical 3D dimensioning |
US11639846B2 (en) | 2019-09-27 | 2023-05-02 | Honeywell International Inc. | Dual-pattern optical 3D dimensioning |
CN112113511B (zh) * | 2020-08-17 | 2021-11-23 | 上海交通大学 | 一种半透明物体表面轮廓线提取方法、系统及终端 |
CN112666698B (zh) * | 2021-01-27 | 2022-11-22 | 之江实验室 | 一种基于色散超表面的光纤束多方位三维共聚焦成像装置及方法 |
EP4286791A4 (en) * | 2021-02-23 | 2024-03-20 | Huawei Technologies Co., Ltd. | OPTICAL SYSTEM, DEVICE AND TERMINAL |
Family Cites Families (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3821558A (en) | 1972-08-09 | 1974-06-28 | Fleet Electronics Ltd | Determination or monitoring of the distances of surfaces from reference positions |
US3943278A (en) | 1974-08-22 | 1976-03-09 | Stanford Research Institute | Surface deformation gauging system by moire interferometry |
DE2501015C2 (de) | 1975-01-13 | 1976-08-19 | Siemens Ag | Beruehrungsfreies Dickenmessverfahren |
US4053234A (en) | 1975-02-18 | 1977-10-11 | United Biscuits Limited | Thickness measurement |
US4192612A (en) | 1976-01-09 | 1980-03-11 | Siemens Aktiengesellschaft | Device for contact-free thickness measurement |
US4051483A (en) | 1976-09-03 | 1977-09-27 | Fuji Photo Optical Co., Ltd. | System for measuring and recording three dimensional configuration of object |
SE412286B (sv) | 1978-07-10 | 1980-02-25 | Saab Scania Ab | Sett och anordning for fotoelektrisk avmetning av breder eller liknande geometriskt obestemda foremal |
DD151902A1 (de) | 1980-06-09 | 1981-11-11 | Frank Schumann | Verfahren zur bestimmung der dicke von klebstoffschichten auf buchblockruecken |
EP0076866B1 (de) * | 1981-10-09 | 1985-05-02 | Ibm Deutschland Gmbh | Interpolierendes Lichtschnitt-Verfahren |
US4525858A (en) | 1983-01-03 | 1985-06-25 | General Electric Company | Method and apparatus for reconstruction of three-dimensional surfaces from interference fringes |
DE3338802A1 (de) | 1983-10-26 | 1985-05-09 | Feldmühle AG, 4000 Düsseldorf | Vorrichtung und verfahren zum pruefen von materialbahnen |
JPH0820230B2 (ja) * | 1984-06-08 | 1996-03-04 | オリンパス光学工業株式会社 | 計測用内視鏡 |
US4657394A (en) | 1984-09-14 | 1987-04-14 | New York Institute Of Technology | Apparatus and method for obtaining three dimensional surface contours |
EP0214954A3 (de) | 1985-09-11 | 1989-03-22 | RSF-Elektronik Gesellschaft m.b.H. | Messvorrichtung zur berührungslosen Bestimmung von Massen nach dem Schattenbildverfahren |
JPS62239005A (ja) | 1986-04-11 | 1987-10-19 | Fuji Photo Film Co Ltd | 表面形状検査装置 |
US4796997A (en) * | 1986-05-27 | 1989-01-10 | Synthetic Vision Systems, Inc. | Method and system for high-speed, 3-D imaging of an object at a vision station |
US4736108A (en) | 1986-07-29 | 1988-04-05 | Santana Engineering Systems | Apparatus and method for testing coplanarity of semiconductor components |
US4794550A (en) | 1986-10-15 | 1988-12-27 | Eastman Kodak Company | Extended-range moire contouring |
US5085502A (en) | 1987-04-30 | 1992-02-04 | Eastman Kodak Company | Method and apparatus for digital morie profilometry calibrated for accurate conversion of phase information into distance measurements in a plurality of directions |
US4803371A (en) | 1987-09-30 | 1989-02-07 | The Coe Manufacturing Company | Optical scanning method and apparatus useful for determining the configuration of an object |
DE3803353A1 (de) | 1988-02-05 | 1989-08-17 | Truetzschler & Co | Vorrichtung zur gewinnung von messgroessen, die der dicke von in der spinnereivorbereitung anfallenden faserverbaenden, z.b. kardenbaendern o. dgl. entsprechen |
DE3817559C1 (xx) | 1988-05-24 | 1989-12-07 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De | |
JPH0224502A (ja) | 1988-07-12 | 1990-01-26 | Dainippon Screen Mfg Co Ltd | 膜厚測定方法 |
JPH0641851B2 (ja) | 1989-04-05 | 1994-06-01 | 日本鋼管株式会社 | 3次元曲面形状の測定装置 |
US4959898A (en) | 1990-05-22 | 1990-10-02 | Emhart Industries, Inc. | Surface mount machine with lead coplanarity verifier |
JP2949853B2 (ja) | 1990-12-21 | 1999-09-20 | 株式会社ニコン | 試料の厚さ測定装置 |
US5133601A (en) | 1991-06-12 | 1992-07-28 | Wyko Corporation | Rough surface profiler and method |
DE4130237A1 (de) | 1991-09-11 | 1993-03-18 | Zeiss Carl Fa | Verfahren und vorrichtung zur dreidimensionalen optischen vermessung von objektoberflaechen |
US5175601A (en) | 1991-10-15 | 1992-12-29 | Electro-Optical Information Systems | High-speed 3-D surface measurement surface inspection and reverse-CAD system |
US5327082A (en) | 1992-01-13 | 1994-07-05 | Valmet Automation (Canada) Ltd. | On line electromagnetic web thickness measuring apparatus incorporating a servomechanism with optical distance measuring |
CA2067400A1 (en) | 1992-04-28 | 1993-10-29 | Robert E. Bredberg | Laser thickness gauge |
JP3613401B2 (ja) * | 1992-07-06 | 2005-01-26 | マイクロソフト コーポレーション | オブジェクトの名称を付けて結び付ける方法及びシステム |
US5319445A (en) | 1992-09-08 | 1994-06-07 | Fitts John M | Hidden change distribution grating and use in 3D moire measurement sensors and CMM applications |
WO1994014115A2 (en) * | 1992-12-01 | 1994-06-23 | Microsoft Corporation | A method and system for in-place interaction with embedded objects |
US5396332A (en) | 1993-02-08 | 1995-03-07 | Ciszek; Theodoer F. | Apparatus and method for measuring the thickness of a semiconductor wafer |
DE59403176D1 (de) | 1993-10-29 | 1997-07-24 | Ferag Ag | Verfahren und Vorrichtung zur Messung der Dicke von Druckereierzeugnissen, wie Zeitungen, Zeitschriften und Teilen hiervon |
US5668631A (en) | 1993-12-20 | 1997-09-16 | Minolta Co., Ltd. | Measuring system with improved method of reading image data of an object |
JPH07218232A (ja) * | 1994-01-31 | 1995-08-18 | Nikon Corp | 光学式三次元形状計測装置 |
US5608529A (en) * | 1994-01-31 | 1997-03-04 | Nikon Corporation | Optical three-dimensional shape measuring apparatus |
US5608259A (en) * | 1994-03-02 | 1997-03-04 | Deshazo; Thomas R. | Reverse current flow prevention in a diffused resistor |
US5465152A (en) | 1994-06-03 | 1995-11-07 | Robotic Vision Systems, Inc. | Method for coplanarity inspection of package or substrate warpage for ball grid arrays, column arrays, and similar structures |
US5473432A (en) | 1994-09-12 | 1995-12-05 | Hewlett-Packard Company | Apparatus for measuring the thickness of a moving film utilizing an adjustable numerical aperture lens |
US5592622A (en) * | 1995-05-10 | 1997-01-07 | 3Com Corporation | Network intermediate system with message passing architecture |
US5909270A (en) * | 1996-05-10 | 1999-06-01 | California Institute Of Technology | Conoscopic system for real-time corneal topography |
EP0850420A2 (en) | 1996-07-12 | 1998-07-01 | Koninklijke Philips Electronics N.V. | Method of and device for inspecting a pcb |
WO1998055826A2 (en) | 1997-06-05 | 1998-12-10 | Electronic Packaging Services, Ltd. Co. | Measuring surface flatness using shadow moire technology and phase-stepping image processing |
GB2326228B (en) * | 1997-06-10 | 2000-05-24 | British Aerospace | Non-contact deformation measurement |
US6573998B2 (en) * | 1997-11-06 | 2003-06-03 | Cynovad, Inc. | Optoelectronic system using spatiochromatic triangulation |
JPH11257930A (ja) * | 1998-03-13 | 1999-09-24 | Nidek Co Ltd | 三次元形状測定装置 |
CN1093935C (zh) | 1998-12-30 | 2002-11-06 | 西安交通大学 | 一种快速投影结构光的三维轮廓相位测量方法及装置 |
CA2277855A1 (fr) | 1999-07-14 | 2001-01-14 | Solvision | Methode et systeme de mesure de la hauteur des billes de soudure d'un circuit imprime |
US6788210B1 (en) * | 1999-09-16 | 2004-09-07 | The Research Foundation Of State University Of New York | Method and apparatus for three dimensional surface contouring and ranging using a digital video projection system |
-
2000
- 2000-03-24 CA CA002301822A patent/CA2301822A1/fr not_active Abandoned
-
2001
- 2001-03-20 CN CNB018071171A patent/CN1185464C/zh not_active Expired - Fee Related
- 2001-03-20 AT AT01914912T patent/ATE347682T1/de not_active IP Right Cessation
- 2001-03-20 IL IL15152801A patent/IL151528A0/xx unknown
- 2001-03-20 KR KR1020027012636A patent/KR100815283B1/ko not_active IP Right Cessation
- 2001-03-20 JP JP2001569221A patent/JP2003528303A/ja active Pending
- 2001-03-20 WO PCT/CA2001/000376 patent/WO2001071279A1/en active IP Right Grant
- 2001-03-20 EP EP01914912A patent/EP1266187B1/en not_active Expired - Lifetime
- 2001-03-20 AU AU2001242179A patent/AU2001242179A1/en not_active Abandoned
- 2001-03-20 DE DE60125025T patent/DE60125025T2/de not_active Expired - Fee Related
- 2001-03-22 US US09/814,618 patent/US7079666B2/en not_active Expired - Fee Related
- 2001-03-23 TW TW090106933A patent/TW571072B/zh not_active IP Right Cessation
-
2006
- 2006-06-26 US US11/426,577 patent/US7403650B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE60125025T2 (de) | 2007-07-05 |
KR100815283B1 (ko) | 2008-03-19 |
EP1266187B1 (en) | 2006-12-06 |
US20020018118A1 (en) | 2002-02-14 |
CN1419647A (zh) | 2003-05-21 |
TW571072B (en) | 2004-01-11 |
WO2001071279A1 (en) | 2001-09-27 |
US7403650B2 (en) | 2008-07-22 |
CA2301822A1 (fr) | 2001-09-24 |
KR20030009403A (ko) | 2003-01-29 |
DE60125025D1 (de) | 2007-01-18 |
US7079666B2 (en) | 2006-07-18 |
CN1185464C (zh) | 2005-01-19 |
AU2001242179A1 (en) | 2001-10-03 |
EP1266187A1 (en) | 2002-12-18 |
US20070146727A1 (en) | 2007-06-28 |
JP2003528303A (ja) | 2003-09-24 |
ATE347682T1 (de) | 2006-12-15 |
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