IL107549A - Device for measuring the thickness of thin films - Google Patents

Device for measuring the thickness of thin films

Info

Publication number
IL107549A
IL107549A IL10754993A IL10754993A IL107549A IL 107549 A IL107549 A IL 107549A IL 10754993 A IL10754993 A IL 10754993A IL 10754993 A IL10754993 A IL 10754993A IL 107549 A IL107549 A IL 107549A
Authority
IL
Israel
Prior art keywords
light beam
axis
sample
input
along
Prior art date
Application number
IL10754993A
Other languages
English (en)
Other versions
IL107549A0 (en
Original Assignee
Nova Measuring Instr Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nova Measuring Instr Ltd filed Critical Nova Measuring Instr Ltd
Priority to IL10754993A priority Critical patent/IL107549A/en
Publication of IL107549A0 publication Critical patent/IL107549A0/xx
Priority to US08/221,724 priority patent/US5517312A/en
Priority to EP94307593A priority patent/EP0652415B1/en
Priority to DE69415641T priority patent/DE69415641T2/de
Priority to JP29905694A priority patent/JP3697279B2/ja
Publication of IL107549A publication Critical patent/IL107549A/en
Priority to US08/645,346 priority patent/US5764365A/en
Priority to US09/557,938 priority patent/USRE38153E1/en
Priority to US10/284,308 priority patent/USRE40225E1/en
Priority to US12/053,285 priority patent/USRE41906E1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
IL10754993A 1993-11-09 1993-11-09 Device for measuring the thickness of thin films IL107549A (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
IL10754993A IL107549A (en) 1993-11-09 1993-11-09 Device for measuring the thickness of thin films
US08/221,724 US5517312A (en) 1993-11-09 1994-04-01 Device for measuring the thickness of thin films
EP94307593A EP0652415B1 (en) 1993-11-09 1994-10-17 A device for measuring the thickness of thin films
DE69415641T DE69415641T2 (de) 1993-11-09 1994-10-17 Vorrichtung zur Dünnschichtdickenmessung
JP29905694A JP3697279B2 (ja) 1993-11-09 1994-11-09 薄膜厚測定装置
US08/645,346 US5764365A (en) 1993-11-09 1996-05-13 Two-dimensional beam deflector
US09/557,938 USRE38153E1 (en) 1993-11-09 2000-04-24 Two-dimensional beam deflector
US10/284,308 USRE40225E1 (en) 1993-11-09 2002-10-31 Two-dimensional beam deflector
US12/053,285 USRE41906E1 (en) 1993-11-09 2008-03-21 Two dimensional beam deflector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL10754993A IL107549A (en) 1993-11-09 1993-11-09 Device for measuring the thickness of thin films

Publications (2)

Publication Number Publication Date
IL107549A0 IL107549A0 (en) 1994-02-27
IL107549A true IL107549A (en) 1996-01-31

Family

ID=11065433

Family Applications (1)

Application Number Title Priority Date Filing Date
IL10754993A IL107549A (en) 1993-11-09 1993-11-09 Device for measuring the thickness of thin films

Country Status (5)

Country Link
US (2) US5517312A (ja)
EP (1) EP0652415B1 (ja)
JP (1) JP3697279B2 (ja)
DE (1) DE69415641T2 (ja)
IL (1) IL107549A (ja)

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Also Published As

Publication number Publication date
IL107549A0 (en) 1994-02-27
EP0652415B1 (en) 1998-12-30
DE69415641D1 (de) 1999-02-11
EP0652415A1 (en) 1995-05-10
JP3697279B2 (ja) 2005-09-21
DE69415641T2 (de) 1999-07-29
USRE41906E1 (en) 2010-11-02
JPH07198342A (ja) 1995-08-01
US5517312A (en) 1996-05-14

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