HUE047861T2 - Berendezések, rendszerek és eljárások védõbevonatoknak elektronikus eszközök részegységeire történõ felviteléhez - Google Patents

Berendezések, rendszerek és eljárások védõbevonatoknak elektronikus eszközök részegységeire történõ felviteléhez

Info

Publication number
HUE047861T2
HUE047861T2 HUE13763739A HUE13763739A HUE047861T2 HU E047861 T2 HUE047861 T2 HU E047861T2 HU E13763739 A HUE13763739 A HU E13763739A HU E13763739 A HUE13763739 A HU E13763739A HU E047861 T2 HUE047861 T2 HU E047861T2
Authority
HU
Hungary
Prior art keywords
apparatuses
systems
methods
electronic device
protective coatings
Prior art date
Application number
HUE13763739A
Other languages
English (en)
Inventor
Dana Cox
Max Sorenson
James Naylor
Original Assignee
Hzo Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hzo Inc filed Critical Hzo Inc
Publication of HUE047861T2 publication Critical patent/HUE047861T2/hu

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
HUE13763739A 2012-03-23 2013-03-25 Berendezések, rendszerek és eljárások védõbevonatoknak elektronikus eszközök részegységeire történõ felviteléhez HUE047861T2 (hu)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201261615172P 2012-03-23 2012-03-23

Publications (1)

Publication Number Publication Date
HUE047861T2 true HUE047861T2 (hu) 2020-05-28

Family

ID=49212062

Family Applications (1)

Application Number Title Priority Date Filing Date
HUE13763739A HUE047861T2 (hu) 2012-03-23 2013-03-25 Berendezések, rendszerek és eljárások védõbevonatoknak elektronikus eszközök részegységeire történõ felviteléhez

Country Status (5)

Country Link
US (1) US11060183B2 (hu)
EP (1) EP2828004B1 (hu)
CN (1) CN104334287A (hu)
HU (1) HUE047861T2 (hu)
WO (1) WO2013142858A1 (hu)

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US8847412B2 (en) * 2012-11-09 2014-09-30 Invensas Corporation Microelectronic assembly with thermally and electrically conductive underfill
US9894776B2 (en) 2013-01-08 2018-02-13 Hzo, Inc. System for refurbishing or remanufacturing an electronic device
US10449568B2 (en) 2013-01-08 2019-10-22 Hzo, Inc. Masking substrates for application of protective coatings
JP6034884B2 (ja) 2013-01-08 2016-11-30 エイチズィーオー・インコーポレーテッド 基板からの保護被覆選択部分の除去
WO2015192146A1 (en) * 2014-06-13 2015-12-17 Hzo, Inc. Impermeable protective coatings through which electrical connections may be established and electronic devices including the impermeable protective coatings
WO2021086354A1 (en) * 2019-10-30 2021-05-06 Hzo, Inc. Combination parylene system for pre-treatment, deposition, post-treatment and cleaning
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KR20220129598A (ko) * 2020-01-22 2022-09-23 어플라이드 머티어리얼스, 인코포레이티드 Oled 층 두께 및 도펀트 농도의 인-라인 모니터링

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Also Published As

Publication number Publication date
WO2013142858A1 (en) 2013-09-26
US20130251889A1 (en) 2013-09-26
EP2828004A1 (en) 2015-01-28
EP2828004B1 (en) 2019-11-20
EP2828004A4 (en) 2015-07-15
CN104334287A (zh) 2015-02-04
US11060183B2 (en) 2021-07-13

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