HK1123092A1 - Method for scanning a surface of a workpiece - Google Patents

Method for scanning a surface of a workpiece

Info

Publication number
HK1123092A1
HK1123092A1 HK09100255.1A HK09100255A HK1123092A1 HK 1123092 A1 HK1123092 A1 HK 1123092A1 HK 09100255 A HK09100255 A HK 09100255A HK 1123092 A1 HK1123092 A1 HK 1123092A1
Authority
HK
Hong Kong
Prior art keywords
workpiece
scanning
Prior art date
Application number
HK09100255.1A
Other languages
English (en)
Inventor
Pascal Jordil
Bo Pettersson
Siercks Knut
William Wilcox
Original Assignee
Hexagon Metrology Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hexagon Metrology Ab filed Critical Hexagon Metrology Ab
Publication of HK1123092A1 publication Critical patent/HK1123092A1/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
HK09100255.1A 2007-04-18 2009-01-09 Method for scanning a surface of a workpiece HK1123092A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP07106415A EP1983297B1 (en) 2007-04-18 2007-04-18 Scanning probe with constant scanning speed

Publications (1)

Publication Number Publication Date
HK1123092A1 true HK1123092A1 (en) 2009-06-05

Family

ID=38529470

Family Applications (1)

Application Number Title Priority Date Filing Date
HK09100255.1A HK1123092A1 (en) 2007-04-18 2009-01-09 Method for scanning a surface of a workpiece

Country Status (6)

Country Link
US (1) US7647706B2 (xx)
EP (1) EP1983297B1 (xx)
JP (1) JP5602344B2 (xx)
CN (1) CN101290212B (xx)
DE (1) DE602007005778D1 (xx)
HK (1) HK1123092A1 (xx)

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CN109084722B (zh) * 2018-06-20 2019-08-13 华中科技大学 一种自适应采样的复杂曲面接触式测量方法
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CN109765937B (zh) * 2019-01-31 2021-12-21 华中科技大学苏州脑空间信息研究院 全自由度调节的扫描装置及运动建模方法及控制方法
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Also Published As

Publication number Publication date
EP1983297A1 (en) 2008-10-22
EP1983297B1 (en) 2010-04-07
CN101290212A (zh) 2008-10-22
US7647706B2 (en) 2010-01-19
JP5602344B2 (ja) 2014-10-08
DE602007005778D1 (de) 2010-05-20
JP2008268210A (ja) 2008-11-06
CN101290212B (zh) 2012-09-05
US20080257023A1 (en) 2008-10-23

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