HK1111230A1 - Pellicle storage container and method of manufacturing same - Google Patents

Pellicle storage container and method of manufacturing same

Info

Publication number
HK1111230A1
HK1111230A1 HK08105759.2A HK08105759A HK1111230A1 HK 1111230 A1 HK1111230 A1 HK 1111230A1 HK 08105759 A HK08105759 A HK 08105759A HK 1111230 A1 HK1111230 A1 HK 1111230A1
Authority
HK
Hong Kong
Prior art keywords
storage container
manufacturing same
pellicle storage
pellicle
manufacturing
Prior art date
Application number
HK08105759.2A
Other languages
English (en)
Original Assignee
Shinetsu Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Chemical Co filed Critical Shinetsu Chemical Co
Publication of HK1111230A1 publication Critical patent/HK1111230A1/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Packaging Frangible Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Closures For Containers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
HK08105759.2A 2006-06-09 2008-05-23 Pellicle storage container and method of manufacturing same HK1111230A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006160573A JP2007328226A (ja) 2006-06-09 2006-06-09 ペリクル収納容器及びその製造方法

Publications (1)

Publication Number Publication Date
HK1111230A1 true HK1111230A1 (en) 2008-08-01

Family

ID=38928724

Family Applications (1)

Application Number Title Priority Date Filing Date
HK08105759.2A HK1111230A1 (en) 2006-06-09 2008-05-23 Pellicle storage container and method of manufacturing same

Country Status (5)

Country Link
JP (1) JP2007328226A (zh)
KR (1) KR20070117996A (zh)
CN (1) CN101086612B (zh)
HK (1) HK1111230A1 (zh)
TW (1) TWI316920B (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5464859B2 (ja) * 2008-02-01 2014-04-09 旭化成イーマテリアルズ株式会社 ペリクル収納容器
KR101287700B1 (ko) * 2008-09-12 2013-07-24 아사히 가세이 이-매터리얼즈 가부시키가이샤 펠리클 프레임, 펠리클 및 펠리클 프레임의 사용 방법
JP5474385B2 (ja) * 2009-03-18 2014-04-16 旭化成イーマテリアルズ株式会社 ペリクル収納容器
JP2011007827A (ja) * 2009-06-23 2011-01-13 Shin Etsu Polymer Co Ltd 大型精密部材収納容器
JP2011034020A (ja) * 2009-08-06 2011-02-17 Shin-Etsu Chemical Co Ltd ペリクル収納容器
JP2011203309A (ja) * 2010-03-24 2011-10-13 Shin-Etsu Chemical Co Ltd ペリクルの収納容器およびペリクル収納容器の搬送用台車
JP2012002918A (ja) * 2010-06-15 2012-01-05 Shin Etsu Polymer Co Ltd 大型精密部材収納容器およびその蓋体
JP2016151633A (ja) * 2015-02-17 2016-08-22 信越化学工業株式会社 ペリクル収納容器

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0645965Y2 (ja) * 1988-02-09 1994-11-24 三井石油化学工業株式会社 ペリクル用容器
US5575394A (en) * 1994-07-15 1996-11-19 Fluoroware, Inc. Wafer shipper and package
JP3143337B2 (ja) * 1994-10-12 2001-03-07 信越ポリマー株式会社 ペリクル収納容器
JPH08198377A (ja) * 1995-01-20 1996-08-06 Mitsui Petrochem Ind Ltd マスク保護装置の収納ケース
JP3023612U (ja) * 1995-10-06 1996-04-23 信越化学工業株式会社 ペリクルのペリクル収納容器への固定構造
JP2000173887A (ja) * 1998-12-02 2000-06-23 Asahi Kasei Denshi Kk ペリクル収納ケース
JP4082845B2 (ja) * 2000-04-10 2008-04-30 信越化学工業株式会社 リソグラフィー用ペリクルおよびペリクル膜の反りの緩和方法
JP4236535B2 (ja) * 2003-07-31 2009-03-11 旭化成エレクトロニクス株式会社 大型ペリクル収納容器
JP2005107085A (ja) * 2003-09-30 2005-04-21 Asahi Kasei Electronics Co Ltd 大型ペリクル収納容器の開封方法および蓋開閉治具および大型ペリクル収納容器

Also Published As

Publication number Publication date
TW200744919A (en) 2007-12-16
TWI316920B (en) 2009-11-11
KR20070117996A (ko) 2007-12-13
CN101086612A (zh) 2007-12-12
JP2007328226A (ja) 2007-12-20
CN101086612B (zh) 2010-09-15

Similar Documents

Publication Publication Date Title
GB2440836B (en) Method of manufacturing liquid container and liquid container
GB2440838B (en) Method of manufacturing liquid container and liquid container
GB2440835B (en) Method of manufacturing liquid container and liquid container
HK1134145A1 (en) Pellicle and method of manufacturing same
ZA200900445B (en) Method of manufacturing containers
HK1140173A1 (en) Container and method for manufacturing thereof
HK1132974A1 (en) Transport unit and method of manufacture thereof
GB0604663D0 (en) Random forest modeling of cellular phenotypes
EP2057081A4 (en) TWO-PIECE CONTAINER SEAL AND MANUFACTURING PROCESS
EP2008628A4 (en) PACKING WITH AN ARTICLE AND METHOD OF MANUFACTURING THEREOF
ZA201100555B (en) Double-walled container and method of manufacture
HK1111230A1 (en) Pellicle storage container and method of manufacturing same
EP2010337A4 (en) PAINT BIN AND METHOD OF MANUFACTURING THE SAME
EP1883105A4 (en) SUBSTRATE STORAGE CONTAINER AND METHOD FOR PRODUCING THE SAME
IL205823A0 (en) Article and method of manufacturing same
TWI319618B (en) Three dimensional package and method of making the same
HK1113121A1 (en) Pellicle storage container
GB2442535B (en) Method and articles
EG24440A (en) Container and method of manufacturing it
EP2388202A4 (en) PLASTIC CONTAINER AND METHOD FOR MANUFACTURING THE SAME
EP2167035A4 (en) CHONDROCYTE CONTAINERS AND METHOD OF USE
HK1120471A1 (en) Pellicle storage container and method of manufacturing same
EP2086473A4 (en) STENT AND METHOD FOR ITS MANUFACTURE
EP1872169A4 (en) LENTICULAR CONTAINER AND METHOD OF MANUFACTURE
HK1106806A1 (en) Label and the method of manufacturing the same

Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20180607