HK1105146A1 - Projection exposure apparatus - Google Patents
Projection exposure apparatusInfo
- Publication number
- HK1105146A1 HK1105146A1 HK07110295.4A HK07110295A HK1105146A1 HK 1105146 A1 HK1105146 A1 HK 1105146A1 HK 07110295 A HK07110295 A HK 07110295A HK 1105146 A1 HK1105146 A1 HK 1105146A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- aperture
- numerical aperture
- point
- optical system
- light reaching
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/7025—Size or form of projection system aperture, e.g. aperture stops, diaphragms or pupil obscuration; Control thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Lenses (AREA)
- Push-Button Switches (AREA)
- Photographic Developing Apparatuses (AREA)
- Liquid Crystal (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004184657 | 2004-06-23 | ||
PCT/JP2005/011411 WO2006001291A1 (fr) | 2004-06-23 | 2005-06-22 | Système optique de projection, dispositif d'exposition et méthode d'exposition |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1105146A1 true HK1105146A1 (en) | 2008-02-01 |
Family
ID=35781757
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK07110295.4A HK1105146A1 (en) | 2004-06-23 | 2007-09-21 | Projection exposure apparatus |
Country Status (9)
Country | Link |
---|---|
EP (1) | EP1768172B1 (fr) |
JP (1) | JP4711437B2 (fr) |
KR (1) | KR100918335B1 (fr) |
CN (1) | CN1954406B (fr) |
AT (1) | ATE457522T1 (fr) |
DE (1) | DE602005019302D1 (fr) |
HK (1) | HK1105146A1 (fr) |
TW (1) | TWI372262B (fr) |
WO (1) | WO2006001291A1 (fr) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE602006014368D1 (de) * | 2005-03-08 | 2010-07-01 | Zeiss Carl Smt Ag | Mikrolithographie-projektionssystem mit einer zugänglichen membran- oder aperturblende |
CN101976018B (zh) * | 2006-02-16 | 2013-01-30 | 株式会社尼康 | 光罩及其制造方法 |
US8208127B2 (en) | 2007-07-16 | 2012-06-26 | Carl Zeiss Smt Gmbh | Combination stop for catoptric projection arrangement |
JP5620379B2 (ja) * | 2008-07-31 | 2014-11-05 | コーニング インコーポレイテッド | スポットが調整される能動スポットアレイリソグラフィ用投影機システム |
WO2011095209A1 (fr) * | 2010-02-03 | 2011-08-11 | Carl Zeiss Smt Gmbh | Installation d'exposition par projection pour microlithographie |
KR101505256B1 (ko) | 2010-04-23 | 2015-03-30 | 칼 짜이스 에스엠티 게엠베하 | 리소그래픽 시스템의 광학 소자의 조작을 포함하는 리소그래픽 시스템의 작동 방법 |
WO2012137699A1 (fr) * | 2011-04-05 | 2012-10-11 | 株式会社ニコン | Appareil optique, appareil d'exposition, et procédé de fabrication d'un dispositif |
DE102014208770A1 (de) * | 2013-07-29 | 2015-01-29 | Carl Zeiss Smt Gmbh | Projektionsoptik zur Abbildung eines Objektfeldes in ein Bildfeld sowie Projektionsbelichtungsanlage mit einer derartigen Projektionsoptik |
DE102014223811B4 (de) | 2014-11-21 | 2016-09-29 | Carl Zeiss Smt Gmbh | Abbildende Optik für die EUV-Projektionslithographie, Projektionsbelichtungsanlage und Verfahren zur Herstellung eines strukturierten Bauteils |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09167735A (ja) * | 1995-12-15 | 1997-06-24 | Canon Inc | 投影露光装置及びそれを用いた半導体デバイスの製造方法 |
EP0951054B1 (fr) * | 1996-11-28 | 2008-08-13 | Nikon Corporation | Dispositif d'alignement et procede d'exposition |
JP2001110709A (ja) * | 1999-10-08 | 2001-04-20 | Nikon Corp | 多層膜反射鏡及び露光装置ならびに集積回路の製造方法。 |
EP1093021A3 (fr) * | 1999-10-15 | 2004-06-30 | Nikon Corporation | Système d'exposition par projection, ainsi qu'un appareil et des méthodes utilisant ce système |
JP2001185480A (ja) * | 1999-10-15 | 2001-07-06 | Nikon Corp | 投影光学系及び該光学系を備える投影露光装置 |
JP3720788B2 (ja) | 2002-04-15 | 2005-11-30 | キヤノン株式会社 | 投影露光装置及びデバイス製造方法 |
JP2004158786A (ja) * | 2002-11-08 | 2004-06-03 | Canon Inc | 投影光学系及び露光装置 |
WO2004046771A1 (fr) * | 2002-11-21 | 2004-06-03 | Carl Zeiss Smt Ag | Lentille de projection dotee d'un diaphragme de forme non circulaire pour microlithographie |
-
2005
- 2005-06-22 KR KR1020077001660A patent/KR100918335B1/ko active IP Right Grant
- 2005-06-22 CN CN2005800155707A patent/CN1954406B/zh active Active
- 2005-06-22 EP EP05753442A patent/EP1768172B1/fr not_active Not-in-force
- 2005-06-22 WO PCT/JP2005/011411 patent/WO2006001291A1/fr active Application Filing
- 2005-06-22 TW TW094120735A patent/TWI372262B/zh not_active IP Right Cessation
- 2005-06-22 JP JP2006528550A patent/JP4711437B2/ja active Active
- 2005-06-22 DE DE602005019302T patent/DE602005019302D1/de active Active
- 2005-06-22 AT AT05753442T patent/ATE457522T1/de not_active IP Right Cessation
-
2007
- 2007-09-21 HK HK07110295.4A patent/HK1105146A1/xx unknown
Also Published As
Publication number | Publication date |
---|---|
JP4711437B2 (ja) | 2011-06-29 |
JPWO2006001291A1 (ja) | 2008-04-17 |
TWI372262B (en) | 2012-09-11 |
DE602005019302D1 (de) | 2010-03-25 |
CN1954406A (zh) | 2007-04-25 |
EP1768172B1 (fr) | 2010-02-10 |
TW200604566A (en) | 2006-02-01 |
KR20070043979A (ko) | 2007-04-26 |
CN1954406B (zh) | 2011-07-06 |
ATE457522T1 (de) | 2010-02-15 |
EP1768172A1 (fr) | 2007-03-28 |
KR100918335B1 (ko) | 2009-09-22 |
WO2006001291A1 (fr) | 2006-01-05 |
EP1768172A4 (fr) | 2008-03-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AM | Amended specification (according sect 146 of patent law) |
Free format text: CORRECTION OF THE NAME OF THE INVENTOR FROM MATSUDA, HIDEKI TO KOMATSUDA, HIDEKI. Effective date: 20100709 |