ATE457522T1 - Projektionsbelichtungsapparat - Google Patents

Projektionsbelichtungsapparat

Info

Publication number
ATE457522T1
ATE457522T1 AT05753442T AT05753442T ATE457522T1 AT E457522 T1 ATE457522 T1 AT E457522T1 AT 05753442 T AT05753442 T AT 05753442T AT 05753442 T AT05753442 T AT 05753442T AT E457522 T1 ATE457522 T1 AT E457522T1
Authority
AT
Austria
Prior art keywords
aperture
numerical aperture
point
optical system
light reaching
Prior art date
Application number
AT05753442T
Other languages
English (en)
Inventor
Hideki Komatsuda
Tomowaki Takahashi
Masayuki Suzuki
Original Assignee
Nikon Corp
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Canon Kk filed Critical Nikon Corp
Application granted granted Critical
Publication of ATE457522T1 publication Critical patent/ATE457522T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/7025—Size or form of projection system aperture, e.g. aperture stops, diaphragms or pupil obscuration; Control thereof
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lenses (AREA)
  • Push-Button Switches (AREA)
  • Photographic Developing Apparatuses (AREA)
  • Liquid Crystal (AREA)
AT05753442T 2004-06-23 2005-06-22 Projektionsbelichtungsapparat ATE457522T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004184657 2004-06-23
PCT/JP2005/011411 WO2006001291A1 (ja) 2004-06-23 2005-06-22 投影光学系、露光装置および露光方法

Publications (1)

Publication Number Publication Date
ATE457522T1 true ATE457522T1 (de) 2010-02-15

Family

ID=35781757

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05753442T ATE457522T1 (de) 2004-06-23 2005-06-22 Projektionsbelichtungsapparat

Country Status (8)

Country Link
EP (1) EP1768172B1 (de)
JP (1) JP4711437B2 (de)
KR (1) KR100918335B1 (de)
CN (1) CN1954406B (de)
AT (1) ATE457522T1 (de)
DE (1) DE602005019302D1 (de)
TW (1) TWI372262B (de)
WO (1) WO2006001291A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101176686B1 (ko) 2005-03-08 2012-08-23 칼 짜이스 에스엠티 게엠베하 접근 용이한 조리개 또는 구경 조리개를 구비한마이크로리소그래피 투영 시스템
JP5453806B2 (ja) * 2006-02-16 2014-03-26 株式会社ニコン 露光装置、露光方法及びディスプレイの製造方法
US8208127B2 (en) 2007-07-16 2012-06-26 Carl Zeiss Smt Gmbh Combination stop for catoptric projection arrangement
JP5620379B2 (ja) * 2008-07-31 2014-11-05 コーニング インコーポレイテッド スポットが調整される能動スポットアレイリソグラフィ用投影機システム
WO2011095209A1 (de) * 2010-02-03 2011-08-11 Carl Zeiss Smt Gmbh Mikrolithographische projektionsbelichtungsanlage
WO2011141046A1 (en) * 2010-04-23 2011-11-17 Carl Zeiss Smt Gmbh Process of operating a lithographic system comprising a manipulation of an optical element of the lithographic system
WO2012137699A1 (ja) * 2011-04-05 2012-10-11 株式会社ニコン 光学装置、露光装置、およびデバイス製造方法
DE102014208770A1 (de) * 2013-07-29 2015-01-29 Carl Zeiss Smt Gmbh Projektionsoptik zur Abbildung eines Objektfeldes in ein Bildfeld sowie Projektionsbelichtungsanlage mit einer derartigen Projektionsoptik
DE102014223811B4 (de) 2014-11-21 2016-09-29 Carl Zeiss Smt Gmbh Abbildende Optik für die EUV-Projektionslithographie, Projektionsbelichtungsanlage und Verfahren zur Herstellung eines strukturierten Bauteils

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09167735A (ja) * 1995-12-15 1997-06-24 Canon Inc 投影露光装置及びそれを用いた半導体デバイスの製造方法
CN1144263C (zh) * 1996-11-28 2004-03-31 株式会社尼康 曝光装置以及曝光方法
JP2001110709A (ja) * 1999-10-08 2001-04-20 Nikon Corp 多層膜反射鏡及び露光装置ならびに集積回路の製造方法。
JP2001185480A (ja) * 1999-10-15 2001-07-06 Nikon Corp 投影光学系及び該光学系を備える投影露光装置
EP1093021A3 (de) * 1999-10-15 2004-06-30 Nikon Corporation Projektionsbelichtungssystem sowie ein solches System benutzendes Gerät und Verfahren
JP3720788B2 (ja) 2002-04-15 2005-11-30 キヤノン株式会社 投影露光装置及びデバイス製造方法
JP2004158786A (ja) * 2002-11-08 2004-06-03 Canon Inc 投影光学系及び露光装置
CN100399063C (zh) * 2002-11-21 2008-07-02 卡尔蔡司Smt股份有限公司 带非圆形光阑的微印刷用投影镜头

Also Published As

Publication number Publication date
EP1768172A1 (de) 2007-03-28
TW200604566A (en) 2006-02-01
CN1954406A (zh) 2007-04-25
JP4711437B2 (ja) 2011-06-29
TWI372262B (en) 2012-09-11
WO2006001291A1 (ja) 2006-01-05
EP1768172B1 (de) 2010-02-10
HK1105146A1 (en) 2008-02-01
DE602005019302D1 (de) 2010-03-25
JPWO2006001291A1 (ja) 2008-04-17
CN1954406B (zh) 2011-07-06
EP1768172A4 (de) 2008-03-05
KR20070043979A (ko) 2007-04-26
KR100918335B1 (ko) 2009-09-22

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Legal Events

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