HK1054465A1 - 調整半導體晶片表面的方法 - Google Patents
調整半導體晶片表面的方法Info
- Publication number
- HK1054465A1 HK1054465A1 HK03104882.0A HK03104882A HK1054465A1 HK 1054465 A1 HK1054465 A1 HK 1054465A1 HK 03104882 A HK03104882 A HK 03104882A HK 1054465 A1 HK1054465 A1 HK 1054465A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- modifying
- semiconductor wafer
- wafer
- semiconductor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02024—Mirror polishing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
- H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D2203/00—Tool surfaces formed with a pattern
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US56097300A | 2000-04-28 | 2000-04-28 | |
PCT/US2000/027091 WO2001084613A1 (en) | 2000-04-28 | 2000-10-02 | Method of modifying the surface of a semiconductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1054465A1 true HK1054465A1 (zh) | 2003-11-28 |
Family
ID=24240135
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK03104882.0A HK1054465A1 (zh) | 2000-04-28 | 2003-07-08 | 調整半導體晶片表面的方法 |
Country Status (9)
Country | Link |
---|---|
EP (1) | EP1281197A1 (zh) |
JP (1) | JP2003533023A (zh) |
KR (1) | KR20020093991A (zh) |
CN (1) | CN1452784A (zh) |
AU (1) | AU2000278447A1 (zh) |
BR (1) | BR0017222A (zh) |
CA (1) | CA2407300A1 (zh) |
HK (1) | HK1054465A1 (zh) |
WO (1) | WO2001084613A1 (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6682575B2 (en) | 2002-03-05 | 2004-01-27 | Cabot Microelectronics Corporation | Methanol-containing silica-based CMP compositions |
KR100623963B1 (ko) * | 2005-01-12 | 2006-09-19 | 제일모직주식회사 | 금속배선 연마용 슬러리 조성물 및 이를 이용한 금속배선연마 방법 |
CN102891077B (zh) * | 2012-09-26 | 2015-12-09 | 复旦大学 | 采用水基原子层沉积技术在石墨烯表面制备高k栅介质的方法 |
JP6358740B2 (ja) * | 2014-04-08 | 2018-07-18 | 山口精研工業株式会社 | 研磨用組成物 |
JP6358739B2 (ja) * | 2014-04-08 | 2018-07-18 | 山口精研工業株式会社 | 研磨用組成物 |
CN104842265A (zh) * | 2015-06-18 | 2015-08-19 | 上海申航热能科技有限公司 | 管内壁抛光用磨头及配方 |
CN106002498B (zh) * | 2016-08-01 | 2018-04-06 | 中国电子科技集团公司第四十六研究所 | 一种有机dast晶体的表面研磨工艺方法 |
CN113881349B (zh) * | 2021-09-01 | 2022-10-21 | 上海工程技术大学 | 用于碳化硅晶片硅表面化学机械抛光的抛光液及抛光方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3735158A1 (de) * | 1987-10-16 | 1989-05-03 | Wacker Chemitronic | Verfahren zum schleierfreien polieren von halbleiterscheiben |
US5614444A (en) * | 1995-06-06 | 1997-03-25 | Sematech, Inc. | Method of using additives with silica-based slurries to enhance selectivity in metal CMP |
US5704987A (en) * | 1996-01-19 | 1998-01-06 | International Business Machines Corporation | Process for removing residue from a semiconductor wafer after chemical-mechanical polishing |
US5972792A (en) * | 1996-10-18 | 1999-10-26 | Micron Technology, Inc. | Method for chemical-mechanical planarization of a substrate on a fixed-abrasive polishing pad |
JP2002517593A (ja) * | 1998-06-10 | 2002-06-18 | ロデール ホールディングス インコーポレイテッド | 金属cmpにおける研磨用組成物および研磨方法 |
-
2000
- 2000-10-02 CN CN00819480A patent/CN1452784A/zh active Pending
- 2000-10-02 BR BR0017222-7A patent/BR0017222A/pt not_active Application Discontinuation
- 2000-10-02 CA CA002407300A patent/CA2407300A1/en not_active Abandoned
- 2000-10-02 AU AU2000278447A patent/AU2000278447A1/en not_active Abandoned
- 2000-10-02 EP EP00968554A patent/EP1281197A1/en not_active Withdrawn
- 2000-10-02 WO PCT/US2000/027091 patent/WO2001084613A1/en not_active Application Discontinuation
- 2000-10-02 JP JP2001581336A patent/JP2003533023A/ja active Pending
- 2000-10-02 KR KR1020027014464A patent/KR20020093991A/ko not_active Application Discontinuation
-
2003
- 2003-07-08 HK HK03104882.0A patent/HK1054465A1/zh unknown
Also Published As
Publication number | Publication date |
---|---|
JP2003533023A (ja) | 2003-11-05 |
AU2000278447A1 (en) | 2001-11-12 |
CN1452784A (zh) | 2003-10-29 |
WO2001084613A1 (en) | 2001-11-08 |
KR20020093991A (ko) | 2002-12-16 |
BR0017222A (pt) | 2003-01-07 |
EP1281197A1 (en) | 2003-02-05 |
CA2407300A1 (en) | 2001-11-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB0203784D0 (en) | Method of manufacturing a semiconductor device | |
SG103846A1 (en) | A method of manufacturing a semiconductor device | |
SG106591A1 (en) | Semiconductor wafer dividing method | |
SG117412A1 (en) | Semiconductor wafer dividing method | |
SG100686A1 (en) | Semiconductor wafer dividing method | |
AU2002211485A1 (en) | Wafer cleaning module and method for cleaning the surface of a substrate | |
GB9907184D0 (en) | A method of manufacturing a semiconductor device | |
SG85171A1 (en) | Method of manufacturing semiconductor device | |
GB0014952D0 (en) | A method of growing a semiconductor layer | |
EP1335421A4 (en) | PROCESS FOR PRODUCING WAFER AND WAFER | |
EP1345262A4 (en) | METHOD FOR PRODUCING A SILICON WAFERS AND SILICON WAFER | |
SG114530A1 (en) | Method of manufacturing a semiconductor device | |
SG116418A1 (en) | Semiconductor wafer grinding method. | |
GB0009280D0 (en) | Method of cystallising a semiconductor film | |
WO2002003432A3 (en) | PROCESS FOR ETCHING SILICON WAFERS | |
SG91266A1 (en) | A method of manufacturing a semiconductor device | |
SG114529A1 (en) | Method of manufacturing a semiconductor device | |
HK1045402A1 (zh) | 半導體晶圓邊緣的刻蝕方法 | |
EP1424409A4 (en) | SEMICONDUCTOR WAFER AND PRODUCTION THEREOF | |
EP1274123A4 (en) | POLISHING FOR THE POLISHING OF SEMICONDUCTOR WASHERS AND METHOD FOR THE PRODUCTION OF SEMICONDUCTOR ARRANGEMENTS USING THIS POLISHING AGENT | |
GB2374458B (en) | Method of manufacturing a semiconductor device | |
GB0110088D0 (en) | Semiconductor wafer handling method | |
HK1054465A1 (zh) | 調整半導體晶片表面的方法 | |
GB2344218B (en) | Method of manufacturing a semiconductor device | |
GB2348540B (en) | Manufacturing method of semiconductor device |