HK1007055A1 - Piezoelectric device - Google Patents

Piezoelectric device

Info

Publication number
HK1007055A1
HK1007055A1 HK98106126A HK98106126A HK1007055A1 HK 1007055 A1 HK1007055 A1 HK 1007055A1 HK 98106126 A HK98106126 A HK 98106126A HK 98106126 A HK98106126 A HK 98106126A HK 1007055 A1 HK1007055 A1 HK 1007055A1
Authority
HK
Hong Kong
Prior art keywords
piezoelectric device
piezoelectric
Prior art date
Application number
HK98106126A
Other languages
English (en)
Inventor
Yukihisa Takeuchi
Kimura Koji
Original Assignee
Ngk Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ngk Insulators Ltd filed Critical Ngk Insulators Ltd
Publication of HK1007055A1 publication Critical patent/HK1007055A1/xx

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H10N30/2048—Membrane type having non-planar shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/486—Fine ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/345—Refractory metal oxides
    • C04B2237/348—Zirconia, hafnia, zirconates or hafnates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Composite Materials (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
HK98106126A 1992-12-26 1998-06-23 Piezoelectric device HK1007055A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04358979A JP3120260B2 (ja) 1992-12-26 1992-12-26 圧電／電歪膜型素子

Publications (1)

Publication Number Publication Date
HK1007055A1 true HK1007055A1 (en) 1999-03-26

Family

ID=18462107

Family Applications (1)

Application Number Title Priority Date Filing Date
HK98106126A HK1007055A1 (en) 1992-12-26 1998-06-23 Piezoelectric device

Country Status (5)

Country Link
US (1) US6396196B1 (xx)
EP (1) EP0606767B1 (xx)
JP (1) JP3120260B2 (xx)
DE (1) DE69317396T2 (xx)
HK (1) HK1007055A1 (xx)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3162584B2 (ja) * 1994-02-14 2001-05-08 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
US5634999A (en) * 1994-09-06 1997-06-03 Ngk Insulators, Ltd. Method of producing ceramic diaphragm structure having convex diaphragm portion
JP3501860B2 (ja) * 1994-12-21 2004-03-02 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
US5933167A (en) * 1995-04-03 1999-08-03 Seiko Epson Corporation Printer head for ink jet recording
JP3482101B2 (ja) * 1996-05-27 2003-12-22 日本碍子株式会社 圧電膜型素子
US5895702A (en) * 1996-07-16 1999-04-20 Ngk Insulators, Ltd. Ceramic member
JPH10264374A (ja) * 1997-03-27 1998-10-06 Seiko Epson Corp インクジェット式記録ヘッド
US5984459A (en) * 1997-09-01 1999-11-16 Seiko Epson Corporation Ink-jet printing head and ink-jet printing apparatus using same
US6361154B1 (en) 1998-09-03 2002-03-26 Matsushita Electric Industrial Co., Ltd. Ink-jet head with piezoelectric actuator
US6329740B1 (en) 1998-12-28 2001-12-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and production method thereof
US6407481B1 (en) 1999-03-05 2002-06-18 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device having convexly curved diaphragm
JP2001102597A (ja) 1999-09-30 2001-04-13 Fuji Electric Co Ltd 半導体構造およびその製造方法
DE60044666D1 (de) * 1999-10-01 2010-08-26 Ngk Insulators Ltd Piezoelektrisches/elektrostriktives bauelement und verfahren zu dessen herstellung
JP3436735B2 (ja) * 1999-10-01 2003-08-18 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
US6512323B2 (en) * 2000-03-22 2003-01-28 Caterpillar Inc. Piezoelectric actuator device
FR2821291B1 (fr) * 2001-02-27 2003-04-25 Imaje Sa Tete d'impression et imprimante a electrodes de deflexion ameliorees
EP1453680B1 (en) * 2001-12-11 2010-08-04 Ricoh Company, Ltd. Drop discharge head and method of producing the same
DE10218565A1 (de) * 2002-04-26 2003-11-06 Philips Intellectual Property Startprozess-Steuerung für den Anlauf eines Piezomotors
JP2004064067A (ja) * 2002-07-26 2004-02-26 Ngk Insulators Ltd 圧電／電歪膜型素子
WO2004063689A1 (ja) * 2003-01-16 2004-07-29 Matsushita Electric Industrial Co., Ltd. 感圧センサ及び物体検出装置
JP2005106529A (ja) * 2003-09-29 2005-04-21 Hosiden Corp 圧電型振動センサ
JP2005331485A (ja) * 2004-05-21 2005-12-02 Sony Corp 圧電素子および電気機械変換装置
JP4756309B2 (ja) * 2004-08-20 2011-08-24 独立行政法人産業技術総合研究所 高感度圧電素子
JP4800989B2 (ja) * 2006-11-15 2011-10-26 日本碍子株式会社 圧電／電歪材料、圧電／電歪体、及び圧電／電歪素子
KR100984333B1 (ko) * 2008-07-18 2010-09-30 국방과학연구소 전기 기계 변환기 및 그 제작방법
JP4993625B2 (ja) * 2009-02-04 2012-08-08 日本発條株式会社 圧電素子の電極構造、圧電素子の電極形成方法、圧電アクチュエータ及びヘッドサスペンション
US8450213B2 (en) * 2011-04-13 2013-05-28 Fujifilm Corporation Forming a membrane having curved features
JP2014072511A (ja) * 2012-10-02 2014-04-21 Ngk Insulators Ltd 積層体
SG10201407632UA (en) * 2013-11-26 2015-06-29 Agency Science Tech & Res Transducer and method for forming the same
JP6443146B2 (ja) * 2015-03-16 2018-12-26 セイコーエプソン株式会社 電子デバイス
CN106142841B (zh) * 2015-03-27 2019-09-24 兄弟工业株式会社 压电促动器和记录头
JP6420442B1 (ja) * 2017-10-16 2018-11-07 株式会社ワコー 発電素子
US11495731B2 (en) 2018-09-13 2022-11-08 Magnecomp Corporation Multilayer PZT electrode configuration for suspension stroke increase
KR102675451B1 (ko) * 2018-11-23 2024-06-13 엘지디스플레이 주식회사 복합센서장치, 디스플레이 장치 및 센싱방법
WO2022104099A1 (en) * 2020-11-12 2022-05-19 Jumbe Nelson L Transducers, their methods of manufacture and uses
US20220246834A1 (en) * 2021-02-02 2022-08-04 City University Of Hong Kong Method of manufacturing a curved ceramic structure

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2549872A (en) * 1948-03-26 1951-04-24 Bell Telephone Labor Inc Focusing ultrasonic radiator
US2756353A (en) * 1950-04-10 1956-07-24 Gen Electric Bender-mode piezoelectric device and method of making the same
US3387607A (en) * 1964-02-10 1968-06-11 Vilbiss Co Apparatus for inhalation therapy
GB1122245A (en) 1966-04-22 1968-07-31 Marconi Co Ltd Improvements in or relating to electro-mechanical resonators
US3433461A (en) * 1967-05-22 1969-03-18 Edison Instr Inc High-frequency ultrasonic generators
US3588552A (en) * 1969-09-23 1971-06-28 Motorola Inc Prestressed piezoelectric audio transducer
JPS5410214B2 (xx) * 1973-10-15 1979-05-02
US4068144A (en) * 1976-09-20 1978-01-10 Recognition Equipment Incorporated Liquid jet modulator with piezoelectric hemispheral transducer
US4308547A (en) * 1978-04-13 1981-12-29 Recognition Equipment Incorporated Liquid drop emitter
JPS58168572A (ja) * 1982-03-31 1983-10-04 Fujitsu Ltd 液滴噴射方法
JPS58196069A (ja) 1982-05-12 1983-11-15 Nec Corp 電歪効果素子
JPS60111600A (ja) * 1983-11-21 1985-06-18 Mitsubishi Mining & Cement Co Ltd 電気機械変換素子
GB2161647A (en) 1984-07-10 1986-01-15 Gen Electric Co Plc Piezoelectric devices
FR2570223B1 (fr) 1984-09-07 1986-12-05 Labo Electronique Physique Dispositif piezoelectrique et procede de realisation d'un tel dispositif
US4635079A (en) * 1985-02-11 1987-01-06 Pitney Bowes Inc. Single element transducer for an ink jet device
JPS61253873A (ja) 1985-05-02 1986-11-11 Toshiba Corp 圧電セラミツク材料
US4680595A (en) * 1985-11-06 1987-07-14 Pitney Bowes Inc. Impulse ink jet print head and method of making same
JPS62213399A (ja) 1986-03-12 1987-09-19 Omron Tateisi Electronics Co 圧電磁器
US4769570A (en) 1986-04-07 1988-09-06 Toshiba Ceramics Co., Ltd. Piezo-electric device
JPS63285983A (ja) 1987-05-18 1988-11-22 Omron Tateisi Electronics Co 薄膜圧電素子の製造方法
JPH01282878A (ja) 1988-05-10 1989-11-14 Tosoh Corp 屈曲型圧電変位素子
US5089455A (en) 1989-08-11 1992-02-18 Corning Incorporated Thin flexible sintered structures
JPH07108102B2 (ja) 1990-05-01 1995-11-15 日本碍子株式会社 圧電／電歪膜型アクチュエータの製造方法
US5210455A (en) 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion

Also Published As

Publication number Publication date
JPH06204580A (ja) 1994-07-22
EP0606767B1 (en) 1998-03-11
DE69317396T2 (de) 1998-07-23
US6396196B1 (en) 2002-05-28
EP0606767A1 (en) 1994-07-20
JP3120260B2 (ja) 2000-12-25
DE69317396D1 (de) 1998-04-16

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Legal Events

Date Code Title Description
PF Patent in force
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20061224