SG10201407632UA - Transducer and method for forming the same - Google Patents

Transducer and method for forming the same

Info

Publication number
SG10201407632UA
SG10201407632UA SG10201407632UA SG10201407632UA SG10201407632UA SG 10201407632U A SG10201407632U A SG 10201407632UA SG 10201407632U A SG10201407632U A SG 10201407632UA SG 10201407632U A SG10201407632U A SG 10201407632UA SG 10201407632U A SG10201407632U A SG 10201407632UA
Authority
SG
Singapore
Prior art keywords
transducer
forming
same
method
Prior art date
Application number
SG10201407632UA
Inventor
Jinghui Xu
Hongbin Yu
Liang Lou
Gu Yuandong Alex
Original Assignee
Agency Science Tech & Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to SG2013087515 priority Critical
Application filed by Agency Science Tech & Res filed Critical Agency Science Tech & Res
Priority to SG10201407632UA priority patent/SG10201407632UA/en
Publication of SG10201407632UA publication Critical patent/SG10201407632UA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezo-electric effect or with electrostriction
    • B06B1/0644Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezo-electric effect or with electrostriction using a single piezo-electric element
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezo-electric effect or with electrostriction
    • B06B1/0644Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezo-electric effect or with electrostriction using a single piezo-electric element
    • B06B1/0651Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezo-electric effect or with electrostriction using a single piezo-electric element of circular shape
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K9/00Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooter, buzzer
    • G10K9/12Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooter, buzzer electrically operated
    • G10K9/122Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooter, buzzer electrically operated using piezo-electric driving means
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/02Details
    • H01L41/04Details of piezo-electric or electrostrictive devices
    • H01L41/053Mounts, supports, enclosures or casings
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08Piezo-electric or electrostrictive devices
    • H01L41/09Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators
    • H01L41/0926Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H01L41/0973Membrane type
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08Piezo-electric or electrostrictive devices
    • H01L41/113Piezo-electric or electrostrictive devices with mechanical input and electrical output, e.g. generators, sensors
    • H01L41/1138Membrane type
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/42Piezoelectric device making
SG10201407632UA 2013-11-26 2014-11-17 Transducer and method for forming the same SG10201407632UA (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
SG2013087515 2013-11-26
SG10201407632UA SG10201407632UA (en) 2013-11-26 2014-11-17 Transducer and method for forming the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG10201407632UA SG10201407632UA (en) 2013-11-26 2014-11-17 Transducer and method for forming the same

Publications (1)

Publication Number Publication Date
SG10201407632UA true SG10201407632UA (en) 2015-06-29

Family

ID=53182053

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201407632UA SG10201407632UA (en) 2013-11-26 2014-11-17 Transducer and method for forming the same

Country Status (2)

Country Link
US (1) US10076772B2 (en)
SG (1) SG10201407632UA (en)

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FR3000354B1 (en) * 2012-12-20 2015-01-30 Commissariat Energie Atomique Membrane device with controlled displacement
EP3130013B1 (en) * 2014-04-11 2018-03-14 Fondazione Istituto Italiano di Tecnologia Device for harvesting energy from a fluidic flow including a thin film of piezoelectric material
WO2016067707A1 (en) * 2014-10-31 2016-05-06 株式会社村田製作所 Sound generation device
WO2017069701A1 (en) * 2015-10-21 2017-04-27 Agency For Science, Technology And Research Ultrasound transducer and method of forming the same
EP3211393A1 (en) * 2016-02-29 2017-08-30 ETH Zürich Mems device using a released device layer as membrane
US10325915B2 (en) 2016-05-04 2019-06-18 Invensense, Inc. Two-dimensional array of CMOS control elements
US20170322290A1 (en) * 2016-05-04 2017-11-09 Invensense, Inc. Piezoelectric micromachined ultrasonic transducer (pmut)
US10315222B2 (en) 2016-05-04 2019-06-11 Invensense, Inc. Two-dimensional array of CMOS control elements
US10445547B2 (en) 2016-05-04 2019-10-15 Invensense, Inc. Device mountable packaging of ultrasonic transducers
US10408797B2 (en) 2016-05-10 2019-09-10 Invensense, Inc. Sensing device with a temperature sensor
US10452887B2 (en) 2016-05-10 2019-10-22 Invensense, Inc. Operating a fingerprint sensor comprised of ultrasonic transducers
US10441975B2 (en) 2016-05-10 2019-10-15 Invensense, Inc. Supplemental sensor modes and systems for ultrasonic transducers
WO2018004688A1 (en) * 2016-07-01 2018-01-04 Intel Corporation Piezoelectric package-integrated acoustic transducer devices
US10474862B2 (en) 2017-06-01 2019-11-12 Invensense, Inc. Image generation in an electronic device using ultrasonic transducers
IT201700124348A1 (en) * 2017-10-31 2019-05-01 St Microelectronics Srl mems device of the piezoelectric type with suspended membrane and its manufacturing process

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JP2811768B2 (en) 1989-07-17 1998-10-15 株式会社デンソー The semiconductor type acceleration sensor and a method of manufacturing the same
DE69126688T2 (en) * 1990-08-29 1997-12-18 Toshiba Kawasaki Kk Optical disc player for optically processing information,
JP3120260B2 (en) * 1992-12-26 2000-12-25 日本碍子株式会社 The piezoelectric / electrostrictive film type element
FR2835981B1 (en) * 2002-02-13 2005-04-29 Commissariat Energie Atomique Tunable volume mems acoustic wave microresonator
US7656071B2 (en) * 2002-10-21 2010-02-02 Hrl Laboratories, Llc Piezoelectric actuator for tunable electronic components
EP1779173A1 (en) * 2004-07-29 2007-05-02 Idc, Llc System and method for micro-electromechanical operating of an interferometric modulator
EP2018673B1 (en) * 2006-05-17 2014-01-08 MicroGaN GmbH Micromechanical actuators consisting of semiconductors based on group iii nitrides
JP5184811B2 (en) * 2007-05-07 2013-04-17 パナソニック株式会社 Vibration type actuator
JP5408935B2 (en) * 2007-09-25 2014-02-05 キヤノン株式会社 Electromechanical transducer and manufacturing method thereof
JP5385117B2 (en) * 2009-12-17 2014-01-08 富士フイルム株式会社 Method for manufacturing piezoelectric MEMS switch
US8607912B2 (en) * 2009-12-18 2013-12-17 Bombardier Recreational Products Inc. Snowmobile suspension
KR101696665B1 (en) * 2010-09-16 2017-01-16 삼성전자주식회사 Bulk acoustic wave resonator sensor
WO2012073829A1 (en) 2010-11-30 2012-06-07 株式会社 村田製作所 Bulk elastic wave resonator
KR20130054473A (en) 2011-09-29 2013-05-27 삼성전기주식회사 Inertial sensor
US8819912B2 (en) * 2012-03-08 2014-09-02 GM Global Technology Operations LLC Method of assembling workpieces utilizing shape memory polymer activation to facilitate alignment and retention
US9061320B2 (en) * 2012-05-01 2015-06-23 Fujifilm Dimatix, Inc. Ultra wide bandwidth piezoelectric transducer arrays

Also Published As

Publication number Publication date
US10076772B2 (en) 2018-09-18
US20150145374A1 (en) 2015-05-28

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