GB997851A - Electron microscope - Google Patents

Electron microscope

Info

Publication number
GB997851A
GB997851A GB5064/64A GB506464A GB997851A GB 997851 A GB997851 A GB 997851A GB 5064/64 A GB5064/64 A GB 5064/64A GB 506464 A GB506464 A GB 506464A GB 997851 A GB997851 A GB 997851A
Authority
GB
United Kingdom
Prior art keywords
screen
electron microscope
feb
irradiated
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5064/64A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB997851A publication Critical patent/GB997851A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
GB5064/64A 1963-02-28 1964-02-06 Electron microscope Expired GB997851A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH258263A CH404005A (de) 1963-02-28 1963-02-28 Elektronenmikroskop mit Photo-Emission

Publications (1)

Publication Number Publication Date
GB997851A true GB997851A (en) 1965-07-07

Family

ID=4237026

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5064/64A Expired GB997851A (en) 1963-02-28 1964-02-06 Electron microscope

Country Status (4)

Country Link
CH (1) CH404005A (de)
DE (1) DE1250570B (de)
FR (1) FR1383525A (de)
GB (1) GB997851A (de)

Also Published As

Publication number Publication date
CH404005A (de) 1965-12-15
DE1250570B (de) 1967-09-21
FR1383525A (fr) 1964-12-24

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