GB979700A - Multiple layer coating and cleaning by means of electron beams - Google Patents

Multiple layer coating and cleaning by means of electron beams

Info

Publication number
GB979700A
GB979700A GB13026/63A GB1302663A GB979700A GB 979700 A GB979700 A GB 979700A GB 13026/63 A GB13026/63 A GB 13026/63A GB 1302663 A GB1302663 A GB 1302663A GB 979700 A GB979700 A GB 979700A
Authority
GB
United Kingdom
Prior art keywords
crucible
carrier
cleaning
substrate
layer coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB13026/63A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Temescal Metallurgical Corp
Original Assignee
Temescal Metallurgical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Temescal Metallurgical Corp filed Critical Temescal Metallurgical Corp
Publication of GB979700A publication Critical patent/GB979700A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

<PICT:0979700/C6-C7/1> In coating a substrate 51, e.g. of glass, with a succession of layers, e.g. of titanium dioxide and magnesium fluoride, by the evaporation under electron beam bombardment of materials contained in crucibles 28 in a rotatable carrier 26, a displaceable shutter 52 is provided to control the thicknesses of the deposited layers. As a preliminary step the electron beam 29 is switched to bombard the substrate for cleaning purposes. The crucible carrier 26 and the shutter 52 are rotated by reversible motors 42, 54, stops being provided to engage the shafts 41, 53 for accurate indexing. A fixed shield 43 with an opening 44 over the crucible under bombardment is provided over the crucible carrier. Operation may be manual or automatic.
GB13026/63A 1962-04-13 1963-04-02 Multiple layer coating and cleaning by means of electron beams Expired GB979700A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US187341A US3227133A (en) 1962-04-13 1962-04-13 Multiple layer coating and cleaning

Publications (1)

Publication Number Publication Date
GB979700A true GB979700A (en) 1965-01-06

Family

ID=22688579

Family Applications (1)

Application Number Title Priority Date Filing Date
GB13026/63A Expired GB979700A (en) 1962-04-13 1963-04-02 Multiple layer coating and cleaning by means of electron beams

Country Status (10)

Country Link
US (1) US3227133A (en)
AT (1) AT247097B (en)
BE (1) BE630728A (en)
CH (1) CH414303A (en)
DE (1) DE1298833B (en)
DK (1) DK125169B (en)
GB (1) GB979700A (en)
LU (1) LU43540A1 (en)
NL (1) NL291466A (en)
SE (1) SE300173B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2212519A (en) * 1987-11-13 1989-07-26 Vg Instr Group Vacuum evaporation and deposition
EP2868768A1 (en) 2013-10-29 2015-05-06 Oerlikon Trading AG, Trübbach Shutter system

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3277865A (en) * 1963-04-01 1966-10-11 United States Steel Corp Metal-vapor source with heated reflecting shield
US3467057A (en) * 1966-07-27 1969-09-16 Hitachi Ltd Electron beam evaporator
CA997228A (en) * 1972-06-27 1976-09-21 Hans-Juergen C. Blume Deposition of films
DE2917841A1 (en) * 1979-05-03 1980-11-13 Leybold Heraeus Gmbh & Co Kg EVAPORATOR FOR VACUUM EVAPORATION SYSTEMS
DE3200848C2 (en) * 1982-01-14 1984-09-27 GfO Gesellschaft für Oberflächentechnik mbH, 7070 Schwäbisch Gmünd Device for charging evaporators in evaporation systems
DE3316554C1 (en) * 1983-05-06 1984-07-12 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Evaporator device with jet heating for vapor deposition of several materials
CH663037A5 (en) * 1985-02-05 1987-11-13 Balzers Hochvakuum STEAM SOURCE FOR VACUUM COATING SYSTEMS.
DE102004006849B4 (en) * 2004-02-12 2011-06-01 Ald Vacuum Technologies Ag Device for coating substrates
DE102010017896A1 (en) * 2010-04-21 2011-10-27 Ald Vacuum Technologies Gmbh Apparatus and method for coating substrates according to the EB / PVD method

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE895086C (en) * 1942-04-15 1953-10-29 Siemens Ag Process for the production of metallic deposits by thermal evaporation
DE882174C (en) * 1942-10-07 1953-07-06 Bosch Gmbh Robert Process for the evaporation of substances in a vacuum using electron beams
US2482329A (en) * 1946-05-27 1949-09-20 Rca Corp Apparatus for selective vapor coating
GB754102A (en) * 1951-06-22 1956-08-01 Edwards & Co London Ltd W Improvements in or relating to a method and apparatus for vapourising materials, forexample, metal in vacuum
CH311812A (en) * 1951-11-05 1955-12-15 Zeiss Carl Fa Evaporation device.
BE514927A (en) * 1952-01-22
US2932588A (en) * 1955-07-06 1960-04-12 English Electric Valve Co Ltd Methods of manufacturing thin films of refractory dielectric materials
DE1072451B (en) * 1955-07-06 1960-06-02 English Electric Valve Company Limited, London Device for the production of coatings by vacuum vapor deposition
DE1054802B (en) * 1956-03-05 1959-04-09 Westinghouse Electric Corp Process for the evaporation of substances, in particular for the creation of the transition zones (junctions) of transistors
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2212519A (en) * 1987-11-13 1989-07-26 Vg Instr Group Vacuum evaporation and deposition
GB2212519B (en) * 1987-11-13 1992-05-20 Vg Instr Group Vacuum evaporation and deposition
EP2868768A1 (en) 2013-10-29 2015-05-06 Oerlikon Trading AG, Trübbach Shutter system

Also Published As

Publication number Publication date
DK125169B (en) 1973-01-08
AT247097B (en) 1966-05-25
BE630728A (en) 1963-11-04
CH414303A (en) 1966-05-31
DE1298833B (en) 1969-07-03
LU43540A1 (en) 1963-06-11
NL291466A (en)
SE300173B (en) 1968-04-08
US3227133A (en) 1966-01-04

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