DK125169B - Method for coating a substrate with a number of layers of different materials and with an exact thickness, and apparatus for performing this method. - Google Patents

Method for coating a substrate with a number of layers of different materials and with an exact thickness, and apparatus for performing this method.

Info

Publication number
DK125169B
DK125169B DK173863AA DK173863A DK125169B DK 125169 B DK125169 B DK 125169B DK 173863A A DK173863A A DK 173863AA DK 173863 A DK173863 A DK 173863A DK 125169 B DK125169 B DK 125169B
Authority
DK
Denmark
Prior art keywords
layers
coating
substrate
different materials
exact thickness
Prior art date
Application number
DK173863AA
Other languages
Danish (da)
Inventor
M Anderson
R Shrader
M Tyler
Original Assignee
Air Reduction
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Reduction filed Critical Air Reduction
Publication of DK125169B publication Critical patent/DK125169B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Toxicology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Physical Vapour Deposition (AREA)
DK173863AA 1962-04-13 1963-04-10 Method for coating a substrate with a number of layers of different materials and with an exact thickness, and apparatus for performing this method. DK125169B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US187341A US3227133A (en) 1962-04-13 1962-04-13 Multiple layer coating and cleaning

Publications (1)

Publication Number Publication Date
DK125169B true DK125169B (en) 1973-01-08

Family

ID=22688579

Family Applications (1)

Application Number Title Priority Date Filing Date
DK173863AA DK125169B (en) 1962-04-13 1963-04-10 Method for coating a substrate with a number of layers of different materials and with an exact thickness, and apparatus for performing this method.

Country Status (10)

Country Link
US (1) US3227133A (en)
AT (1) AT247097B (en)
BE (1) BE630728A (en)
CH (1) CH414303A (en)
DE (1) DE1298833B (en)
DK (1) DK125169B (en)
GB (1) GB979700A (en)
LU (1) LU43540A1 (en)
NL (1) NL291466A (en)
SE (1) SE300173B (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3277865A (en) * 1963-04-01 1966-10-11 United States Steel Corp Metal-vapor source with heated reflecting shield
US3467057A (en) * 1966-07-27 1969-09-16 Hitachi Ltd Electron beam evaporator
CA997228A (en) * 1972-06-27 1976-09-21 Hans-Juergen C. Blume Deposition of films
DE2917841A1 (en) * 1979-05-03 1980-11-13 Leybold Heraeus Gmbh & Co Kg EVAPORATOR FOR VACUUM EVAPORATION SYSTEMS
DE3200848C2 (en) * 1982-01-14 1984-09-27 GfO Gesellschaft für Oberflächentechnik mbH, 7070 Schwäbisch Gmünd Device for charging evaporators in evaporation systems
DE3316554C1 (en) * 1983-05-06 1984-07-12 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Evaporator device with jet heating for vapor deposition of several materials
CH663037A5 (en) * 1985-02-05 1987-11-13 Balzers Hochvakuum STEAM SOURCE FOR VACUUM COATING SYSTEMS.
GB8726639D0 (en) * 1987-11-13 1987-12-16 Vg Instr Groups Ltd Vacuum evaporation & deposition
DE102004006849B4 (en) * 2004-02-12 2011-06-01 Ald Vacuum Technologies Ag Device for coating substrates
DE102010017896A1 (en) * 2010-04-21 2011-10-27 Ald Vacuum Technologies Gmbh Apparatus and method for coating substrates according to the EB / PVD method
EP2868768B1 (en) 2013-10-29 2021-06-16 Oerlikon Surface Solutions AG, Pfäffikon Shutter system

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE895086C (en) * 1942-04-15 1953-10-29 Siemens Ag Process for the production of metallic deposits by thermal evaporation
DE882174C (en) * 1942-10-07 1953-07-06 Bosch Gmbh Robert Process for the evaporation of substances in a vacuum using electron beams
US2482329A (en) * 1946-05-27 1949-09-20 Rca Corp Apparatus for selective vapor coating
GB754102A (en) * 1951-06-22 1956-08-01 Edwards & Co London Ltd W Improvements in or relating to a method and apparatus for vapourising materials, forexample, metal in vacuum
CH311812A (en) * 1951-11-05 1955-12-15 Zeiss Carl Fa Evaporation device.
BE514927A (en) * 1952-01-22
NL99895C (en) * 1955-07-06
US2932588A (en) * 1955-07-06 1960-04-12 English Electric Valve Co Ltd Methods of manufacturing thin films of refractory dielectric materials
DE1054802B (en) * 1956-03-05 1959-04-09 Westinghouse Electric Corp Process for the evaporation of substances, in particular for the creation of the transition zones (junctions) of transistors
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof

Also Published As

Publication number Publication date
NL291466A (en)
US3227133A (en) 1966-01-04
BE630728A (en) 1963-11-04
SE300173B (en) 1968-04-08
LU43540A1 (en) 1963-06-11
CH414303A (en) 1966-05-31
DE1298833B (en) 1969-07-03
GB979700A (en) 1965-01-06
AT247097B (en) 1966-05-25

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