GB954200A - Improvements in and relating to the manufacture of semiconductor bodies by crystal growing - Google Patents
Improvements in and relating to the manufacture of semiconductor bodies by crystal growingInfo
- Publication number
- GB954200A GB954200A GB1534760A GB1534760A GB954200A GB 954200 A GB954200 A GB 954200A GB 1534760 A GB1534760 A GB 1534760A GB 1534760 A GB1534760 A GB 1534760A GB 954200 A GB954200 A GB 954200A
- Authority
- GB
- United Kingdom
- Prior art keywords
- disc
- crucible
- shaft
- stirrer
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 239000000155 melt Substances 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- 229910052732 germanium Inorganic materials 0.000 abstract 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 abstract 1
- 229910002804 graphite Inorganic materials 0.000 abstract 1
- 239000010439 graphite Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 230000006698 induction Effects 0.000 abstract 1
- 239000010453 quartz Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
- C30B15/305—Stirring of the melt
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL238923 | 1959-05-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB954200A true GB954200A (en) | 1964-04-02 |
Family
ID=19751706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1534760A Expired GB954200A (en) | 1959-05-05 | 1960-05-02 | Improvements in and relating to the manufacture of semiconductor bodies by crystal growing |
Country Status (4)
Country | Link |
---|---|
CH (1) | CH401916A (enrdf_load_stackoverflow) |
DE (1) | DE1136671B (enrdf_load_stackoverflow) |
GB (1) | GB954200A (enrdf_load_stackoverflow) |
NL (1) | NL238923A (enrdf_load_stackoverflow) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE528916A (enrdf_load_stackoverflow) * | 1953-05-18 | |||
DE1032852B (de) * | 1953-11-24 | 1958-06-26 | Siemens Und Halske Ag | Verfahren und Einrichtung zur Herstellung von Halbleiterkristallen nach dem Kristallziehverfahren aus der Schmelze |
-
0
- NL NL238923D patent/NL238923A/xx unknown
-
1960
- 1960-05-02 DE DEN18268A patent/DE1136671B/de active Pending
- 1960-05-02 GB GB1534760A patent/GB954200A/en not_active Expired
- 1960-05-02 CH CH499760A patent/CH401916A/de unknown
Also Published As
Publication number | Publication date |
---|---|
DE1136671B (de) | 1962-09-20 |
CH401916A (de) | 1965-11-15 |
NL238923A (enrdf_load_stackoverflow) |
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