GB881094A - An electron-optical apparatus - Google Patents

An electron-optical apparatus

Info

Publication number
GB881094A
GB881094A GB20810/59A GB2081059A GB881094A GB 881094 A GB881094 A GB 881094A GB 20810/59 A GB20810/59 A GB 20810/59A GB 2081059 A GB2081059 A GB 2081059A GB 881094 A GB881094 A GB 881094A
Authority
GB
United Kingdom
Prior art keywords
rod
electron
optical apparatus
june
sleeve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB20810/59A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tesla AS
Original Assignee
Tesla AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tesla AS filed Critical Tesla AS
Publication of GB881094A publication Critical patent/GB881094A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB20810/59A 1958-06-19 1959-06-17 An electron-optical apparatus Expired GB881094A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS881094X 1958-06-19

Publications (1)

Publication Number Publication Date
GB881094A true GB881094A (en) 1961-11-01

Family

ID=5456498

Family Applications (1)

Application Number Title Priority Date Filing Date
GB20810/59A Expired GB881094A (en) 1958-06-19 1959-06-17 An electron-optical apparatus

Country Status (4)

Country Link
US (1) US2993993A (enrdf_load_stackoverflow)
DE (1) DE1125566B (enrdf_load_stackoverflow)
GB (1) GB881094A (enrdf_load_stackoverflow)
NL (1) NL113488C (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL288034A (enrdf_load_stackoverflow) * 1962-01-23
DE1216454B (de) * 1962-05-15 1966-05-12 Siemens Ag Blendenanordnung zum Ausblenden bestimmter Strahlen aus dem Strahlengang von an der Pumpe arbeitenden Korpuskularstrahlgeraeten
US3333098A (en) * 1963-07-31 1967-07-25 Hitachi Ltd Aperture device for electron microscopes and the like
US3411000A (en) * 1965-04-14 1968-11-12 Siemens Ag X-ray diffractometer diaphragm which is synchronously rotated with the specimen
US3446960A (en) * 1965-08-30 1969-05-27 Nasa Device for measuring electron-beam intensities and for subjecting materials to electron irradiation in an electron microscope
US3852594A (en) * 1973-07-25 1974-12-03 Pepi Inc X-ray diffraction apparatus
US4466112A (en) * 1982-01-29 1984-08-14 Technicare Corporation Variable detector aperture
US4602377A (en) * 1984-03-30 1986-07-22 The United States Of America As Represented By The United States Department Of Energy Diamond-anvil high-pressure cell with improved X-ray collimation system
GB0320187D0 (en) * 2003-08-28 2003-10-01 Shimadzu Res Lab Europe Ltd Particle optical apparatus
DE102009028013B9 (de) * 2009-07-24 2014-04-17 Carl Zeiss Microscopy Gmbh Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1386630A (en) * 1920-06-07 1921-08-09 Charles T Kinsman Bunsen burner
US2851610A (en) * 1954-09-08 1958-09-09 Akashi Kazuhiko Variable aperture for electron microscope

Also Published As

Publication number Publication date
US2993993A (en) 1961-07-25
DE1125566B (de) 1962-03-15
NL113488C (enrdf_load_stackoverflow)

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