CA567633A - Thermionic ion source - Google Patents
Thermionic ion sourceInfo
- Publication number
- CA567633A CA567633A CA567633A CA567633DA CA567633A CA 567633 A CA567633 A CA 567633A CA 567633 A CA567633 A CA 567633A CA 567633D A CA567633D A CA 567633DA CA 567633 A CA567633 A CA 567633A
- Authority
- CA
- Canada
- Prior art keywords
- ion source
- thermionic ion
- thermionic
- source
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA567633T |
Publications (1)
Publication Number | Publication Date |
---|---|
CA567633A true CA567633A (en) | 1958-12-16 |
Family
ID=35740155
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA567633A Expired CA567633A (en) | Thermionic ion source |
Country Status (1)
Country | Link |
---|---|
CA (1) | CA567633A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3329601A (en) * | 1964-09-15 | 1967-07-04 | Donald M Mattox | Apparatus for coating a cathodically biased substrate from plasma of ionized coatingmaterial |
US3404084A (en) * | 1965-10-20 | 1968-10-01 | Gen Precision Systems Inc | Apparatus for depositing ionized electron beam evaporated material on a negatively biased substrate |
US3428546A (en) * | 1966-09-27 | 1969-02-18 | Atomic Energy Commission | Apparatus for vacuum deposition on a negatively biased substrate |
-
0
- CA CA567633A patent/CA567633A/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3329601A (en) * | 1964-09-15 | 1967-07-04 | Donald M Mattox | Apparatus for coating a cathodically biased substrate from plasma of ionized coatingmaterial |
US3404084A (en) * | 1965-10-20 | 1968-10-01 | Gen Precision Systems Inc | Apparatus for depositing ionized electron beam evaporated material on a negatively biased substrate |
US3428546A (en) * | 1966-09-27 | 1969-02-18 | Atomic Energy Commission | Apparatus for vacuum deposition on a negatively biased substrate |
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