GB866382A - Improvements in and relating to the electrolytic shaping of bodies - Google Patents
Improvements in and relating to the electrolytic shaping of bodiesInfo
- Publication number
- GB866382A GB866382A GB14060/58A GB1406058A GB866382A GB 866382 A GB866382 A GB 866382A GB 14060/58 A GB14060/58 A GB 14060/58A GB 1406058 A GB1406058 A GB 1406058A GB 866382 A GB866382 A GB 866382A
- Authority
- GB
- United Kingdom
- Prior art keywords
- electrolyte
- jet
- wafer
- infra
- semi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007493 shaping process Methods 0.000 title 1
- 239000003792 electrolyte Substances 0.000 abstract 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 abstract 3
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 abstract 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 2
- 239000002253 acid Substances 0.000 abstract 1
- 235000019270 ammonium chloride Nutrition 0.000 abstract 1
- 229910052787 antimony Inorganic materials 0.000 abstract 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 abstract 1
- 229910052785 arsenic Inorganic materials 0.000 abstract 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 229910052732 germanium Inorganic materials 0.000 abstract 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000004048 modification Effects 0.000 abstract 1
- 238000012986 modification Methods 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 235000011118 potassium hydroxide Nutrition 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3063—Electrolytic etching
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
- C25F3/12—Etching of semiconducting materials
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Weting (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US656728A US2913383A (en) | 1957-05-02 | 1957-05-02 | Jet-electrolytic method of configuring bodies |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB866382A true GB866382A (en) | 1961-04-26 |
Family
ID=24634307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB14060/58A Expired GB866382A (en) | 1957-05-02 | 1958-05-02 | Improvements in and relating to the electrolytic shaping of bodies |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US2913383A (cs) |
| BE (1) | BE567337A (cs) |
| FR (1) | FR1206041A (cs) |
| GB (1) | GB866382A (cs) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3039514A (en) * | 1959-01-16 | 1962-06-19 | Philco Corp | Fabrication of semiconductor devices |
| US3109787A (en) * | 1959-07-31 | 1963-11-05 | Hooker Chemical Corp | Production of phosphine |
| US3109795A (en) * | 1960-07-27 | 1963-11-05 | Hooker Chemical Corp | Method of preparing phosphine |
| US3075903A (en) * | 1960-02-23 | 1963-01-29 | Motorola Inc | Method of electrolytically etching a semiconductor element |
| US3196094A (en) * | 1960-06-13 | 1965-07-20 | Ibm | Method of automatically etching an esaki diode |
| US3041258A (en) * | 1960-06-24 | 1962-06-26 | Thomas V Sikina | Method of etching and etching solution for use therewith |
| US3109794A (en) * | 1960-07-27 | 1963-11-05 | Hooker Chemical Corp | Method of preparing phosphine |
| US3109788A (en) * | 1960-07-27 | 1963-11-05 | Hooker Chemical Corp | Electrolytic production of phosphine |
| US3109791A (en) * | 1960-07-27 | 1963-11-05 | Hooker Chemical Corp | Method of preparing phosphine |
| US3109793A (en) * | 1960-07-27 | 1963-11-05 | Hooker Chemical Corp | Method of preparing phosphine |
| US3109792A (en) * | 1960-07-27 | 1963-11-05 | Hooker Chemical Corp | Method of preparing phosphine |
| US3109786A (en) * | 1960-07-27 | 1963-11-05 | Hooker Chemical Corp | Process for the preparation of phosphine |
| US3228862A (en) * | 1960-10-04 | 1966-01-11 | Gen Instrument Corp | Esaki diode manufacturing process, and apparatus |
| US3137645A (en) * | 1961-10-04 | 1964-06-16 | Philco Corp | Jet electrolytic treating apparatus |
| BE623462A (cs) * | 1961-10-12 | |||
| US3959098A (en) * | 1973-03-12 | 1976-05-25 | Bell Telephone Laboratories, Incorporated | Electrolytic etching of III - V compound semiconductors |
| US3928154A (en) * | 1973-04-12 | 1975-12-23 | Trw Inc | Electrochemical radius generation |
| US8764515B2 (en) * | 2012-05-14 | 2014-07-01 | United Technologies Corporation | Component machining method and assembly |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2557823A (en) * | 1946-10-26 | 1951-06-19 | Gen Motors Corp | Method of forming a composite article comprising steel and silver |
| US2755238A (en) * | 1955-03-25 | 1956-07-17 | Sprague Electric Co | Electrolytic etching and oxidizing of aluminum |
-
0
- BE BE567337D patent/BE567337A/xx unknown
-
1957
- 1957-05-02 US US656728A patent/US2913383A/en not_active Expired - Lifetime
-
1958
- 1958-05-02 FR FR1206041D patent/FR1206041A/fr not_active Expired
- 1958-05-02 GB GB14060/58A patent/GB866382A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US2913383A (en) | 1959-11-17 |
| BE567337A (cs) | |
| FR1206041A (fr) | 1960-02-05 |
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