GB859515A - Improvements in vacuum pumps of the getter type - Google Patents
Improvements in vacuum pumps of the getter typeInfo
- Publication number
- GB859515A GB859515A GB21074/58A GB2107458A GB859515A GB 859515 A GB859515 A GB 859515A GB 21074/58 A GB21074/58 A GB 21074/58A GB 2107458 A GB2107458 A GB 2107458A GB 859515 A GB859515 A GB 859515A
- Authority
- GB
- United Kingdom
- Prior art keywords
- wire
- chamber
- getter
- crucible
- vaporized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005247 gettering Methods 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- 229910002804 graphite Inorganic materials 0.000 abstract 1
- 239000010439 graphite Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
859,515. Discharge apparatus. COMMISSARIAT A L'ENERGIE ATOMIQUE. July 1, 1958 [July 12, 1957], No. 21074/58. Class 39(1). [Also in Group XXIV] In a vacuum pump of the gettering type, in which successive portions of a wire of gettering material are vaporized by heat in a vacuum chamber, the mechanism for feeding the wire forward is located outside the chamber. In Fig. 1, it is located in a casing 2 attached below the bottom plate 1 of the vacuum chamber, and in communication with it via a passage 5. The getter wire passes through this passage into the chamber, through guide tubes 18, 20, 23, and is led through a graphite nozzle 25 to a crucible 60 where it is vaporized. The crucible may be heated by electron bombardment from a filament 63. The wire is unrolled from a spool 9 and passes between serrated driving rollers 11, 12. The rollers are operated by a rod passing out of the casing through a gas-tight bellows, and which is given a reciprocating movement by a drive at its farther end. By means of a ratchet arrangement (see Group XXIV) the reciprocating movement is changed into a step-by-step feeding movement of the getter wire.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1099689X | 1957-07-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB859515A true GB859515A (en) | 1961-01-25 |
Family
ID=9619939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB21074/58A Expired GB859515A (en) | 1957-07-12 | 1958-07-01 | Improvements in vacuum pumps of the getter type |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3045642A (en) |
| BE (1) | BE568835A (en) |
| CH (1) | CH346618A (en) |
| DE (1) | DE1099689B (en) |
| FR (1) | FR1178844A (en) |
| GB (1) | GB859515A (en) |
| LU (1) | LU36203A1 (en) |
| NL (1) | NL268802A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3336898A (en) * | 1962-11-16 | 1967-08-22 | Burroughs Corp | Vapor deposition apparatus |
| US3407783A (en) * | 1964-08-31 | 1968-10-29 | Emil R. Capita | Vapor deposition apparatus |
| US3690291A (en) * | 1971-04-28 | 1972-09-12 | Nasa | Deposition apparatus |
| EP2633902B1 (en) * | 2010-10-29 | 2019-07-24 | Ulvac, Inc. | Vacuum freeze drying apparatus and frozen particle manufacturing method |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE764927C (en) * | 1939-02-22 | 1951-08-06 | Bosch Gmbh Robert | Process for evaporation in a vacuum |
| GB551757A (en) * | 1941-09-03 | 1943-03-09 | Paul Alexander | Improvements in or relating to the deposition of metals |
| BE463457A (en) * | 1941-09-16 | |||
| DE878884C (en) * | 1944-02-10 | 1953-06-08 | Bosch Gmbh Robert | Device for introducing wires into evacuated rooms |
| US2554902A (en) * | 1948-03-25 | 1951-05-29 | Nat Res Corp | Thermionic discharge device control |
| GB654228A (en) * | 1948-11-29 | 1951-06-13 | Edwards & Co London Ltd W | Improvements in or relating to vacuum evaporation of metals |
| FR1051247A (en) * | 1950-09-06 | 1954-01-14 | Pollopas Patents Ltd | Improvements to methods and devices for coating a support made of a non-magnetic material with a magnetizable metallic layer |
| US2665229A (en) * | 1951-11-05 | 1954-01-05 | Nat Res Corp | Method of coating by vapor deposition |
| US2664853A (en) * | 1952-05-12 | 1954-01-05 | Nat Res Corp | Apparatus for vapor coating |
| US2812270A (en) * | 1954-01-28 | 1957-11-05 | Continental Can Co | Method and apparatus for depositing metal coatings on metal bases |
-
0
- BE BE568835D patent/BE568835A/xx unknown
- NL NL268802D patent/NL268802A/xx unknown
- LU LU36203D patent/LU36203A1/xx unknown
-
1957
- 1957-07-12 FR FR1178844D patent/FR1178844A/en not_active Expired
-
1958
- 1958-06-23 CH CH346618D patent/CH346618A/en unknown
- 1958-07-01 GB GB21074/58A patent/GB859515A/en not_active Expired
- 1958-07-09 US US747475A patent/US3045642A/en not_active Expired - Lifetime
- 1958-07-11 DE DEC17175A patent/DE1099689B/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE1099689B (en) | 1961-02-16 |
| BE568835A (en) | |
| CH346618A (en) | 1960-05-31 |
| US3045642A (en) | 1962-07-24 |
| NL268802A (en) | |
| LU36203A1 (en) | |
| FR1178844A (en) | 1959-05-15 |
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