US2980317A - Vacuum device - Google Patents
Vacuum device Download PDFInfo
- Publication number
- US2980317A US2980317A US728175A US72817558A US2980317A US 2980317 A US2980317 A US 2980317A US 728175 A US728175 A US 728175A US 72817558 A US72817558 A US 72817558A US 2980317 A US2980317 A US 2980317A
- Authority
- US
- United States
- Prior art keywords
- getter
- cathode
- filament
- vacuum device
- helix
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- D—TEXTILES; PAPER
- D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
- D01G—PRELIMINARY TREATMENT OF FIBRES, e.g. FOR SPINNING
- D01G15/00—Carding machines or accessories; Card clothing; Burr-crushing or removing arrangements associated with carding or other preliminary-treatment machines
- D01G15/94—Burr-crushing or removing arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
- H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
Definitions
- a glass vacuum vessel 1 an incandescent filament cathode 2 is mounted, said cathode being connected to a heating battery 23 via ducts 21 and 22.
- a getter helix 3 Surrounding the incandescent cathode 2 there is a getter helix 3, which is built self-supporting and can be heated directly via ducts 31 and 32 by the current derived from a second heating battery 33.
- This getter helix is located opposite cathode 2 and is maintained at a positive potential of 200 to 300 volts by means of a voltage source 34 and serves as electron collector for the ionization arrangement.
- getter material 4 in wire or strip form is placed about the getter wire.
- the getter material and the getter metal can be heated at once. Moreover, this heating serves for one-time or step-wise vaporization of the getter metal.
- a getter metal film 5 condensed on the glass wall 1 receives from the current source 52 a negative potential of 30 to volts relative to the cathode 2 via the duct 51.
- This getter film 5 serves as the ion collector for the ionization device.
- a magnetic field of 300 to 500 gauss can be provided parallel to the cathode with the aid of coil 6.
- the pumping occurs in such a manner that, after the pre-evacuation of the receptacle and pump and the outgassing of the getter and the getter metal, the getter metal is vaporized,
- a vacuum pumping device comprising a vacuumtight container, a getter coating on the inner wall of said container, an ofitake duct joined near one end of said container, a thermionically-emissive filament supported by and positioned Within said container, means to supply current to said filament, potential means for maintaining said getter coating on the wall of said container at a negative potential with respect to said filament, a getter helix having spaced turns surrounding said filament and carrying a getter material, and means for maintaining said getter helix at a positive potential with respect to said filament, whereby said getter helix serves both as a getter material carrier and source as well as an electron collector.
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
April 18, 1961 e. REICH 2,980,317
VACUUM DEVICE Filed April 14, 1958 United States Patent VACUUM DEVICE Giinter Reich, Koln-Zollstock, Germany, assignor to E. Leyboids Nachfolger, Koln-Bayentai, Germany Filed Apr. 14, 1958, Ser. No. 728,175
1 Claim. (Cl. 230-69) It is known that gases are absorbed at very low pressures while at the same time with an electric discharge or in combination with an ion source metals or nonmetals are vaporized or absorptive clean metallic surfaces are produced (getter efiect). Usually for this a special ion source and, separately from this, a vapor source are provided. But it has already been proposed to generate discharges at cold cathodes which have special capacity for absorbing gases, for example, zirconium cathodes in discharge systems of the Penning vacuum gauge type.
Accordingly, it is an object of the present invention to provide a pumping device which permits to structurally combine the ion source with the vapor source and at the same time permits operation with an incandescent cath-v ode, which at very low pressures ofiers advantages as opposed to the cold cathode. Thus, as will be seen in the following description of the appended drawing, it is not necessary for the gas gettering to have a vapor source continuously in activity but it is sufificient from time to time either to bring a fresh charge to the vessel walls by vaporization or to renew the active surface by vaporization.
'The drawing showing schematically a longitudinal section through an embodiment according to this invention will serve to explain its mode of operation. In a glass vacuum vessel 1 an incandescent filament cathode 2 is mounted, said cathode being connected to a heating battery 23 via ducts 21 and 22. Surrounding the incandescent cathode 2 there is a getter helix 3, which is built self-supporting and can be heated directly via ducts 31 and 32 by the current derived from a second heating battery 33. This getter helix is located opposite cathode 2 and is maintained at a positive potential of 200 to 300 volts by means of a voltage source 34 and serves as electron collector for the ionization arrangement. In a portion of the getter coils some getter material 4 in wire or strip form is placed about the getter wire. By direct current flow through the getter wire the getter material and the getter metal can be heated at once. Moreover, this heating serves for one-time or step-wise vaporization of the getter metal.
A getter metal film 5 condensed on the glass wall 1 receives from the current source 52 a negative potential of 30 to volts relative to the cathode 2 via the duct 51. This getter film 5 serves as the ion collector for the ionization device.
To increase the electron path in the ionization device, a magnetic field of 300 to 500 gauss can be provided parallel to the cathode with the aid of coil 6.
At 7 is connected the chamber to be evacuated.
The pumping occurs in such a manner that, after the pre-evacuation of the receptacle and pump and the outgassing of the getter and the getter metal, the getter metal is vaporized,
With the set-up according to the invention a very low pressure can be produced in the fore-evacuated vessel and after closing can be maintained directly for a very long period.
What is claimed:
A vacuum pumping device comprising a vacuumtight container, a getter coating on the inner wall of said container, an ofitake duct joined near one end of said container, a thermionically-emissive filament supported by and positioned Within said container, means to supply current to said filament, potential means for maintaining said getter coating on the wall of said container at a negative potential with respect to said filament, a getter helix having spaced turns surrounding said filament and carrying a getter material, and means for maintaining said getter helix at a positive potential with respect to said filament, whereby said getter helix serves both as a getter material carrier and source as well as an electron collector.
References Cited in the file of this patent UNITED STATES PATENTS 2,636,664 Hertzler Apr. 28, 1953 2,726,805 Lawrence Dec. 13, 1955 2,727,167 Alpert Dec. 13, 1955 2,755,014 Westendorf July 17, 1956 2,796,555 Connor June 18, 1957
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US728175A US2980317A (en) | 1957-02-27 | 1958-04-14 | Vacuum device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE358187X | 1957-02-27 | ||
US728175A US2980317A (en) | 1957-02-27 | 1958-04-14 | Vacuum device |
Publications (1)
Publication Number | Publication Date |
---|---|
US2980317A true US2980317A (en) | 1961-04-18 |
Family
ID=6290768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US728175A Expired - Lifetime US2980317A (en) | 1957-02-27 | 1958-04-14 | Vacuum device |
Country Status (4)
Country | Link |
---|---|
US (1) | US2980317A (en) |
CH (1) | CH358187A (en) |
DE (1) | DE1065561B (en) |
GB (1) | GB862892A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3173048A (en) * | 1961-03-06 | 1965-03-09 | Varian Associates | Ion vacuum pump for magnetrons controlled for leakage of magnetron magnet |
US3339106A (en) * | 1965-05-28 | 1967-08-29 | Canadian Patents Dev | Ionization vacuum pump of the orbitron type having a porous annular grid electrode |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL256013A (en) * | 1959-09-25 | |||
FR1281403A (en) * | 1960-12-01 | 1962-01-12 | Thomson Houston Comp Francaise | Advanced Evaporative Ionization Type Vacuum Pump System |
DE102009042417B4 (en) * | 2009-07-16 | 2011-11-24 | Vacom Steuerungsbau Und Service Gmbh | Orbitron-ion getter |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2636664A (en) * | 1949-01-28 | 1953-04-28 | Hertzler Elmer Afton | High vacuum pumping method, apparatus, and techniques |
US2727167A (en) * | 1952-04-18 | 1955-12-13 | Westinghouse Electric Corp | Ion pump |
US2726805A (en) * | 1953-01-29 | 1955-12-13 | Ernest O Lawrence | Ion pump |
US2755014A (en) * | 1953-04-24 | 1956-07-17 | Gen Electric | Ionic vacuum pump device |
US2796555A (en) * | 1954-06-29 | 1957-06-18 | High Voltage Engineering Corp | High-vacuum pump |
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0
- DE DENDAT1065561D patent/DE1065561B/de active Pending
-
1958
- 1958-02-21 CH CH358187D patent/CH358187A/en unknown
- 1958-02-27 GB GB6431/58A patent/GB862892A/en not_active Expired
- 1958-04-14 US US728175A patent/US2980317A/en not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2636664A (en) * | 1949-01-28 | 1953-04-28 | Hertzler Elmer Afton | High vacuum pumping method, apparatus, and techniques |
US2727167A (en) * | 1952-04-18 | 1955-12-13 | Westinghouse Electric Corp | Ion pump |
US2726805A (en) * | 1953-01-29 | 1955-12-13 | Ernest O Lawrence | Ion pump |
US2755014A (en) * | 1953-04-24 | 1956-07-17 | Gen Electric | Ionic vacuum pump device |
US2796555A (en) * | 1954-06-29 | 1957-06-18 | High Voltage Engineering Corp | High-vacuum pump |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3173048A (en) * | 1961-03-06 | 1965-03-09 | Varian Associates | Ion vacuum pump for magnetrons controlled for leakage of magnetron magnet |
US3339106A (en) * | 1965-05-28 | 1967-08-29 | Canadian Patents Dev | Ionization vacuum pump of the orbitron type having a porous annular grid electrode |
Also Published As
Publication number | Publication date |
---|---|
GB862892A (en) | 1961-03-15 |
DE1065561B (en) | |
CH358187A (en) | 1961-11-15 |
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