GB1237028A - Ion source - Google Patents

Ion source

Info

Publication number
GB1237028A
GB1237028A GB21453/69A GB2145369A GB1237028A GB 1237028 A GB1237028 A GB 1237028A GB 21453/69 A GB21453/69 A GB 21453/69A GB 2145369 A GB2145369 A GB 2145369A GB 1237028 A GB1237028 A GB 1237028A
Authority
GB
United Kingdom
Prior art keywords
ion
chamber
source
wall
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB21453/69A
Inventor
Derek Andrew
Lawrence Graham Pittaway
Thomas Chisholm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Components Ltd
Original Assignee
Mullard Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mullard Ltd filed Critical Mullard Ltd
Priority to GB21453/69A priority Critical patent/GB1237028A/en
Priority to DE19702018507 priority patent/DE2018507C3/en
Priority to US31147A priority patent/US3619684A/en
Priority to CH620170A priority patent/CH505461A/en
Priority to FR7015444A priority patent/FR2040328A1/fr
Publication of GB1237028A publication Critical patent/GB1237028A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers

Abstract

1,237,028. Ion sources; ionization manometers. MULLARD Ltd. 9 April, 1970 [28 April, 1969], No. 21453/69. Heading H1D. An ion source comprising a chamber 1 having a wall portion 4 substantially impervious to ions except via an ion exit aperture 5 and other wall portions 2, 3 formed at least in part so that electrons can pass freely therethrough, a source of electrons 8, an ion extractor comprising a mesh 10, arranged close to said aperture 5, to which a negative potential is applied, and an ion accelerator electrode 12, is so arranged that the potential in an equipotential boundary region formed in the chamber 2, 3, 4 differs from the chamber wall potential by less than the ion extraction p.d. so that ions formed in the chamber are drawn into a central region at least until a positive ion space charge builds up, to enable a relatively large ion current to be drawn through said aperture 5 by the application of a relatively small ion extraction p.d. As shown, the wall 2 of the chamber is a helical wire mesh wound on supporting wires 15, and wall 3 is a woven wire mesh. A cylindrical metal reflector 6 surrounding the grid 2 has a wire mesh screen 7 at one end. A further screen 9 is located beyond the filament 8. The electrodes 1, 6, 8, 9, 11 and 12 which are supported by three glass rods 14 (two only being shown), may be made of any refractory conducting material, e.g. W, Mo, Ni, or stainless steel. Evacuation is by way of an outlet 21 and gas is introduced via an inlet 22 and an aperture 23 in reflector 6. A further mesh (30, Fig. 2, not shown) may be provided between meshes 10 and 13. In a further alternative embodiment (Fig. 6, not shown) two filaments are arranged on either side of the chamber 1. Both filaments are energized to out gas metal parts of the apparatus, but only one is used in operation of the ion source. This source is mounted on a flange ready for attachment to other apparatus, and is thus not enclosed. The source may be used in a mass spectrometer, for ion bombardment, or as an ionization gauge.
GB21453/69A 1969-04-28 1969-04-28 Ion source Expired GB1237028A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB21453/69A GB1237028A (en) 1969-04-28 1969-04-28 Ion source
DE19702018507 DE2018507C3 (en) 1969-04-28 1970-04-17 Ion source
US31147A US3619684A (en) 1969-04-28 1970-04-23 Ion source
CH620170A CH505461A (en) 1969-04-28 1970-04-24 Ion source
FR7015444A FR2040328A1 (en) 1969-04-28 1970-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB21453/69A GB1237028A (en) 1969-04-28 1969-04-28 Ion source

Publications (1)

Publication Number Publication Date
GB1237028A true GB1237028A (en) 1971-06-30

Family

ID=10163206

Family Applications (1)

Application Number Title Priority Date Filing Date
GB21453/69A Expired GB1237028A (en) 1969-04-28 1969-04-28 Ion source

Country Status (4)

Country Link
US (1) US3619684A (en)
CH (1) CH505461A (en)
FR (1) FR2040328A1 (en)
GB (1) GB1237028A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2289570A (en) * 1994-05-17 1995-11-22 Fisons Plc Mass spectrometer and electron impact ion source therefor

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1437174A (en) * 1972-05-26 1976-05-26 Mullard Ltd Ion gauges
US3760225A (en) * 1972-06-06 1973-09-18 Atomic Energy Commission High current plasma source
US3930163A (en) * 1974-03-22 1975-12-30 Varian Associates Ion beam apparatus with separately replaceable elements
US4689574A (en) * 1983-03-04 1987-08-25 Uti Instrument Co. Electron impact ion source for trace analysis
US4579144A (en) * 1983-03-04 1986-04-01 Uti Instrument Company Electron impact ion source for trace analysis
JPS60202649A (en) * 1984-03-26 1985-10-14 Seiko Instr & Electronics Ltd Ion source of double grid anode electron impact type
US4755722A (en) * 1984-04-02 1988-07-05 Rpc Industries Ion plasma electron gun
US4742232A (en) * 1987-03-03 1988-05-03 United States Of America As Represented By The Adminstrator, National Aeronautics And Space Administration Ion generator and ion application system
GB8820359D0 (en) * 1988-08-26 1988-09-28 Atomic Energy Authority Uk Charged particle grid
US5302827A (en) * 1993-05-11 1994-04-12 Mks Instruments, Inc. Quadrupole mass spectrometer
US6300637B1 (en) * 1998-10-16 2001-10-09 Siemens Energy & Automation, Inc. Increased ionization efficiency in a mass spectrometer using electron beam trajectory modification
DE19949978A1 (en) * 1999-10-08 2001-05-10 Univ Dresden Tech Electron impact ion source
US8674321B2 (en) * 2012-02-28 2014-03-18 Tiza Lab, L.L.C. Microplasma ion source for focused ion beam applications
US8822912B2 (en) 2012-12-19 2014-09-02 Schlumberger Technology Corporation Ion source having increased electron path length
US8779351B2 (en) * 2012-12-19 2014-07-15 Schlumberger Technology Corporation Ion source employing secondary electron generation
US9799504B2 (en) * 2015-12-11 2017-10-24 Horiba Stec, Co., Ltd. Ion source, quadrupole mass spectrometer and residual gas analyzing method
CN109406689B (en) * 2018-10-22 2023-05-12 南京国科精准医学科技有限公司 Ion permeation gas molecular separation method and device
CN112516797B (en) * 2020-12-01 2022-09-16 中国科学院近代物理研究所 Electrostatic focusing and accelerating system and method for isotope separation system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB976664A (en) * 1962-02-20 1964-12-02 Atomic Energy Authority Uk Improvements in or relating to ion sources

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2289570A (en) * 1994-05-17 1995-11-22 Fisons Plc Mass spectrometer and electron impact ion source therefor
US5561292A (en) * 1994-05-17 1996-10-01 Fisons Plc Mass spectrometer and electron impact ion source thereof
GB2289570B (en) * 1994-05-17 1998-06-24 Fisons Plc Mass spectrometer and electron impact ion source therefor

Also Published As

Publication number Publication date
US3619684A (en) 1971-11-09
CH505461A (en) 1971-03-31
DE2018507A1 (en) 1970-12-10
DE2018507B2 (en) 1976-11-04
FR2040328A1 (en) 1971-01-22

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