GB1437174A - Ion gauges - Google Patents
Ion gaugesInfo
- Publication number
- GB1437174A GB1437174A GB2501772A GB2501772A GB1437174A GB 1437174 A GB1437174 A GB 1437174A GB 2501772 A GB2501772 A GB 2501772A GB 2501772 A GB2501772 A GB 2501772A GB 1437174 A GB1437174 A GB 1437174A
- Authority
- GB
- United Kingdom
- Prior art keywords
- collector
- electrode
- rays
- ion
- ionization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
Abstract
1437174 lonization monometers MULLARD Ltd 20 July 1973 [26 May 1972] 25017/72 Heading H1D An ionization manometer comprises cathodes 1, 2, an ionization region 13 defined by perforated walls 4, 5 and an end wall 6 opaque to soft X-rays and having an ion exit aperture 7, an elongated ion collector 10 and a reflector electrode 31 biased to cause the ions to converge on the collector 10 and so formed that most X- rays formed in the ionisation region 13 are multiply reflected between the reflector electrode and a truncated conical member 35 attached thereto and therefore the radiation is attenuated before it can reach the collector electrode 10. The rear of the collector and its lead are further shielded by an insulating bead 36 and a shield 37. An extractor electrode 39 is provided between aperture 7 and the collector 10. Reference has been directed by the Comptroller to Specification 1,173,354.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2501772A GB1437174A (en) | 1972-05-26 | 1972-05-26 | Ion gauges |
US363823A US3906237A (en) | 1972-05-26 | 1973-05-25 | Ion gauges |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2501772A GB1437174A (en) | 1972-05-26 | 1972-05-26 | Ion gauges |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1437174A true GB1437174A (en) | 1976-05-26 |
Family
ID=10220876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2501772A Expired GB1437174A (en) | 1972-05-26 | 1972-05-26 | Ion gauges |
Country Status (2)
Country | Link |
---|---|
US (1) | US3906237A (en) |
GB (1) | GB1437174A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4338535A1 (en) * | 1993-11-11 | 1995-05-18 | Leybold Ag | Extractor ionization vacuum meter |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4307323A (en) * | 1980-04-04 | 1981-12-22 | Granville-Phillips Company | Vacuum gauge |
US5491331A (en) * | 1994-04-25 | 1996-02-13 | Pilot Industries, Inc. | Soft x-ray imaging device |
US7428848B2 (en) * | 2005-08-09 | 2008-09-30 | Cfd Research Corporation | Electrostatic sampler and method |
US8304033B2 (en) * | 2009-02-04 | 2012-11-06 | Tel Epion Inc. | Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles |
US20100243913A1 (en) * | 2009-03-31 | 2010-09-30 | Tel Epion Inc. | Pre-aligned nozzle/skimmer |
WO2015114559A1 (en) * | 2014-01-31 | 2015-08-06 | Nanotech Analysis S.R.L.S. | Miniaturized device for measurements of very low pressure and of gas concentrations |
US9540725B2 (en) | 2014-05-14 | 2017-01-10 | Tel Epion Inc. | Method and apparatus for beam deflection in a gas cluster ion beam system |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2759106A (en) * | 1951-05-25 | 1956-08-14 | Wolter Hans | Optical image-forming mirror system providing for grazing incidence of rays |
US2819404A (en) * | 1951-05-25 | 1958-01-07 | Herrnring Gunther | Optical image-forming mirror systems having aspherical reflecting surfaces |
US2766385A (en) * | 1952-09-11 | 1956-10-09 | Herrnring Gunther | Optical image-forming plural reflecting mirror systems |
DE1130619B (en) * | 1960-06-03 | 1962-05-30 | Leybolds Nachfolger E | Ionization manometer system |
NL284213A (en) * | 1961-10-11 | |||
US3292078A (en) * | 1961-12-08 | 1966-12-13 | Gca Corp | Vacuum gauge having an X-ray trap and a shield |
US3341727A (en) * | 1965-11-03 | 1967-09-12 | Univ Illinois | Ionization gauge having a photocurrent suppressor electrode |
US3320455A (en) * | 1966-04-22 | 1967-05-16 | Gen Electric | Ionization vacuum gauge having x-ray shielding means |
DE1648650A1 (en) * | 1966-05-17 | 1971-07-22 | Politechnika Warszawska | Ionization vacuum meter for lowest pressures |
US3465189A (en) * | 1966-10-13 | 1969-09-02 | Canadian Patents Dev | Ionization vacuum gauge with x-ray shielding and ion reflecting means |
US3466484A (en) * | 1967-04-27 | 1969-09-09 | Nasa | Ionization vacuum gauge with all but the end of the ion collector shielded |
US3509418A (en) * | 1968-05-03 | 1970-04-28 | Philips Corp | Ionization manometer including means for modulation of terminal grids |
GB1237028A (en) * | 1969-04-28 | 1971-06-30 | Mullard Ltd | Ion source |
GB1336126A (en) * | 1969-10-29 | 1973-11-07 | Mullard Ltd | Ion gauges |
-
1972
- 1972-05-26 GB GB2501772A patent/GB1437174A/en not_active Expired
-
1973
- 1973-05-25 US US363823A patent/US3906237A/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4338535A1 (en) * | 1993-11-11 | 1995-05-18 | Leybold Ag | Extractor ionization vacuum meter |
DE4338535C2 (en) * | 1993-11-11 | 2003-06-18 | Unaxis Deutschland Holding | Extractor ion gauge |
Also Published As
Publication number | Publication date |
---|---|
US3906237A (en) | 1975-09-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PLNP | Patent lapsed through nonpayment of renewal fees |