GB854989A - Improvements in and connected with the carrying out of processes using electrical glow discharger - Google Patents

Improvements in and connected with the carrying out of processes using electrical glow discharger

Info

Publication number
GB854989A
GB854989A GB8187/57A GB818757A GB854989A GB 854989 A GB854989 A GB 854989A GB 8187/57 A GB8187/57 A GB 8187/57A GB 818757 A GB818757 A GB 818757A GB 854989 A GB854989 A GB 854989A
Authority
GB
United Kingdom
Prior art keywords
vessel
discharge
lead
capacity
articles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8187/57A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektrophysikalische Anstalt Bernhard Berghaus
Original Assignee
Elektrophysikalische Anstalt Bernhard Berghaus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH3666256A external-priority patent/CH383519A/de
Application filed by Elektrophysikalische Anstalt Bernhard Berghaus filed Critical Elektrophysikalische Anstalt Bernhard Berghaus
Publication of GB854989A publication Critical patent/GB854989A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
GB8187/57A 1956-03-12 1957-03-12 Improvements in and connected with the carrying out of processes using electrical glow discharger Expired GB854989A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH854989X 1956-03-12
CH3666256A CH383519A (de) 1956-08-20 1956-08-20 Verfahren zum Betrieb einer elektrischen Glimmentladung und Vorrichtung zur Durchführung des Verfahrens

Publications (1)

Publication Number Publication Date
GB854989A true GB854989A (en) 1960-11-23

Family

ID=25737315

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8187/57A Expired GB854989A (en) 1956-03-12 1957-03-12 Improvements in and connected with the carrying out of processes using electrical glow discharger

Country Status (5)

Country Link
BE (1) BE555721A (OSRAM)
CH (1) CH355537A (OSRAM)
DE (1) DE1232433B (OSRAM)
FR (1) FR71424E (OSRAM)
GB (1) GB854989A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2170350A (en) * 1984-12-13 1986-07-30 Stc Plc Plasma reactor vessel and process
US4749589A (en) * 1984-12-13 1988-06-07 Stc Plc Method of surface treatment

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2619814C2 (de) * 1976-05-05 1978-02-16 Ionit Anstalt Bernhard Berghaus, Vaduz Gestell und Rezipient zum Tragen zu behandelnder Werkstücke
SE441562B (sv) * 1977-03-28 1985-10-14 Mitsubishi Electric Corp Anordning for uppvermning medelst glimurladdning

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2170350A (en) * 1984-12-13 1986-07-30 Stc Plc Plasma reactor vessel and process
US4749589A (en) * 1984-12-13 1988-06-07 Stc Plc Method of surface treatment

Also Published As

Publication number Publication date
FR71424E (fr) 1960-01-04
DE1232433B (de) 1967-01-12
CH355537A (de) 1961-07-15
BE555721A (OSRAM)

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