GB815070A - Improvements in or relating to vacuum pumping apparatus - Google Patents

Improvements in or relating to vacuum pumping apparatus

Info

Publication number
GB815070A
GB815070A GB253056A GB253056A GB815070A GB 815070 A GB815070 A GB 815070A GB 253056 A GB253056 A GB 253056A GB 253056 A GB253056 A GB 253056A GB 815070 A GB815070 A GB 815070A
Authority
GB
United Kingdom
Prior art keywords
pump
process chamber
container
pumps
flash
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB253056A
Inventor
Arthur Stephen Dennis Barrett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards High Vacuum Ltd
Original Assignee
Edwards High Vacuum Ltd
Filing date
Publication date
Application filed by Edwards High Vacuum Ltd filed Critical Edwards High Vacuum Ltd
Publication of GB815070A publication Critical patent/GB815070A/en
Expired legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04FPUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00Diffusion pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

815,070. Vacuum pumping apparatus. EDWARDS HIGH VACUUM Ltd. Jan. 22, 1957 [Jan. 25, 1956], No. 2530/56. Class 71. A vacuum pumping apparatus comprises a container divided into a process chamber 20 to be evacuated, and a chamber 21 housing flash boiler operated pumps, by a partition 23 having a large throat aperture 24. A cooling tube 22 surrounds the wall of that part of the container housing the pumps to provide a condensing surface for the pumps and the throat 24 may be outwardly flared as at 25 to form an annular pumping space, the flared portion 25 also being cooled. An outlet duct 29 leads from the pumping space to a further flash boiler operated pump 30 which is connected by a pipe 31 to a suitable Fore-pump. The flash boiler operated pumps have flash boilers 27 and vapour nozzles 26 and may be of the type described in Specification 586,516. Such an arrangement of apparatus provides direct access between the process chamber and pump without the normal duct, traps, valves &c., between these parts and when it is required to remove or replace articles in the process chamber it is merely necessary to interrupt the operation of the flash boilers. In a modified form the pump is positioned below the process chamber communication between the two being by an annular aperture. In such an arrangement the further pump 30 may be positioned in the container. The Provisional Specification describes also an arrangement for housing a diffusion pump in the container with a valve plate which may be moved across the aperture between the two chambers. The diffusion pump may be of the type described in Specification 806,788.
GB253056A 1956-01-25 Improvements in or relating to vacuum pumping apparatus Expired GB815070A (en)

Publications (1)

Publication Number Publication Date
GB815070A true GB815070A (en) 1959-06-17

Family

ID=1627348

Family Applications (1)

Application Number Title Priority Date Filing Date
GB253056A Expired GB815070A (en) 1956-01-25 Improvements in or relating to vacuum pumping apparatus

Country Status (1)

Country Link
GB (1) GB815070A (en)

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