GB2536167B - Surface shape measurement apparatus and machine tool including the same, and surface shape measurement method - Google Patents

Surface shape measurement apparatus and machine tool including the same, and surface shape measurement method

Info

Publication number
GB2536167B
GB2536167B GB1611354.0A GB201611354A GB2536167B GB 2536167 B GB2536167 B GB 2536167B GB 201611354 A GB201611354 A GB 201611354A GB 2536167 B GB2536167 B GB 2536167B
Authority
GB
United Kingdom
Prior art keywords
surface shape
shape measurement
machine tool
same
tool including
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB1611354.0A
Other languages
English (en)
Other versions
GB201611354D0 (en
GB2536167A (en
Inventor
Ono Katsuhiko
Nishikawa Shizuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DMG Mori Co Ltd
Original Assignee
DMG Mori Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DMG Mori Co Ltd filed Critical DMG Mori Co Ltd
Publication of GB201611354D0 publication Critical patent/GB201611354D0/en
Publication of GB2536167A publication Critical patent/GB2536167A/en
Application granted granted Critical
Publication of GB2536167B publication Critical patent/GB2536167B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/2452—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring features or for detecting a condition of machine parts, tools or workpieces
    • B23Q17/2471—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring features or for detecting a condition of machine parts, tools or workpieces of workpieces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
GB1611354.0A 2014-01-17 2014-10-31 Surface shape measurement apparatus and machine tool including the same, and surface shape measurement method Expired - Fee Related GB2536167B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014006899A JP5813143B2 (ja) 2014-01-17 2014-01-17 表面形状測定装置およびそれを備えた工作機械
PCT/JP2014/079053 WO2015107751A1 (ja) 2014-01-17 2014-10-31 表面形状測定装置およびそれを備えた工作機械ならびに表面形状測定方法

Publications (3)

Publication Number Publication Date
GB201611354D0 GB201611354D0 (en) 2016-08-17
GB2536167A GB2536167A (en) 2016-09-07
GB2536167B true GB2536167B (en) 2018-08-15

Family

ID=53542655

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1611354.0A Expired - Fee Related GB2536167B (en) 2014-01-17 2014-10-31 Surface shape measurement apparatus and machine tool including the same, and surface shape measurement method

Country Status (4)

Country Link
JP (1) JP5813143B2 (ja)
DE (1) DE112014006201T5 (ja)
GB (1) GB2536167B (ja)
WO (1) WO2015107751A1 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2017183181A1 (ja) * 2016-04-22 2019-02-28 オリンパス株式会社 三次元形状測定装置
JP6937125B2 (ja) * 2017-01-26 2021-09-22 株式会社ニューフレアテクノロジー ステージ機構の位置補正方法及び荷電粒子ビーム描画装置
EP3450936A1 (en) 2017-09-05 2019-03-06 Renishaw PLC Optical apparatus and method for assessing the beam profile of a non-contact tool setting apparatus
JP6973203B2 (ja) * 2018-03-14 2021-11-24 Ｊｆｅエンジニアリング株式会社 異常検出装置、異常検出システム、および異常検出方法
JP6867420B2 (ja) * 2019-01-21 2021-04-28 ファナック株式会社 工作機械、管理システムおよび工具劣化検出方法
JP6708917B1 (ja) 2020-02-05 2020-06-10 リンクウィズ株式会社 形状検出方法、形状検出システム、プログラム
JP6923097B1 (ja) * 2021-03-03 2021-08-18 オムロン株式会社 ワーク形状計測装置、ワーク形状計測システム、ワーク形状計測方法およびワーク形状計測プログラム
CN114061468A (zh) * 2021-12-16 2022-02-18 大合智能包装科技(广州)有限公司 一种包装尺寸自动测量站
JP7411132B1 (ja) 2023-05-01 2024-01-10 Dmg森精機株式会社 ワーク形状測定方法、及びワーク形状測定装置。
CN118129055B (zh) * 2024-04-30 2024-08-09 成都飞机工业（集团）有限责任公司 一种用于航空零部件轮廓的线激光扫描装置及扫描方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH028723A (ja) * 1988-06-27 1990-01-12 Shindengen Electric Mfg Co Ltd 圧力検出装置
US20080137071A1 (en) * 2006-12-12 2008-06-12 Hong Kong Applied Science And Technology Research Institute Co. Ltd. Optical displacement sensor and distance measuring apparatus
US20090195790A1 (en) * 2005-09-02 2009-08-06 Neptec Imaging system and method
JP2011020233A (ja) * 2009-07-17 2011-02-03 Kyoto Univ 機上測定方法及び測定装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0213807A (ja) * 1988-06-30 1990-01-18 Juki Corp 位置検出素子による高さ検出方法
JP2943498B2 (ja) * 1992-04-22 1999-08-30 日本電気株式会社 走査型レーザ変位計
JPH08105719A (ja) * 1994-10-04 1996-04-23 Hitachi Denshi Ltd 複数点の変位計を用いたバンプ形状検査装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH028723A (ja) * 1988-06-27 1990-01-12 Shindengen Electric Mfg Co Ltd 圧力検出装置
US20090195790A1 (en) * 2005-09-02 2009-08-06 Neptec Imaging system and method
US20080137071A1 (en) * 2006-12-12 2008-06-12 Hong Kong Applied Science And Technology Research Institute Co. Ltd. Optical displacement sensor and distance measuring apparatus
JP2011020233A (ja) * 2009-07-17 2011-02-03 Kyoto Univ 機上測定方法及び測定装置

Also Published As

Publication number Publication date
GB201611354D0 (en) 2016-08-17
GB2536167A (en) 2016-09-07
JP2015135276A (ja) 2015-07-27
DE112014006201T5 (de) 2016-11-10
WO2015107751A1 (ja) 2015-07-23
JP5813143B2 (ja) 2015-11-17

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20181115