GB2161285B - Method of exposing a semiconductor wafer to light from a mercury-vapor lamp - Google Patents
Method of exposing a semiconductor wafer to light from a mercury-vapor lampInfo
- Publication number
- GB2161285B GB2161285B GB08506124A GB8506124A GB2161285B GB 2161285 B GB2161285 B GB 2161285B GB 08506124 A GB08506124 A GB 08506124A GB 8506124 A GB8506124 A GB 8506124A GB 2161285 B GB2161285 B GB 2161285B
- Authority
- GB
- United Kingdom
- Prior art keywords
- mercury
- exposing
- light
- semiconductor wafer
- vapor lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70558—Dose control, i.e. achievement of a desired dose
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59139776A JPS6120325A (ja) | 1984-07-07 | 1984-07-07 | 水銀灯による半導体ウエハ−材料の露光方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
GB8506124D0 GB8506124D0 (en) | 1985-04-11 |
GB2161285A GB2161285A (en) | 1986-01-08 |
GB2161285B true GB2161285B (en) | 1988-09-14 |
Family
ID=15253148
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB08506124A Expired GB2161285B (en) | 1984-07-07 | 1985-03-08 | Method of exposing a semiconductor wafer to light from a mercury-vapor lamp |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS6120325A (nl) |
DE (1) | DE3510479C2 (nl) |
FR (1) | FR2567281B1 (nl) |
GB (1) | GB2161285B (nl) |
NL (1) | NL8501934A (nl) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69703380T2 (de) * | 1996-09-19 | 2001-04-26 | Koninklijke Philips Electronics N.V., Eindhoven | Verfahren zur überwachung eines photolithographischen prozesses |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2422280A (en) * | 1944-07-24 | 1947-06-17 | Curtis Helene Ind Inc | Fluorescent illumination |
US4040736A (en) * | 1973-09-12 | 1977-08-09 | Kasper Instruments, Inc. | Step-and-repeat projection alignment and exposure system |
US4024428A (en) * | 1975-05-19 | 1977-05-17 | Optical Associates, Incorporated | Radiation-sensitive control circuit for driving lamp at various power levels |
JPS54108478A (en) * | 1978-02-14 | 1979-08-25 | Ushio Electric Inc | Printing or transcribing method of semiconductor and discharge lamp suitable for printing or transcription |
GB2014335B (en) * | 1978-02-14 | 1982-06-03 | Kasper Instruments | Apparatus for prolonging lamp life by minimizing power requirement levels |
DE2845603C2 (de) * | 1978-10-19 | 1982-12-09 | Censor Patent- und Versuchs-Anstalt, 9490 Vaduz | Verfahren und Einrichtung zum Projektionskopieren |
-
1984
- 1984-07-07 JP JP59139776A patent/JPS6120325A/ja active Pending
-
1985
- 1985-02-28 FR FR8502943A patent/FR2567281B1/fr not_active Expired - Lifetime
- 1985-03-08 GB GB08506124A patent/GB2161285B/en not_active Expired
- 1985-03-22 DE DE19853510479 patent/DE3510479C2/de not_active Expired - Lifetime
- 1985-07-05 NL NL8501934A patent/NL8501934A/nl not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
NL8501934A (nl) | 1986-02-03 |
JPS6120325A (ja) | 1986-01-29 |
DE3510479C2 (de) | 1993-12-23 |
GB2161285A (en) | 1986-01-08 |
FR2567281B1 (fr) | 1991-06-21 |
GB8506124D0 (en) | 1985-04-11 |
FR2567281A1 (fr) | 1986-01-10 |
DE3510479A1 (de) | 1986-01-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PE20 | Patent expired after termination of 20 years |
Effective date: 20050307 |