GB2073414B - Compensating device for an interferometer - Google Patents

Compensating device for an interferometer

Info

Publication number
GB2073414B
GB2073414B GB8109954A GB8109954A GB2073414B GB 2073414 B GB2073414 B GB 2073414B GB 8109954 A GB8109954 A GB 8109954A GB 8109954 A GB8109954 A GB 8109954A GB 2073414 B GB2073414 B GB 2073414B
Authority
GB
United Kingdom
Prior art keywords
prism
compensating device
laser
interferometer
laser interferometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8109954A
Other languages
English (en)
Other versions
GB2073414A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mycronic AB
Original Assignee
Micronic AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronic AB filed Critical Micronic AB
Publication of GB2073414A publication Critical patent/GB2073414A/en
Application granted granted Critical
Publication of GB2073414B publication Critical patent/GB2073414B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB8109954A 1980-04-03 1981-03-31 Compensating device for an interferometer Expired GB2073414B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE8002604A SE445778B (sv) 1980-04-03 1980-04-03 Kompensationsanordning vid en laserinterferometer

Publications (2)

Publication Number Publication Date
GB2073414A GB2073414A (en) 1981-10-14
GB2073414B true GB2073414B (en) 1984-02-15

Family

ID=20340687

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8109954A Expired GB2073414B (en) 1980-04-03 1981-03-31 Compensating device for an interferometer

Country Status (5)

Country Link
US (1) US4385835A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS5710403A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2479974B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB2073414B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
SE (1) SE445778B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2558598B1 (fr) * 1984-01-20 1986-06-20 Commissariat Energie Atomique Interferometre de vitesse a sensibilite continument variable
JPS60253945A (ja) * 1984-05-31 1985-12-14 Matsushita Electric Ind Co Ltd 形状測定装置
US4884697A (en) * 1988-06-21 1989-12-05 Takacs Peter Z Surface profiling interferometer
US5239366A (en) * 1992-02-12 1993-08-24 Huges Aircraft Company Compact laser probe for profilometry
JP4032841B2 (ja) * 2002-06-21 2008-01-16 株式会社島津製作所 二光束干渉計の固定鏡調整方法
DE102005046605A1 (de) * 2005-09-29 2007-04-05 Robert Bosch Gmbh Interferometrische Messeinrichtung
DE102006001732A1 (de) * 2006-01-13 2007-07-19 Robert Bosch Gmbh Interferometrische Messvorrichtung
US20100020331A1 (en) * 2008-07-25 2010-01-28 Micronic Laser Systems Ab Laser interferometer systems and methods with suppressed error and pattern generators having the same
JP6953673B2 (ja) * 2016-08-18 2021-10-27 日本電気株式会社 光測定装置および光軸調整方法
JP6831506B2 (ja) * 2017-11-16 2021-02-17 日本電気株式会社 光測定装置及び光測定方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3520613A (en) * 1966-11-14 1970-07-14 Optomechanisms Inc Interferometer with environmental correction computer
US3809481A (en) * 1972-12-01 1974-05-07 Nasa Single reflector interference spectrometer and drive system therefor
US4053231A (en) * 1975-12-18 1977-10-11 Nasa Interferometer mirror tilt correcting system

Also Published As

Publication number Publication date
SE445778B (sv) 1986-07-14
GB2073414A (en) 1981-10-14
SE8002604L (sv) 1981-10-04
US4385835A (en) 1983-05-31
FR2479974B1 (fr) 1986-08-08
JPH0216442B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-04-17
JPS5710403A (en) 1982-01-20
FR2479974A1 (fr) 1981-10-09

Similar Documents

Publication Publication Date Title
DE59102110D1 (en) Interferometer.
GB2073414B (en) Compensating device for an interferometer
ATE56537T1 (de) Laengenmessvorrichtung nach dem zweistrahl-laser- interferometerprinzip.
EP0433008A3 (en) Laser interferometric measuring apparatus
ATE96902T1 (de) Optischer lagegeber.
WO1991013317A3 (de) Interferometer zur lage- bzw. verschiebewegbestimmung eines beweglichen messspiegels oder dergleichen
GB1392395A (en) Stabilization of optical path length differences
EP0277496A3 (en) Laser interferometer-refractometer
GB1108214A (en) Interferometric measuring system
FR2368055A1 (fr) Interferometre non lineaire
GB2202938B (en) Measuring device employing laser interferometry
JPS5284748A (en) Device for finely adjusting position at which laser light is focused
JPS51151571A (en) Aiming tool of laser beam
GB1010277A (en) Improvements in and relating to optical interforometers
EP0359157A3 (de) Symmetrische zweiarmige Einrichtung zum Messen von Längen mit einem Interferometer
GB1176019A (en) Method of and Apparatus for Measuring Lengths by Optical Interferometry.
JPS5742824A (en) Method and device for sequential determination of light wavelength
FR2432158A1 (fr) Procede et dispositif de mesure de la position d'un plateau circulaire tournant, et du profil exact de ce plateau
SU1213504A1 (ru) Устройство дл фоторазметки линейных шкал
GB2020845A (en) Optical Compensation of Measuring Errors
GB8404808D0 (en) Interferometer spectrometer
RU2008653C1 (ru) Интерференционный рефрактометр
SU1613852A1 (ru) Устройство дл измерени перемещений
JPS53113572A (en) Dispersion characteristic measuring device of optical fiber
GB1495378A (en) Photometer for microscopes

Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee