GB2014355B - Ion sources - Google Patents

Ion sources

Info

Publication number
GB2014355B
GB2014355B GB7904262A GB7904262A GB2014355B GB 2014355 B GB2014355 B GB 2014355B GB 7904262 A GB7904262 A GB 7904262A GB 7904262 A GB7904262 A GB 7904262A GB 2014355 B GB2014355 B GB 2014355B
Authority
GB
United Kingdom
Prior art keywords
ion sources
sources
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7904262A
Other languages
English (en)
Other versions
GB2014355A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Max Planck Gesellschaft zur Foerderung der Wissenschaften
Original Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften
Publication of GB2014355A publication Critical patent/GB2014355A/en
Application granted granted Critical
Publication of GB2014355B publication Critical patent/GB2014355B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
GB7904262A 1978-02-08 1979-02-07 Ion sources Expired GB2014355B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2805273A DE2805273C3 (de) 1978-02-08 1978-02-08 Einrichtung zum Erzeugen eines Strahles beschleunigter Ionen durch Kontaktionisation

Publications (2)

Publication Number Publication Date
GB2014355A GB2014355A (en) 1979-08-22
GB2014355B true GB2014355B (en) 1982-05-12

Family

ID=6031420

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7904262A Expired GB2014355B (en) 1978-02-08 1979-02-07 Ion sources

Country Status (5)

Country Link
US (1) US4246481A (OSRAM)
DE (1) DE2805273C3 (OSRAM)
FR (1) FR2417180A1 (OSRAM)
GB (1) GB2014355B (OSRAM)
IT (1) IT1126168B (OSRAM)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4793961A (en) * 1983-07-26 1988-12-27 The United States Of America As Represented By The Department Of Energy Method and source for producing a high concentration of positively charged molecular hydrogen or deuterium ions
JPS61142645A (ja) * 1984-12-17 1986-06-30 Hitachi Ltd 正，負兼用イオン源
DE3739253A1 (de) * 1987-11-19 1989-06-01 Max Planck Gesellschaft Mit kontaktionisation arbeitende einrichtung zum erzeugen eines strahles beschleunigter ionen
RU2148870C1 (ru) * 1995-05-11 2000-05-10 Институт проблем технологии микроэлектроники и особочистых материалов РАН Способ получения ионных пучков щелочных металлов
US7902529B2 (en) * 2007-08-02 2011-03-08 Thermo Finnigan Llc Method and apparatus for selectively providing electrons in an ion source
FR2984593B1 (fr) * 2011-12-15 2014-09-12 Thales Sa Systeme de detection et de comptage d'ions

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE974827C (de) * 1950-11-17 1961-05-10 Zeiss Carl Fa Einrichtung zum Erzeugen von Ionen mittels einer Gluehanode im Vakuum
NL102697C (OSRAM) * 1956-01-27
US3336475A (en) * 1964-02-05 1967-08-15 Electro Optical Systems Inc Device for forming negative ions from iodine gas and a lanthanum boride contact ionizer surface
FR1402020A (fr) * 1964-04-27 1965-06-11 Csf Perfectionnements aux sources d'ions
DE2333866A1 (de) * 1973-07-03 1975-01-23 Max Planck Gesellschaft Felddesorptions-ionenquelle und verfahren zu ihrer herstellung
GB1574611A (en) * 1976-04-13 1980-09-10 Atomic Energy Authority Uk Ion sources

Also Published As

Publication number Publication date
US4246481A (en) 1981-01-20
GB2014355A (en) 1979-08-22
IT1126168B (it) 1986-05-14
FR2417180A1 (fr) 1979-09-07
DE2805273B2 (de) 1981-06-25
FR2417180B1 (OSRAM) 1983-12-09
IT7983605A0 (it) 1979-02-06
DE2805273A1 (de) 1979-08-09
DE2805273C3 (de) 1982-03-18

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee