IT1126168B - Dispositivo di ionizzazione per contatto per produrre raggi ionici accelerati - Google Patents

Dispositivo di ionizzazione per contatto per produrre raggi ionici accelerati

Info

Publication number
IT1126168B
IT1126168B IT83605/79A IT8360579A IT1126168B IT 1126168 B IT1126168 B IT 1126168B IT 83605/79 A IT83605/79 A IT 83605/79A IT 8360579 A IT8360579 A IT 8360579A IT 1126168 B IT1126168 B IT 1126168B
Authority
IT
Italy
Prior art keywords
ionization device
contact ionization
produce accelerated
ionic rays
accelerated ionic
Prior art date
Application number
IT83605/79A
Other languages
English (en)
Italian (it)
Other versions
IT7983605A0 (it
Inventor
Helmut Liebl
Original Assignee
Max Planck Gesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft filed Critical Max Planck Gesellschaft
Publication of IT7983605A0 publication Critical patent/IT7983605A0/it
Application granted granted Critical
Publication of IT1126168B publication Critical patent/IT1126168B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
IT83605/79A 1978-02-08 1979-02-06 Dispositivo di ionizzazione per contatto per produrre raggi ionici accelerati IT1126168B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2805273A DE2805273C3 (de) 1978-02-08 1978-02-08 Einrichtung zum Erzeugen eines Strahles beschleunigter Ionen durch Kontaktionisation

Publications (2)

Publication Number Publication Date
IT7983605A0 IT7983605A0 (it) 1979-02-06
IT1126168B true IT1126168B (it) 1986-05-14

Family

ID=6031420

Family Applications (1)

Application Number Title Priority Date Filing Date
IT83605/79A IT1126168B (it) 1978-02-08 1979-02-06 Dispositivo di ionizzazione per contatto per produrre raggi ionici accelerati

Country Status (5)

Country Link
US (1) US4246481A (OSRAM)
DE (1) DE2805273C3 (OSRAM)
FR (1) FR2417180A1 (OSRAM)
GB (1) GB2014355B (OSRAM)
IT (1) IT1126168B (OSRAM)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4793961A (en) * 1983-07-26 1988-12-27 The United States Of America As Represented By The Department Of Energy Method and source for producing a high concentration of positively charged molecular hydrogen or deuterium ions
JPS61142645A (ja) * 1984-12-17 1986-06-30 Hitachi Ltd 正，負兼用イオン源
DE3739253A1 (de) * 1987-11-19 1989-06-01 Max Planck Gesellschaft Mit kontaktionisation arbeitende einrichtung zum erzeugen eines strahles beschleunigter ionen
RU2148870C1 (ru) * 1995-05-11 2000-05-10 Институт проблем технологии микроэлектроники и особочистых материалов РАН Способ получения ионных пучков щелочных металлов
US7902529B2 (en) * 2007-08-02 2011-03-08 Thermo Finnigan Llc Method and apparatus for selectively providing electrons in an ion source
FR2984593B1 (fr) * 2011-12-15 2014-09-12 Thales Sa Systeme de detection et de comptage d'ions

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE974827C (de) * 1950-11-17 1961-05-10 Zeiss Carl Fa Einrichtung zum Erzeugen von Ionen mittels einer Gluehanode im Vakuum
NL102697C (OSRAM) * 1956-01-27
US3336475A (en) * 1964-02-05 1967-08-15 Electro Optical Systems Inc Device for forming negative ions from iodine gas and a lanthanum boride contact ionizer surface
FR1402020A (fr) * 1964-04-27 1965-06-11 Csf Perfectionnements aux sources d'ions
DE2333866A1 (de) * 1973-07-03 1975-01-23 Max Planck Gesellschaft Felddesorptions-ionenquelle und verfahren zu ihrer herstellung
GB1574611A (en) * 1976-04-13 1980-09-10 Atomic Energy Authority Uk Ion sources

Also Published As

Publication number Publication date
US4246481A (en) 1981-01-20
GB2014355A (en) 1979-08-22
GB2014355B (en) 1982-05-12
FR2417180A1 (fr) 1979-09-07
DE2805273B2 (de) 1981-06-25
FR2417180B1 (OSRAM) 1983-12-09
IT7983605A0 (it) 1979-02-06
DE2805273A1 (de) 1979-08-09
DE2805273C3 (de) 1982-03-18

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