GB2008849B - Electron beam evaporation device for evaporation coating apparatus - Google Patents

Electron beam evaporation device for evaporation coating apparatus

Info

Publication number
GB2008849B
GB2008849B GB7845224A GB7845224A GB2008849B GB 2008849 B GB2008849 B GB 2008849B GB 7845224 A GB7845224 A GB 7845224A GB 7845224 A GB7845224 A GB 7845224A GB 2008849 B GB2008849 B GB 2008849B
Authority
GB
United Kingdom
Prior art keywords
electron beam
coating apparatus
evaporation
beam evaporation
evaporation device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7845224A
Other languages
English (en)
Other versions
GB2008849A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of GB2008849A publication Critical patent/GB2008849A/en
Application granted granted Critical
Publication of GB2008849B publication Critical patent/GB2008849B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/023—Means for mechanically adjusting components not otherwise provided for
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S159/00—Concentrating evaporators
    • Y10S159/26—Electric field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
GB7845224A 1977-11-22 1978-11-20 Electron beam evaporation device for evaporation coating apparatus Expired GB2008849B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1423577A CH624435A5 (https=) 1977-11-22 1977-11-22

Publications (2)

Publication Number Publication Date
GB2008849A GB2008849A (en) 1979-06-06
GB2008849B true GB2008849B (en) 1982-03-10

Family

ID=4399104

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7845224A Expired GB2008849B (en) 1977-11-22 1978-11-20 Electron beam evaporation device for evaporation coating apparatus

Country Status (8)

Country Link
US (1) US4221629A (https=)
JP (1) JPS5499562A (https=)
CH (1) CH624435A5 (https=)
DE (1) DE2849933C2 (https=)
FR (1) FR2409596A1 (https=)
GB (1) GB2008849B (https=)
IT (1) IT1101171B (https=)
NL (1) NL7800612A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH663037A5 (de) * 1985-02-05 1987-11-13 Balzers Hochvakuum Dampfquelle fuer vakuumbeschichtungsanlagen.
US20050020368A1 (en) * 1998-04-15 2005-01-27 Burkholder Roy A. Bowling lane advertising and method

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE553562A (https=) * 1955-12-20 1900-01-01
US3202794A (en) * 1963-02-18 1965-08-24 Thermionics Lab Inc Permanent magnet transverse electron beam evaporation source
US3277865A (en) * 1963-04-01 1966-10-11 United States Steel Corp Metal-vapor source with heated reflecting shield
US3389210A (en) * 1965-03-29 1968-06-18 Everette M. Whitson Multiple crucible for a permanent magnet transverse electron beam evaporation source
DE1521252B2 (de) * 1966-05-03 1969-10-30 Farbenfabriken Bayer Aktiengesellschaft, 5090 Leverkusen Vorrichtung zum Verdampfen von hochschmelzenden Materialien wie Quarz od. dgl., insbesondere zum Aufdampfen von Schichten
BE754553A (fr) * 1969-08-13 1971-01-18 Leybold Heraeus Verwaltung Procede et dispositif d'evaporation sous vide de corps non metalliques a point de fusion eleve
US3582529A (en) * 1969-09-24 1971-06-01 Air Reduction Electron beam heating apparatus and control system therein
GB1340701A (en) * 1971-04-19 1973-12-12 Craswell K B Apparatus for use in coating a body with an evaporant

Also Published As

Publication number Publication date
JPS5499562A (en) 1979-08-06
NL7800612A (nl) 1979-05-25
IT7829838A0 (it) 1978-11-16
FR2409596A1 (fr) 1979-06-15
GB2008849A (en) 1979-06-06
FR2409596B1 (https=) 1983-12-09
US4221629A (en) 1980-09-09
IT1101171B (it) 1985-09-28
DE2849933A1 (de) 1979-05-23
CH624435A5 (https=) 1981-07-31
DE2849933C2 (de) 1983-01-20

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee