JPS5222547A - Electron beam device - Google Patents

Electron beam device

Info

Publication number
JPS5222547A
JPS5222547A JP50098997A JP9899775A JPS5222547A JP S5222547 A JPS5222547 A JP S5222547A JP 50098997 A JP50098997 A JP 50098997A JP 9899775 A JP9899775 A JP 9899775A JP S5222547 A JPS5222547 A JP S5222547A
Authority
JP
Japan
Prior art keywords
electron beam
beam device
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50098997A
Other languages
Japanese (ja)
Other versions
JPS5421038B2 (en
Inventor
Shigeo Sasaki
Takashi Niwa
Masakazu Taki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP50098997A priority Critical patent/JPS5222547A/en
Publication of JPS5222547A publication Critical patent/JPS5222547A/en
Publication of JPS5421038B2 publication Critical patent/JPS5421038B2/ja
Granted legal-status Critical Current

Links

JP50098997A 1975-08-14 1975-08-14 Electron beam device Granted JPS5222547A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50098997A JPS5222547A (en) 1975-08-14 1975-08-14 Electron beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50098997A JPS5222547A (en) 1975-08-14 1975-08-14 Electron beam device

Publications (2)

Publication Number Publication Date
JPS5222547A true JPS5222547A (en) 1977-02-19
JPS5421038B2 JPS5421038B2 (en) 1979-07-27

Family

ID=14234604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50098997A Granted JPS5222547A (en) 1975-08-14 1975-08-14 Electron beam device

Country Status (1)

Country Link
JP (1) JPS5222547A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58102107A (en) * 1981-12-15 1983-06-17 Fujitsu Ltd Distance measuring method
JPS58132892A (en) * 1982-01-30 1983-08-08 株式会社ニコン Photoelectric type encoder
JPH01117709U (en) * 1988-09-08 1989-08-09

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58102107A (en) * 1981-12-15 1983-06-17 Fujitsu Ltd Distance measuring method
JPS58132892A (en) * 1982-01-30 1983-08-08 株式会社ニコン Photoelectric type encoder
JPH0216848B2 (en) * 1982-01-30 1990-04-18 Nippon Kogaku Kk
JPH01117709U (en) * 1988-09-08 1989-08-09
JPH0216257Y2 (en) * 1988-09-08 1990-05-02

Also Published As

Publication number Publication date
JPS5421038B2 (en) 1979-07-27

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