GB1594800A - Etching method for forming microstructures - Google Patents

Etching method for forming microstructures Download PDF

Info

Publication number
GB1594800A
GB1594800A GB1498778A GB1498778A GB1594800A GB 1594800 A GB1594800 A GB 1594800A GB 1498778 A GB1498778 A GB 1498778A GB 1498778 A GB1498778 A GB 1498778A GB 1594800 A GB1594800 A GB 1594800A
Authority
GB
United Kingdom
Prior art keywords
etching
recesses
approximately
mask
microstructures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1498778A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of GB1594800A publication Critical patent/GB1594800A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Weting (AREA)
GB1498778A 1977-04-20 1978-04-17 Etching method for forming microstructures Expired GB1594800A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19772717400 DE2717400C2 (de) 1977-04-20 1977-04-20 Ätzverfahren zur Herstellung von Strukturen unterschiedlicher Höhe

Publications (1)

Publication Number Publication Date
GB1594800A true GB1594800A (en) 1981-08-05

Family

ID=6006737

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1498778A Expired GB1594800A (en) 1977-04-20 1978-04-17 Etching method for forming microstructures

Country Status (4)

Country Link
JP (1) JPS54584A (de)
DE (1) DE2717400C2 (de)
FR (1) FR2388057A1 (de)
GB (1) GB1594800A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002077387A1 (en) * 2001-03-23 2002-10-03 Voon Kwong Tien A floor surface and a method of treatment thereof

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5656636A (en) * 1979-10-13 1981-05-18 Mitsubishi Electric Corp Processing method of fine pattern
DE2951376C2 (de) * 1979-12-20 1983-09-15 Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt Verfahren zur Erzeugung einer Kernspur oder einer Vielzahl von Kernspuren von schweren Ionen und von aus den Kernspuren durch Ätzung gebildeten Mikrolöchern, sowie Vorrichtung zur Durchführung des Verfahrens
DE2951287A1 (de) * 1979-12-20 1981-07-02 Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt Verfahren zur herstellung von ebenen oberflaechen mit feinsten spitzen im mikrometer-bereich
JPS601778U (ja) * 1983-06-17 1985-01-08 フジテツク株式会社 エレベ−タ用つり合ロ−プの張り車
DE3337227A1 (de) * 1983-10-13 1985-04-25 Gesellschaft für Schwerionenforschung mbH Darmstadt, 6100 Darmstadt Verfahren zum bestimmen des durchmessers von mikroloechern

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979470A (de) * 1972-12-04 1974-07-31
JPS5037370A (de) * 1973-08-06 1975-04-08
DE2458370C2 (de) * 1974-12-10 1984-05-10 Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel Energiestrahl-Gravierverfahren und Einrichtung zu seiner Durchführung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002077387A1 (en) * 2001-03-23 2002-10-03 Voon Kwong Tien A floor surface and a method of treatment thereof

Also Published As

Publication number Publication date
DE2717400B1 (de) 1978-10-26
FR2388057A1 (fr) 1978-11-17
DE2717400C2 (de) 1979-06-21
JPS54584A (en) 1979-01-05

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee